Producing thin film photovoltaic modules with high integrity interconnects and dual layer contacts
First Claim
1. A process for producing photovoltaic modules, comprising the steps of:
- positioning a front contact on a substrate;
depositing at least one amorphous silicon-containing thin film semiconductor on said front contact;
depositing a transparent conductive layer of a dual layer back contact on said amorphous silicon-containing thin film semiconductor;
simultaneously laser scribing said transparent conductive layer of said dual layer back contact and said amorphous silicon-containing thin film semiconductor to form a trench through said transparent conductive layer of said dual layer contact and said amorphous silicon-containing thin film semiconductor; and
immediately thereafter;
depositing a layer of metal on said transparent conductive layer of said dual layer back contact and simultaneously filling said trench with said metal to form an interconnect extending between and connecting said front contact and said dual layer back contact.
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Accused Products
Abstract
High performance photovoltaic modules are produced with improved interconnects by a special process. Advantageously, the photovoltaic modules have a dual layer back (rear) contact and a front contact with at least one layer. The front contact and the inner layer of the back contact can comprise a transparent conductive oxide. The outer layer of the back contact can comprise a metal or metal oxide. The front contact can also have a dielectric layer. In one form, the dual layer back contact comprises a zinc oxide inner layer and an aluminum outer layer and the front contact comprises a tin oxide inner layer and a silicon dioxide dielectric outer layer. One or more amorphous silicon-containing thin film semiconductors can be deposited between the front and back contacts. The contacts can be positioned between a substrate and an optional superstrate. During production, the transparent conductive oxide layer of the front contact is scribed by a laser, then the amorphous silicon-containing semiconductors and inner layer of the dual layer back contact are simultaneously scribed and trenched (drilled) by the laser and the trench is subsequently filled with the same metal as the outer layer of the dual layer back contact to provide a superb mechanical and electrical interconnect between the front contact and the outer layer of the dual layer back contact. The outer layer of the dual layer back contact can then be scribed by the laser. For enhanced environmental protection, the photovoltaic modules can be encapsulated.
250 Citations
18 Claims
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1. A process for producing photovoltaic modules, comprising the steps of:
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positioning a front contact on a substrate; depositing at least one amorphous silicon-containing thin film semiconductor on said front contact; depositing a transparent conductive layer of a dual layer back contact on said amorphous silicon-containing thin film semiconductor; simultaneously laser scribing said transparent conductive layer of said dual layer back contact and said amorphous silicon-containing thin film semiconductor to form a trench through said transparent conductive layer of said dual layer contact and said amorphous silicon-containing thin film semiconductor; and
immediately thereafter;depositing a layer of metal on said transparent conductive layer of said dual layer back contact and simultaneously filling said trench with said metal to form an interconnect extending between and connecting said front contact and said dual layer back contact. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A process for producing photovoltaic modules of monolithic multi-junction solar cells, comprising the steps of:
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positioning a front contact comprising a transparent metallic oxide layer on a light-transmissive vitreous substrate; said transparent metallic oxide layer comprising a front semiconductor selected from the group consisting of tin oxide, indium-tin oxide, zinc oxide, and cadmium stannate; said light-transmissive vitreous substrate being selected from the group consisting of transparent glass and translucent glass; depositing an amorphous silicon p-i-n cell comprising hydrogenated amorphous silicon above said transparent metallic oxide layer of said front contact by enhanced plasma chemical vapor deposition, including depositing a p1 -layer above said front contact, an i1 -layer on said p1 -layer, and an n1 -layer on said i1 -layer, said amorphous silicon thin film semiconductor having a band gap ranging from 1.4 eV to 1.75 eV; depositing an amorphous silicon germanium p-i-n cell comprising hydrogenated amorphous silicon germanium on said amorphous silicon p-i-n cell by enhanced plasma chemical vapor deposition, including depositing a p2 -layer on said n1 -layer, an i2 -layer on said p2 -layer, and an n2 -layer on said i2 -layer, said amorphous silicon p-i-n cell comprising an amorphous silicon germanium thin film semiconductor having a bandgap ranging from 1.4 eV to 1.6 eV; depositing a dual layer back contact on said amorphous silicon germanium p-i-n cell, said dual layer back contact having an inner metallic layer and an outer metallic layer; said inner metallic layer being deposited on said n2 -layer by chemical vapor deposition, said inner metallic layer comprising a transparent conductive oxide selected from the group consisting of zinc oxide, tin oxide, indium-tin oxide, and cadmium oxide; simultaneously laser scribing a trench through said inner metallic layer of said dual layer back contact, said amorphous silicon p-i-n cell and said amorphous silicon germanium p-i-n cell, such that said trench extends between said transparent metallic oxide layer of said front contact and said inner metallic layer of said back contact;
thereafterdepositing said outer metallic layer on said inner metallic layer, said outer metallic layer comprising a metal selected from the group consisting of aluminum, silver, molybdenum, platinum, steel, iron, niobium, titanium, chromium, bismuth, antimony, and oxides of the preceding; and
simultaneouslysubstantially filling said trench with said metal of said outer metallic layer of said back contact to form a metallic interconnect through said inner metallic layer of said dual layer contact, said amorphous silicon p-i-n cell and said amorphous silicon germanium p-i-n cell, said metallic interconnect extending between and mechanically and electrically connecting the transparent metallic oxide layer of said front contact to said inner metallic layer of said back contact. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification