Microfabricated torsional cantilevers for sensitive force detection

• US 6,073,484 A
• Filed: 07/19/1996
• Issued: 06/13/2000
• Est. Priority Date: 07/20/1995
• Status: Expired due to Term

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Inventors: Xu, Yang, Miller, Scott A., MacDonald, Noel C.
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US08/683,929
• Time in Patent Office: 1,425 Days
• Field of Search: 73/105, 73/514.21, 73/514.23, 73/514.32, 73/514.36, 73/514.37, 250/306, 250/307
• US Class Current: 73/105
• CPC Class Codes: G01B 5/28 for measuring roughness or irregularity of surfaces
• CPC Class Codes: G01P 15/0894 by non-contact electron transfer, i.e. electron tunneling
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
• CPC Class Codes: G01Q 70/16 Probe manufacture
• CPC Class Codes: Y10S 977/873 Tip holder

Abstract

A torsional cantilever is microfabricated for reduced size to increase its resonance frequency, increase its scanning speed, and permit fabrication of large numbers in an array to provide parallel scanning. The cantilever may incorporate a tip for highly sensitive force detection. The device preferably includes a cantilever arm and a counterbalance mounted on opposite sides of a laterally extending torsional beam fixed at its outer ends. Sensors detect rotation of the cantilever arm and may provide control of sensor locator through a feedback loop.

Claims

1. A compact, low mass force detector, comprising:

a microfabricated support beam having first and second ends mounted to a substrate;

a moment arm extending from said support beam, said moment arm and said support beam being generally perpendicular to each other and coplanar, said moment arm being comprised of a rigid grid of microfabricated beams and being responsive to a force applied thereto to produce a corresponding torsional force on said support beam;

motion control means for said moment arm; and

means for measuring said force applied to said moment arm.

2. The detector of claim 1, further including a nanometer-scale sensing tip carried by said moment arm.

3. The detector of claim 2, further including a frame supporting said support beam in said substrate for motion in X and Y directions in the plane of said moment arm and support beam, said moment arm being movable in a Z direction out of said plane to produce said torsional force on said support beam, whereby said tip is movable in said X,Y and Z directions.

4. The detector of claim 3, wherein said frame supports a multiplicity of said moment arms and corresponding support beams to provide an array of tips.

5. The detector of claim 2, wherein said moment arm is symmetrical with respect to said support beam and said tip is offset from said support beam to provide a high degree of sensitivity to a force applied to said tip.

6. The detector of claim 2, wherein said moment arm is asymmetrical with respect to said support beam to provide a high degree of sensitivity to a force applied to said moment arm.

7. The detector of claim 2, wherein said motion control means is located to apply a force to said moment arm which urges said tip out of said plane to enable said tip to track a sample surface.

8. The detector of claim 1, wherein said means for measuring said force applied to said moment arm comprises means for measuring torsional stress in said support beam.

9. The detector of claim 8, wherein said means for measuring stress comprises a piezoresistor in said support beam.

10. The detector of claim 8, wherein said means for measuring stress comprises a diode in said support beam.

11. The detector of claim 8, wherein said means for measuring stress comprises a transistor.

12. The detector of claim 1, wherein said microfabricated beams in said grid have high aspect ratios to resist bending motion in a direction out of said plane, said rigid grid resisting bending motion in said plane, whereby force applied to said moment arm produces said torsional stress in said support beam.

13. The detector of claim 1, further including a counterbalance extending from said support beam to produce a torsional force on said support beam which is opposed to the torsional force produced by said moment arm.

14. The detector of claim 13, wherein said support beam, moment arm and counterbalance are a unitary structure.

15. The detector of claim 13, wherein said motion control means comprises a metal layer on said moment arm and on said counterweight, and a stationary electrode adjacent each of said moment arm and said counterweight.

16. The detector of claim 15, wherein said metal layer and said stationary electrode form comb-type capacitive elements.

17. A force sensor, comprising:

a single-crystal silicon substrate;

a torsionally-mounted cantilever including a moment arm and a support beam formed from said substrate and integral therewith, said cantilever moment arm being moved about said support beam with respect to said substrate in response to a force to be measured; and

detector means including plural stationary electrode fingers on said substrate capacitively coupled to plural movable electrode fingers on said moment arm and interleaved with said stationary fingers for detecting motion of said moment arm.

18. The force sensor of claim 17, wherein said cantilever has a predetermined spring constant, and further including a capacitor adjacent said support beam for adjusting said spring constant.

19. The force sensor of claim 17, wherein said cantilever has a predetermined spring constant and further including means for adjusting said spring constant.

20. The force sensor of claim 17, wherein said capacitor fingers comprise partially oxidized single crystal silicon.

21. The force sensor of claim 20, wherein each of said capacitor fingers includes plural spaced partially oxidized segments located in alignment with corresponding nonoxidized segments in an adjacent finger.

22. The force sensor of claim 17, further including an integral sensor tip on said moment arm.

23. A force sensor comprising:

a single-crystal silicon substrate;

a torsionally-mounted cantilever including a moment arm, a counterweight, and a support beam formed from and integral with said substrate, said moment arm and said counterweight being coplanar with, perpendicular to, and extend in opposite directions from said support beam, and are movable with respect to said substrate, said cantilever arm being movable with respect to said substrate in response to a force to be measured to twist said support beam and wherein said cantilever is fabricated from said substrate in the form of single crystal silicon beams having cross-sectional aspect ratios of about 10 to 1, to provide mechanical rigidity in the direction of forces applied to said moment arm; and

detector means for detecting said motion.

24. The force sensor of claim 23, further including driver means for electrically controlling twisting of said support beam.

25. The force sensor of claim 24, wherein said driver means is a capacitor.

26. The force sensor of claim 23, further including driver means for electrically controlling motion of said moment arm.

27. The force sensor of claim 26, wherein said driver means is a comb capacitor.

28. A force sensor, comprising:

a single-crystal silicon substrate;

a movable frame carried by said substrate;

a torsionally-mounted cantilever including a moment arm and a support beam, said support beam including first and second ends secured to said frame, said cantilever moment arm being moved about said support beam with respect to said frame in response to a force to be measured; and

detector means for detecting motion of said moment arm.

29. The force sensor of claim 28, further including multiple support beams mounted on said frame, each of said support beams including a corresponding moment arm to form an array of cantilevers torsionally mounted within said frame.

30. The force sensor of claim 29, wherein each cantilever is mounted for independent motion with respect to said frame.

31. The force sensor of claim 28, wherein said detector means includes a piezoresistive sensor responsive to torsional forces applied to said support beam.

32. The force sensor of claim 28, wherein said detector means includes a pn junction responsive to torsional stress in said support beam.

33. The force sensor of claim 28, further including drive means for moving said movable frame in a plane, said cantilever moment arm being moved in a direction substantially perpendicular to said plane.

34. The force sensor of claim 28, wherein said support beam, said moment arm and said frame are coplanar, said moment arm being urged in a direction substantially perpendicular to said plane by a force to be measured.

35. The force sensor of claim 34, further including driving means for selectively moving said frame in said plane.