Probe scanning apparatus

• US 6,078,044 A
• Filed: 05/13/1997
• Issued: 06/20/2000
• Est. Priority Date: 05/13/1996
• Status: Expired due to Fees

• Current Assignee: SII NanoTechnology Inc. (Hitachi High- Tech Corporation)
• Original Assignee: Seiko Instruments Incorporated (Seiko Group)
• Inventors: Sato, Yukihiro, Yasutake, Masatoshi
• Primary Examiner(s): Anderson, Bruce C.
• Application Number:
  US08/855,543
• Time in Patent Office: 1,134 Days
• Field of Search: 250/306, 250/307, 250/442.11
• US Class Current: 850/3
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 10/02 Coarse scanning or positioning
• CPC Class Codes: G01Q 10/04 Fine scanning or positioning
• CPC Class Codes: Y10S 977/872 Positioner

Abstract

A probe scanning apparatus for use in a device for measuring the shape of a surface or the physical properties of a sample comprises a probe and voice coil motors for generating a moving force for moving the probe in each of three directions x, y and z upon activation of the voice coil motors. A probe supporting mechanism is mounted for movement in the three directions x, y and z by the moving forces generated by the voice coil motors upon activation thereof to effect coarse/fine movement of the probe in the direction z and to scan the probe in the directions x and y.

Claims

1. A probe scanning apparatus for use in a device for measuring the shape of a surface or the physical properties of a sample, the probe scanning apparatus comprising:

a probe;

voice coil motors for generating a moving force in each of three directions x, y and z upon activation thereof; and

probe supporting means mounted for movement in the three directions x, y and z by the moving forces generated by the voice coil motors upon activation thereof to effect coarse/fine movement of the probe in the direction z and to scan the probe in the directions x and y, the probe supporting means having a thinner tube portion and a thicker tube portion extending in the direction z, wherein the probe is scanned in the directions x and y by applying the moving forces generated by the x- and y-direction voice coil motors in the directions x and y to a portion of the thicker tube portion.

2. A probe scanning apparatus as set forth in claim 1;

wherein the length of the thinner tube portion is set to maximize the displacement of the thicker tube portion for the moving force to be applied to the portion of the thicker tube portion.

3. A probe scanning apparatus as set forth in claim 1;

wherein the probe supporting means includes a probe supporting member supported through a viscous element by the thicker tube portion extending in the direction z; and

wherein the viscous element is softened during coarse movement of the probe in the direction z and hardened during fine movement of the probe in the direction z.

4. A probe scanning apparatus for use in a device for measuring the shape of a surface or the physical properties of a sample, the probe scanning apparatus comprising:

a probe;

voice coil motors for generating a moving force in each of three directions x, y and z;

probe supporting means mounted for movement in the three directions x, y and z by the moving forces generated by the voice coil motors to effect corresponding movement of the probe; and

zooming means for realizing a zooming function by limiting the moving range of the probe supporting means.

5. A probe scanning apparatus as set forth in claim 4;

wherein the zooming means includes means for loading the x- and y-direction forces to be applied to the probe supporting means.

6. A probe scanning apparatus as set forth in claim 4;

wherein the zooming means comprise a holder, a viscous element fitted in the holder, an elastic element embedded in the viscous element, and heating means for heating the viscous element; and

wherein when the temperature of the viscous element is made lower than the melting point thereof, the x- and y-direction forces to be applied to the probe supporting means are loaded by the elastic element.

7. A probe scanning apparatus as set forth in claim 6;

further comprising means for clamping a portion of the elastic element.

8. A probe scanning apparatus as set forth in claim 4;

wherein the zooming means includes means for effecting a plurality of zooming stages.

9. A probe scanning apparatus as set forth in claim 4;

wherein the zooming means comprises a cylindrical tube made of an elastic material and disposed coaxial with the probe supporting means, an elastic element fitted between the cylindrical tube and a portion of the probe supporting means, and heating means for raising the temperature of the viscous element to a temperature higher than the melting point thereof; and

wherein when the temperature of the viscous element is lowered to a temperature lower than the melting point thereof, the x- and y-direction forces to be applied to the probe supporting means are loaded by the elastic element.

10. A probe scanning apparatus as set forth in claim 9;

further comprising a casing, the cylindrical tube having a first end extending from the casing, and the elastic element being fitted between a second end of the cylindrical tube and the portion of the probe supporting means.

11. A probe scanning apparatus as set forth in claim 10;

wherein the first end of the cylindrical tube is fixed to the casing.

12. A probe scanning apparaturs for use in a device for measuring the shape of a surface or the physical properties of a sample, the probe scanning apparatus comprising:

a probe;

voice coil motors for generating a moving force in each of three direction x, y and z upon activation thereof; and

probe supporting means mounted for movement in the three directions x, y and z by the moving forces generated by the voice coil motors upon activation thereof to effect coarse/fine movement of the probe in the direction z and to scan the probe in the directions x and y, the probe supporting means having a first tubular portion and a second tubular portion extending in the direction z, and a probe supporting member supported through a viscous element by the second tubular portion, the second tubular portion having a diameter greater than that of the first tubular portion.

13. A probe scanning apparatus as set forth in claim 12;

wherein the viscous element is disposed between the second tubular portion and the probe supporting member.

14. A probe scanning apparatus for use in a device for measuring the shape of a surface or the physical properties of a sample, the probe scanning apparatus comprising:

a probe;

voice coil motors for generating a moving force in each of three directions x, y and z upon activation thereof;

probe supporting means mounted for movement in the three directions x, y and z by the moving forces generated by the voice coil motors upon activation thereof to effect coarse/fine movement of the probe in the direction z and to scan the probe in the directions x and y, the probe supporting means having a tubular support member mounted for movement in the direction z; and

first, second and third rods for connecting the probe supporting means to the voice coil motors and mounted for respective movement in the directions x, y and by the moving forces generated by the voice coil motors upon activation thereof, the third rod being supported by the tubular support member of the probe supporting means through spring elements and a viscous element to control movement of the tubular support member in the direction z.

15. A probe scanning apparatus as set forth in claim 14;

wherein the tubular support member of the probe supporting means is generally cylindrical-shaped; and

wherein the third rod extends through the cylindrical-shaped tubular support member in coaxial relation thereof.

16. A probe scanning apparatus as set forth in claim 14;

wherein the probe supporting means has a first tubular portion and a second tubular portion extending in the direction z, the second tubular portion having a greater thickness than that of the first tubular portion; and

wherein the viscous element is disposed between the tubular support member and the second tubular portion.

17. A probe scanning apparatus as set forth in claim 14;

further comprising a plurality of elastic elements for connecting the first and second rods to the x- and y-direction voice coil motors, respectively, and for guiding movement of the first and second rods in the respective directions x and y.

18. A probe scanning apparatus as set forth in claim 14;

further comprising a pair of fine wire portions for connecting the first and second rods to the x- and y-direction voice coil motors, respectively, and for respectively absorbing strain of the first and second rods.

19. A probe scanning apparatus as set forth in claim 14;

further comprising an elastic element for connecting the third rod to the z-direction voice coil motor and for guiding movement of the third rod in the direction z.

20. A probe scanning apparatus as set forth in claim 14;

further comprising a fine wire portion for connecting the third rod to the z-direction voice coil motor and for absorbing strain of the third rod.

21. A probe scanning apparatus as set forth in claim 14;

further comprising an intermediate spring member for supporting the third rod in the tubular support member to suppress bending of the third rod.