Semiconductor memory device and method for fabricating the same

• US 6,071,770 A
• Filed: 05/15/1998
• Issued: 06/06/2000
• Est. Priority Date: 09/25/1996
• Status: Expired due to Term

• Current Assignee: LG Semico Company Limited (SK Hynix Inc.)
• Original Assignee: LG Semico Company Limited (SK Hynix Inc.)
• Inventors: Roh, Jae Sung
• Primary Examiner(s): Niebling, John F.
• Assistant Examiner(s): NGUYEN, HA T
• Application Number:
  US09/079,263
• Time in Patent Office: 753 Days
• Field of Search: 438/240, 438/239, 438/238, 438/636, 438/637, 438/643, 438/647, 438/653, 438/675, 438/685, 257/296, 257/532, 257/751, 257/754, 257/767, 257/774
• US Class Current: 438/240
• CPC Class Codes: H01L 21/76849 the layer being positioned on top of the main fill metal
• CPC Class Codes: H01L 21/76858 by diffusing alloying elements
• CPC Class Codes: H01L 21/76867 characterized by methods of formation other than PVD, CVD or deposition from a liquids PVD H01L21/2855; CVD H01L21/28556; deposition from liquids H01L21/288
• CPC Class Codes: H01L 21/7687 Thin films associated with contacts of capacitors
• CPC Class Codes: H01L 28/60 Electrodes
• CPC Class Codes: H10B 12/033 the capacitor extending over the transistor

Abstract

A semiconductor memory device suitable for forming a capacitor using a high dielectric film for a highly integrated semiconductor device includes a semiconductor substrate, an insulating film having a contact hole, the insulating film being over the semiconductor substrate, a conductive film on the semiconductor substrate through the contact hole, the conductive film having a top portion acting as a diffusion barrier, a first electrode over the conductive films, a dielectric film over the first electrode, and a second electrode over the dielectric film.

Claims

1. A method for fabricating a semiconductor memory device having a capacitor on a semiconductor substrate, the method comprising the steps of:

forming an insulating film having a contact hole over the semiconductor substrate;

forming a first conductive layer on the semiconductor substrate through the contact hole;

forming a diffusion barrier having a first portion within the contact hole and a second portion extending out from the contact hole and having a width the same as the contact hole, the diffusion barrier being formed on the first conductive layer;

forming a first electrode on the diffusion barrier the first electrode completely covering an exposed portion of the diffusion barrier;

forming a dielectric film on the first electrode and on the insulating film; and

forming a second electrode on the dielectric film.

2. The method according to claim 1, wherein the step of forming the conductive film includes the steps of:

forming a first conductive layer on the semiconductor substrate; and

forming a second conductive layer on the first conductive layer.

3. The method according to claim 1, wherein the step of forming the diffusion barrier includes the step of:

forming a second conductive layer on the first conductive layer forming a third conductive layer on the second conductive layer; and

forming the diffusion barrier from a portion of the second conductive layer and a portion of the third conductive layer.

4. The method according to claim 1, wherein the step of forming the second conductive layer includes the step of forming the second conductive layer directly from a portion of the first conductive layer.

5. A method for fabricating a semiconductor memory device having a capacitor on a semiconductor substrate, the method comprising the steps of:

forming an insulating film on the semiconductor substrate;

patterning the insulating film to form a contact hole therein;

forming a first conductive film on the semiconductor substrate through the contact hole;

forming a second conductive film directly from a portion of the first conductive film;

forming a third conductive film on the second conductive film and on the insulating film;

forming a diffusion barrier from a portion of the second conductive film and a portion of the third conductive film, the diffusion barrier having a first portion within the contact hole and a second portion extending out from the contact hole and having a width the same as the contact hole;

removing the third conductive film leaving the diffusion barrier;

forming a first electrode on the diffusion barrier and on the insulating film, the first electrode completely covering an exposed portion of the diffusion barrier;

forming a dielectric film on the first electrode and on the insulating film; and

forming a second electrode on the dielectric film.

6. The method according to claim 5, wherein the step of forming the first conductive film includes the steps of:

depositing the first conductive film on the semiconductor substrate and on the insulating film; and

removing a portion of the first conductive film deposited on the insulating film.

7. The method according to claim 5, wherein the step of forming the second conductive film includes the step of exposing the first conductive film to a WF₆ gas to transform a portion of the first conductive film to the second conductive film.

8. The method according to claim 5, wherein the step of forming the diffusion barrier includes the step of annealing the third conductive film and the second conductive film to transform portions of the third conductive film and the second conductive film to the diffusion barrier.

9. The method according to claim 5, wherein the third conductive film is formed with a material including titanium.

10. The method according to claim 5, wherein the step of removing the third conductive film includes the step of wet etching the third conductive film using an NH₄ OH:

H₂ O₂ ;

H₂ O solution.

11. The method according to claim 5, wherein the first electrode is formed with a material including platinum.

12. The method according to claim 5, wherein the dielectric film is formed with a material including at least one of PZT, PLZT, BST, BaTiO₃, and SrTiO₃.

13. The method according to claim 5, wherein the first conductive film is formed with a material including polysilicon.

14. The method according to claim 5, wherein the second conductive film is formed with a material including tungsten.

15. A method for fabricating a semiconductor memory device having a capacitor on a semiconductor substrate, the method comprising the steps of:

depositing an insulating film on the semiconductor substrate;

patterning the insulating film to form a contact hole therein;

depositing a polysilicon film on the semiconductor substrate and on the insulating film;

removing the polysilicon film on the insulating film;

transforming a portion of the polysilicon film to a tungsten film;

forming a titanium film on the tungsten film and on the insulating film;

annealing the titanium film and the tungsten film to form a titanium tungsten film;

removing a portion of the titanium film on the insulating film and on the titanium tungsten film, wherein the titanium tungsten film has a first portion within the contact hole and a second portion extending out from the contact hole and having a width the same as the contact hole;

depositing a platinum film on the titanium tungsten film and the insulating film;

patterning the platinum film to cover completely an exposed titanium tungsten film;

depositing a dielectric film on the platinum film and the insulating film;

patterning the dielectric film to cover an exposed platinum layer;

depositing a second electrode on the dielectric film and the insulating film; and

patterning the second electrode to cover an exposed dielectric film.

16. The method according to claim 15, wherein the dielectric film in the step of depositing the dielectric film includes at least one of PZT, PLZT, BST, BaTiO₃, and SrTiO₃ layer.

17. The method according to claim 15, wherein the transforming step includes the step of exposing the portion of the polysilicon film to WF₆ gas.