Thin film metal/metal oxide thermocouple
First Claim
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1. A thermocouple assembly for temperature sensing, comprisinga first lead made of a conductive metal,a second lead made of a conductive metal oxide, and joining the first lead to form a metal/metal oxide thermocouple junction,the first and second leads being formed on a non-conducting substrate as a thin film structure for measuring temperature at a point on the substrate at the thermocouple junction.
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Abstract
A thin film thermocouple having junctions (2, 7) of metal and semiconducting metal oxides such as tin oxide/silver, and used as surface temperature sensors in conjunction with thin film heating elements (1) to control temperature.
73 Citations
18 Claims
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1. A thermocouple assembly for temperature sensing, comprising
a first lead made of a conductive metal, a second lead made of a conductive metal oxide, and joining the first lead to form a metal/metal oxide thermocouple junction, the first and second leads being formed on a non-conducting substrate as a thin film structure for measuring temperature at a point on the substrate at the thermocouple junction.
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6. A resistance heater comprising
an electrically conductive printed heating element having a heating surface and comprising a first conductive material; -
first and second printed electrical leads comprising a second conductive material, wherein one of said printed heating element and said first and second printed electrical leads is made of a conductive metal oxide, the first and second printed electrical leads connected to opposite edges of the heating element to form first and second metal/metal oxide thermocouple junctions with the heating element;
said first and second electrical leads coupleable to a voltage source to heat said heating element and an object in contact with said heating surface;a third electrical lead comprising said first conductive material connected to the heating element at a location between the first and second electrical leads; and wherein during absence of said voltage source, said first and second thermocouple junctions create a potential measurable with respect to said third electrical lead, said potential being proportional to temperature of said heating surface. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of controlling temperature of a resistance heater that includes a heating element made of a first conductive material that defines a temperature sensing lead, and includes first and second electrical heating leads each made of a conductive material different from the first conductive material and disposed on opposite sides of the temperature sensing lead, the method comprising the steps of:
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in a heating mode, providing a heating electrical potential across the first and second electrical heating leads to heat the resistance heater and an object in thermal contact therewith; in a temperature sensing mode, ceasing to provide the heating electrical potential and measuring the potential developed between the temperature sensing lead and at least one of the first and the second electrical heating leads, the measured potential providing a measure of temperature of the resistance heater; and using the measured potential to control effective magnitude of the heating electrical potential to control temperature of the resistance heater. - View Dependent Claims (16, 17, 18)
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Specification