Opaque low reflecting coating aperture on glass

• US 6,071,616 A
• Filed: 12/01/1997
• Issued: 06/06/2000
• Est. Priority Date: 12/05/1996
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Chen, Ching-Tai, Sulzbach, Frank C.
• Primary Examiner(s): TURNER, ARCHENE A
• Application Number:
  US08/982,976
• Time in Patent Office: 918 Days
• Field of Search: 428/408, 428/701, 428/702, 428/472, 428/469, 428/426, 428/212, 359/237, 359/321, 359/585, 359/589
• US Class Current: 428/408
• CPC Class Codes: G02B 1/11 Anti-reflection coatings
• CPC Class Codes: G02F 1/133502 Antiglare, refractive index matching layers
• CPC Class Codes: G02F 1/133512 Light shielding layers, e.g. black matrix G02F1/136209 takes precedence
• CPC Class Codes: G02F 1/1351 Light-absorbing or blocking layers
• CPC Class Codes: G02F 2203/12 spatial light modulator
• CPC Class Codes: Y10T 428/24942 including components having same physical characteristic in differing degree
• CPC Class Codes: Y10T 428/30 Self-sustaining carbon mass or layer with impregnant or other layer

Abstract

A glass surface with a low reflectance opaque aperture coating (12). In one example the coating has two layers, in another the coating has three layers. In a third example the coating includes a filter layer structure(36). The coating can be deposited onto the glass or an antireflective coating (14). A process is included in which the opaque coating is formed. The process includes depositing the coating on an antireflective coating, then patterning and etching the opaque coating to define a clear aperture area.

Claims

1. A glass surface used with a spatial light modulator array operable to transmit light, comprised of:

an antireflective coating on at least one side of a glass surface;

an opaque coating on said antireflective coating, said opaque coating having at least two layers and a photopic reflectance of less than 10%.

2. The surface of claim 1 wherein said opaque coating comprises three layers.

3. The surface of claim 2 wherein said three layers include an yttrium oxide layer on said antireflective coating, a graphite layer on said yttrium oxide layer and a carbon layer on said graphite layer.

4. The surface of claim 1 wherein said opaque coating includes a filter layer on said antireflective coating.

5. The surface of claim 4 wherein said filter layer includes a first titanium dioxide layer on said antireflective coating, a silicon dioxide layer on said first titanium dioxide layer, and a second titanium dioxide layer on said silicon dioxide layer.

6. The surface of claim 2 wherein said three layers include a titanium monoxide layer on said antireflective coating, a germanium layer on said titanium monoxide layer and a titanium layer on said germanium layer.

7. The surface of claim 1 wherein said opaque coating comprises two layers.

8. The surface of claim 7 wherein said two layers include an yttrium oxide layer on said antireflective coating, and a germanium layer on said yttrium oxide layer.

9. The surface of claim 7 wherein said two layers include a carbon layer on said antireflective coating and a graphite layer on said carbon layer.

10. An apparatus comprising:

a first layer made of a material having a high transmittance for light, said first layer having first and second portions; and

a second layer disposed on a first side of said first layer in alignment with said second portion of said first layer, said second layer being opaque and having a radiometric reflectance which is greater than a predetermined percentage for radiation impinging on said second layer in a direction from a second side of said first layer opposite from said first side thereof.

11. An apparatus according to claim 10, wherein said predetermined percentage is 8%.

12. An apparatus according to claim 10, wherein said second layer has a photopic reflectance which is less than a predetermined percentage for the radiation impinging on said second layer in said direction.

13. An apparatus according to claim 12, wherein said predetermined percentage for said photopic reflectance is 10%.

14. An apparatus according to claim 13, wherein said predetermined percentage for said radiometric reflectance is 8%.

15. An apparatus according to claim 12, wherein said second layer includes a titanium monoxide layer on a side thereof nearest said first layer, a germanium layer on said titanium monoxide layer, and a titanium layer on said germanium layer.

16. An apparatus according to claim 12, wherein said second layer includes an yttrium oxide layer on a side thereof nearest said first layer, and a germanium layer on said yttrium oxide layer.

17. An apparatus according to claim 12, wherein said second layer includes a carbon layer on a side thereof nearest said first layer, and a hard graphite layer on said carbon layer.

18. An apparatus according to claim 12, wherein said second layer includes a carbon layer.

19. An apparatus according to claim 12, including a filter layer disposed between said second layer and said second portion of said first layer.

20. An apparatus according to claim 19, wherein said filter layer includes a titanium dioxide layer on a side thereof nearest said first layer, a silicon dioxide layer on said titanium dioxide layer, and a further titanium dioxide layer on said silicon layer.

21. An apparatus according to claim 10, wherein said second layer has a low reflectance for radiation impinging on said second layer in a direction from a side thereof opposite from said first layer.

22. An apparatus according to claim 10, wherein said first layer is made of a glass material, and wherein said second layer and said second portion of said first layer extend around said first portion of said first layer.

23. An apparatus according to claim 10, including an antireflective coating disposed on said first side of said first layer, said second layer being disposed on a side of said coating remote from said first layer.

24. An apparatus according to claim 10, including an antireflective coating disposed on said first side of said first layer, said second layer being disposed between said coating and said second portion of said first layer.

25. An apparatus according to claim 10, including a spatial light modulator array which is spaced from said first and second layers and which is disposed on a side of said second layer remote from said first layer, wherein light traveling in said direction can pass through said first portion of said first layer and reach said array.