Electrode for plasma processes and method for manufacture and use thereof
First Claim
1. An electrode assembly useful for a plasma reaction chamber used in semiconductor substrate processing, comprising:
- a support member having a bonding surface;
an RF driven electrode having an RF powered surface on one side thereof and a bonding surface at an outer edge on an opposite side thereof engaging the bonding surface of the support member; and
an elastomeric joint between the outer edge of the electrode and the support member, the elastomeric joint resiliently attaching the electrode to the support member so as to allow movement between the electrode and the support member during temperature cycling thereof.
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Accused Products
Abstract
An electrode assembly for a plasma reaction chamber wherein processing of a semiconductor substrate such as a single wafer can be carried out, a method of manufacture of the electrode assembly and a method of processing a semiconductor substrate with the assembly. The electrode assembly includes a support member such as a graphite ring, an electrode such as a silicon showerhead electrode in the form of a circular disk of uniform thickness and an elastomeric joint between the support member and the electrode. The elastomeric joint allows movement between the support member and the electrode to compensate for thermal expansion as a result of temperature cycling of the electrode assembly. The elastomeric joint can include an electrically and/or thermally conductive filler and the elastomer can be a catalyst-cured polymer which is stable at high temperatures.
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Citations
9 Claims
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1. An electrode assembly useful for a plasma reaction chamber used in semiconductor substrate processing, comprising:
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a support member having a bonding surface; an RF driven electrode having an RF powered surface on one side thereof and a bonding surface at an outer edge on an opposite side thereof engaging the bonding surface of the support member; and an elastomeric joint between the outer edge of the electrode and the support member, the elastomeric joint resiliently attaching the electrode to the support member so as to allow movement between the electrode and the support member during temperature cycling thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification