Apparatus for carrying semiconductor devices

• US 6,078,845 A
• Filed: 11/25/1996
• Issued: 06/20/2000
• Est. Priority Date: 11/25/1996
• Status: Expired due to Fees

• Current Assignee: Credence Systems Corporation (COHU Incorporated)
• Original Assignee: Schlumberger Technologies Incorporated (Schlumberger NV)
• Inventors: Friedman, Daniel J.
• Primary Examiner(s): Gordon, Paul P.
• Assistant Examiner(s): PATEL, RAMESH B
• Application Number:
  US08/756,296
• Time in Patent Office: 1,303 Days
• Field of Search: 438/106, 438/907, 438/407, 438/205, 438/925, 414/231, 414/235, 414/243, 414/783, 414/935-941, 29/25.01, 700/188, 700/106, 700/107, 700/110-112, 700/115, 700/116, 716/224-229, 716/8, 716/9, 705/10, 705/28
• US Class Current: 700/104
• CPC Class Codes: H01L 21/67282 Marking devices
• CPC Class Codes: H01L 21/67288 Monitoring of warpage, curvature, damage, defects or the like
• CPC Class Codes: H01L 21/67326 Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls
• CPC Class Codes: H01L 21/67333 Trays for chips magazine for components H05K13/0084
• CPC Class Codes: H01L 2221/68313 Auxiliary support including a cavity for storing a finished device, e.g. IC package, or a partly finished device, e.g. die, during manufacturing or mounting
• CPC Class Codes: Y10S 438/907 Continuous processing
• CPC Class Codes: Y10S 438/925 Fluid growth doping control, e.g. delta doping

Abstract

This invention pertains to the embedding of a information storage device within, or attached to, the carriers used to transport work in progress from step to step in the semiconductor manufacturing process. The carrier can be a tray having sites for several semiconductor dies, tubes for carrying several dies together, lead frames, wafer cassettes or individual die sockets. The information storage device can be formed integrally with the carrier or formed separately and attached or secured to the carrier.

Claims

1. Apparatus for carrying and providing traceability for semiconductor die during and after wafer processing, comprising:

a) a structure for receiving at least one semiconductor die; and

b) an electronic information storage device fixed to the structure and including;

A. a memory which stores traceability data associated with each semiconductor die, and

B. means for allowing the traceability data for the semiconductor die, to be electronically read from and written to the memory.

2. Apparatus as claimed in claim 1, wherein the structure receives a plurality of die.

3. Apparatus as claimed in claim 2, wherein the structure comprises a plurality of discrete sites, each for receiving an individual die.

4. Apparatus as claimed in claim 1, wherein the structure is selected from the group consisting of trays, tubes, lead frames, wafer cassettes and die sockets.

5. Apparatus as in claim 1, wherein the means for allowing traceability data to be read and written comprises at least one electrical connection terminal at a surface of the structure accessible to a read/write device.

6. Apparatus as in claim 1, wherein the means for allowing traceability data to be read and written comprises an inductive loop beneath a surface of the structure.

7. Apparatus as claimed in claim 1, wherein the electronic information storage device is formed integrally with the structure.

8. Apparatus as claimed in claim 1, wherein the electronic information storage device is formed separately from the structure and located securely thereon.

9. Apparatus as in claim 1, wherein the traceability data stored in the memory comprises data identifying the die and data indicative of the process steps undergone by the die during its manufacture.

10. Apparatus as claimed in claim 9, wherein the traceability data are selected from the group consisting of lot identification, wafer identification, original location of a die on a wafer, identification of specific equipment used to manufacture the semiconductor device, date stamps, time stamps, operator identification for manufacturing process steps, manufacturing process step test and inspection results for the semiconductor device, manufacturing process steps completed and remaining life of the carrier.

14. An apparatus as in claim 1, wherein the traceability data includes identification of the wafer from whence the semiconductor die originated.

15. An apparatus as in claim 1, wherein the structure receives a plurality of semiconductor die, at least two of the semiconductor die having different traceability data.

11. An apparatus for carrying and providing traceability for semiconductor die at the back end of the semiconductor manufacturing process, after separation from an originating wafer has occurred, comprising:

a) a die carrier for receiving at least one semiconductor die, separately from the originating wafer; and

b) an electronic information storage device fixed to the die carrier and including;

A. a memory which stores data associated with the semiconductor die, and

B. a means for allowing data, including traceability data for the semiconductor die, to be electronically read from and written to memory.

12. An apparatus as in claim 11, wherein the traceability data includes identification of the originating wafer.

13. An apparatus as in claim 11, wherein the die carrier receives a plurality of semiconductor die, at least two of the semiconductor die having different traceability data.