Micromachined rotating integrated switch

• US 6,072,686 A
• Filed: 12/11/1998
• Issued: 06/06/2000
• Est. Priority Date: 12/11/1998
• Status: Expired due to Fees

• Current Assignee: Aerospace Corporation
• Original Assignee: Aerospace Corporation
• Inventors: Yarbrough, Allyson D.
• Primary Examiner(s): FLEMING, FRITZ M
• Application Number:
  US09/210,515
• Time in Patent Office: 543 Days
• Field of Search: 361/230-235, 200/181
• US Class Current: 361/234
• CPC Class Codes: H01H 2001/0078 with parallel movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H01P 1/127 Strip line switches

Abstract

A microelectromechanical system (MEMS) switch has a bidirectionally rotating member having two positions for integrated circuit connection. The switch is formed on a circular standoff bearing for rotating the switch in the plane of the substrate using conventional processing techniques. Control traces carry electrical signals generating electrical fields to provide an electro-static force upon the rotating switch member to rotate the switch clockwise or counter-clockwise to position and maintain it in either of two positions. The MEMS switch has wide applications to a variety of microelectromechanical system circuit applications.

Claims

1. A switch for providing electrical connections on a substrate, the switch comprising,

a first input trace disposed on the substrate,

a first output trace disposed on the substrate,

a retaining structure disposed on the substrate,

a first control trace disposed on the substrate for carrying a first electrostatic signal,

a second control trace disposed on the substrate for carrying a second electrostatic signal,

a rotating member integrally having a circular standoff bearing disposed on the substrate, the rotating member entirely supported by the circular standoff bearing for bidirectionally rotating and maintaining the rotating member between a first position and a second position, the rotating member rotating about the retaining structure and rotating with the circular standoff bearing, the rotating member is rotated to the first position when the first electrostatic signal is active and rotated to the second position when the second electrostatic signal is active, the rotating member connects the first input trace to the first output trace when in the first position and disconnects the first input trace from the first output trace when in the second position.

2. The switch of claim 1 further comprising,

a nitride layer disposed on the substrate for electrically isolating the rotating member from the substrate.

3. The switch of claim 1 further comprising,

a second input trace disposed on the substrate,

a second output trace disposed on the substrate, the rotating member connects the second input trace to the second output trace when in the second position and disconnects the second input trace from the second output trace when in the first position.

4. The switch of claim 1 further comprising,

a first stop disposed on the substrate for stopping the rotation of the rotating member at the first position when the first electrostatic signal is active.

5. The switch of the claim 1 further comprising,

a second stop disposed on the substrate for stopping the rotation of the rotating member at the second position when the second electrostatic signal is active.

6. The switch of claim 1 further comprising,

a first contact disposed in the rotating switch member at a first point,

a second contact disposed in the rotating switch member at a second point, the first contact provides electrical connection between the rotating switch member and the first input trace, the second contact provides electrical connection between the rotating switch member and the first output trace, both for enhancing electrical conduction through the rotating switch member between the first input trace and the first output trace.