Comparing aerial image to SEM of photoresist or substrate pattern for masking process characterization

• US 6,078,738 A
• Filed: 05/08/1997
• Issued: 06/20/2000
• Est. Priority Date: 05/08/1997
• Status: Expired due to Term

• Current Assignee: Bell Semiconductor, LLC (Hilco Inc. (d/b/a Hilco Global))
• Original Assignee: LSI Logic Corporation (Broadcom, Inc.)
• Inventors: Garza, Mario, Chao, Keith K.
• Primary Examiner(s): Teska, Kevin J.
• Assistant Examiner(s): Kik, Phallaka
• Application Number:
  US08/853,155
• Time in Patent Office: 1,139 Days
• Field of Search: 364/488-491, 364/578, 378/35, 438/7, 438/16, 356/237, 382/144, 430/5, 430/30
• US Class Current: 716/139
• CPC Class Codes: G03F 1/36 Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes

Abstract

A method of simulating a masking process in which a process simulator is used to produce an aerial image. The simulator is configured to receive input information. The input information includes a digital representation of a patterned mask and a data set. Each element of the data set corresponds to one of a plurality of parameters associated with the masking process. The simulator is configured to produce an aerial image based upon the input information. The aerial image represents the simulator estimation of a pattern that would be produced by the masking process using the patterned mask under conditions specified by the data set. The method further includes the step of supplying the input information to the simulator to produce the aerial image. A first data base is then generated from the aerial image. The first data base is a digital representation of the aerial image. Thereafter, the pattern is produced on a semiconductor substrate using the masking process and the patterned mask. The pattern is produced under the conditions specified by the data set. A second data base is then generated wherein the second data base is a digital representation of the actual pattern. The first data base and the second data base are then compared to produce an error data base. The error data base is indicative of differences between the aerial image and the pattern. Thereafter, the process simulator is modified based upon the error data base to minimize the differences between a successive iteration of the aerial image and the pattern.

Claims

1. In the field of semiconductor processing, a method of simulating a masking process, comprising:

providing a process simulator, wherein said simulator is configured to receive input information comprising a digital representation of a patterned mask and a data set wherein each element of said data set corresponds to one of a plurality of parameters associated with said masking process, said simulator further configured to produce an aerial image based upon said input information, wherein said aerial image represents said simulator'"'"'s estimation of a pattern that would be produced by said masking process using said patterned mask under conditions specified by said data set;

supplying said input information to said simulator to produce said aerial image,

generating a first database comprising a digital representation of said aerial image;

producing said pattern on a semiconductor substrate using said masking process and said patterned mask under the conditions specified by said data set;

generating a second database comprising a digital representation of said pattern;

comparing said first database with said second database to produce an error database indicative of differences between said aerial image and said pattern; and

modifying said process simulator based upon said error database to minimize said differences between a successive iteration of said aerial image and said pattern.

2. The method of claim 1, wherein said simulator comprises a computer, said computer including:

a storage device, wherein said storage device is configured with computer instructions designed to generate, upon execution, said aerial image from said input information;

an input device for receiving said input information and for storing said input information in said storage device; and

a processor coupled to said input device and said storage device, for executing said computer instructions and storing said aerial image in said storage device.

3. The method of claim 1, wherein said plurality of parameters associated with said masking process include parameters selected from the group consisting of at least one of resist contrast (γ

), resist thickness, resist sensitivity, resist solids content, resist viscosity, soft bake temperature, soft bake duration, exposure intensity, exposure duration, source wavelength, source coherency, develop time, developer concentration, developer temperature, developer agitation method, post-bake temperature, post-bake time, etch pressure, etch temperature, etchant composition, and etchant concentration.

4. The method of claim 1, wherein the step of generating said second database comprises:

scanning said pattern with a scanning electron microscope to produce a scanned image; and

digitizing said scanned image to produce said second database.

5. The method of claim 1, wherein said aerial image includes an alignment mark and said pattern includes a corresponding alignment mark and wherein the step of comparing said first database with said second database is facilitated by superimposing said alignment mark of said aerial image with said corresponding said alignment mark of said pattern.

6. The method of claim 1, wherein the step of producing said pattern comprises:

spin depositing a photoresist layer on an upper surface of the semiconductor substrate;

selectively exposing portions of said photoresist layer by directing an optical energy source at said photoresist layer through said patterned mask to form exposed portions and unexposed portions of said photoresist layer, wherein a solubility of said exposed portion in a developer solution is unequal to a solubility of said unexposed portion in said developer solution;

applying said developer to said photoresist layer to remove said portions of said photoresist layer with a greater solubility in said developer solution.

7. The method of claim 6, wherein said photoresist layer is initially insoluble in a developer solution, and further wherein said photoresist layer becomes soluble in said developer solution if said photoresist layer is exposed to an optical energy source.

8. The method of claim 6, wherein said photoresist layer is initially soluble in a developer solution, and further wherein said photoresist layer becomes soluble in said developer solution if said photoresist layer is exposed to an optical energy source.

9. The method of claim 6, wherein said optical energy source comprises a mercury vapor lamp.

10. The method of claim 6 further comprising, prior to the step of selectively exposing said photoresist layer, depositing a bottom antireflective coating.

11. The method of claim 6 further comprising after the step of spin depositing said photoresist layer and prior to the step of selectively exposing said portions, depositing a top antireflective coating.

12. The method of claim 6, further comprising etching portions of said semiconductor substrate not masked by said pattern to reproduce said pattern in said semiconductor substrate.

13. The method of claim 1, wherein said patterned mask comprises features distorted by an optimal proximity correction routine.