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Thin film metal/metal oxide thermocouple

  • US 6,072,165 A
  • Filed: 07/01/1999
  • Issued: 06/06/2000
  • Est. Priority Date: 07/01/1999
  • Status: Expired due to Term
First Claim
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1. A thermocouple assembly for temperature sensing, comprisinga first lead made of a conductive metal,a second lead made of a conductive metal oxide, and joining the first lead to form a metal/metal oxide thermocouple junction,the first and second leads being formed on a non-conducting substrate as a thin film structure for measuring temperature at a point on the substrate at the thermocouple junction.

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