Semiconductor device inhibiting parasitic effects during electrostatic discharge

• US 6,075,271 A
• Filed: 03/03/1998
• Issued: 06/13/2000
• Est. Priority Date: 03/03/1998
• Status: Expired due to Term

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Smith, Jeremy C.
• Primary Examiner(s): Saadat, Mahshid
• Assistant Examiner(s): Fenty, Jesse A.
• Application Number:
  US09/033,752
• Time in Patent Office: 833 Days
• Field of Search: 257/373, 257/375, 257/376, 257/394, 257/372, 257/900, 257/355
• US Class Current: 257/373
• CPC Class Codes: H01L 27/0266 using field effect transistors as protective elements

Abstract

A semiconductor device (10) having a stacked-gate buffer (30) wherein the stacked-gate buffer (30) has a substrate (65) and a top substrate region (70) both with the same first conductivity type. The buffer (30) also has two transistors (95.105), each with a current carrying electrode and a control electrode (90, 100). A deep doped region (120) lies between the first (90) and second (100) control electrodes where the deep doped region (120) is another current carrying electrode for the first transistor (95) and another current carrying electrode for the second transistor (105) and the deep doped region (120) has a second conductivity that is opposite the first conductivity type. A deeper doped region (80) is also part of the stacked-gate buffer which has a second conductivity type and lies between the first (90) and second (100) control electrodes and is deeper than the deep doped region (120). A method of forming the device is also provided herein.

Claims

1. A semiconductor device having a buffer, wherein said buffer comprises:

a substrate having a first conductivity type, wherein;

said substrate includes a first portion overlying a second portion;

said first and second portions have said first conductivity type; and

said first portion has a lower doping concentration compared to said second portion;

a top substrate region having said first conductivity type;

a first transistor having a first current carrying electrode and a first control electrode;

a second transistor having a second current carrying electrode and a second control electrode;

at least one deep doped region lying between said first and second control electrodes,

wherein said at least one deep doped region;

is another current carrying electrode for said first transistor and another current carrying electrode for said second transistor; and

has a second conductivity type that is opposite said first conductivity type; and

a deeper doped region having said second conductivity type, wherein said deeper doped region;

lies between said first and second control electrodes;

is deeper than said at least one deep doped region; and

said deeper doped region extends at least to said second portion;

said first and second portions have said first conductivity type; and

said first portion has a lower doping concentration compared to said second portion.

2. The semiconductor device of claim 1, wherein said buffer is a stacked-gate buffer.

3. The semiconductor device of claim 1, wherein:

said first and second transistors are field-effect transistors;

said first current carrying electrode is a source region;

said second current carrying electrode is a drain region; and

said first and second control electrodes are gate electrodes.

4. The semiconductor device of claim 1, wherein said deeper doped region is at least approximately 0.5 um deep, and wherein said at least one deep doped region is no more than approximately 0.3 um deep.

5. The semiconductor device of claim 1, wherein said deeper doped region is at least approximately 1.5 times deeper than at least one deep doped region.

6. The semiconductor device of claim 1, further comprising:

a pad that is electrically connected to said second current carrying electrode of said second transistor; and

a first power supply electrically connected to said first current carrying electrode of said first transistor.

7. The semiconductor device of claim 1, wherein said first and second current carrying electrodes include salicide regions.