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Fluid flow module

  • US 6,073,482 A
  • Filed: 01/20/1999
  • Issued: 06/13/2000
  • Est. Priority Date: 07/21/1997
  • Status: Expired due to Term
First Claim
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1. A module having fluid flow channels therein in fluid communication with a diaphragm valve, said module, comprising first, second and third interfacially superposed sheets of adhesiveless self-bondable thermoset polyimide directly bonded to one another without an adhesive, at least one fluid flow channel formed at the interface of said first and second sheets, said fluid flow channel being in fluid communication with a valve region on an outer surface of at least one of said first and second sheets, said third polyimide sheet being superposed over said valve region, the portion of said polyimide sheet overlying said valve region being capable of functioning as said diaphragm valve.

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