Method and apparatus for determining the endpoint in a plasma cleaning process

• US 6,079,426 A
• Filed: 07/02/1997
• Issued: 06/27/2000
• Est. Priority Date: 07/02/1997
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Tanaka, Tsutomu, Kelkar, Mukul, Subrahmanyam, Sudhakar
• Primary Examiner(s): Powell, William
• Assistant Examiner(s): GOUDREAU, GEORGE A
• Application Number:
  US08/887,165
• Time in Patent Office: 1,091 Days
• Field of Search: 134/1.1, 216/59, 216/61, 216/79, 156/345
• US Class Current: 134/1.1
• CPC Class Codes: C23C 16/4405 Cleaning of reactor or parts inside the reactor by using reactive gases
• CPC Class Codes: H01J 2237/335 Cleaning
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/32963 End-point detection
• CPC Class Codes: Y10S 156/916 Differential etching apparatus including chamber cleaning means or shield for preventing deposits

Abstract

Apparatus and methods are disclosed for utilizing a plasma cleaning operation of a CVD system incorporating cleaning process endpoint detection. In one embodiment, the cleaning process is performed at a constant exhaust capacity and the endpoint detection is in response to a specified rate of change of chamber pressure. In another embodiment, a servo-controlled exhaust system maintains a controlled chamber pressure and the endpoint detection is in response to a specified control signal. In a preferred embodiment, nitrogen trifluoride is converted into a plasma containing free fluorine radicals in a magnetron-powered remote microwave plasma generator. The remotely produced free fluorine radicals are used to remove silicon nitride deposits from a substrate processing chamber. The use of such a remote plasma system provides an efficient cleaning process that takes as little as half the time compared to similar in situ plasma cleaning processes. The incorporation of endpoint detection provides optimal cleaning time for the remote plasma cleaning process.

Claims

1. A method of cleaning silicon nitride deposits from a substrate processing chamber, the method comprising:

(a) exposing a chamber to a plasma formed from a cleaning gas to clean the silicon nitride deposits from the substrate processing chamber;

(b) measuring a pressure level wit said chamber to determine a specified rate of change of pressure; and

(c) extinguishing said plasma in response to said specified rate of change of pressure.

2. The method of claim 1 wherein said cleaning gas includes at least one halogen element.

3. The method of claim 2 wherein said cleaning gas comprises NF₃.

4. The method of claim 1 therein said specified rate of change of pressure is essentially a zero rate of change.

5. The method of claim 1 wherein said extinguishing of said plasma is accomplished by turning off a plasma power supply.

9. The method of claim 1 wherein said detecting of said specified rate of change of pressure occurs after a peak chamber pressure.

10. The method of claim 1 wherein said chamber is exposed to said plasma at an initial pressure of between about 50 mtorr and about 1.5 torr.

16. The method of claim 1 wherein said specified rate of change of pressure occurs essentially at a maximum pressure.

6. A method of cleaning deposits from a substrate processing chamber, the method comprising:

(a) exposing a chamber to a plasma formed from a cleaning gas;

(b) measuring a pressure level within said chamber to determine a specified rate of change of pressure;

(c) waiting a period of time; and

(d) extinguishing said plasma in response to said specified rate of change of pressure.

7. The method of claim 6 wherein said plasma flows from said remote microwave plasma generator into said chamber through a gas distribution faceplate.

8. The method of claim 6 wherein said period of time is between about 5%-30% of the time between said step (a) and said determination of said specified rate of change of pressure.

11. A method for cleaning oxide residue or nitride residue from a substrate processing chamber, the method comprising:

a) exposing a chamber to a plasma formed in a remote plasma generator from a cleaning gas;

b) establishing a controlled pressure in said chamber;

c) monitoring a step signal to a stepper motor, said stepper motor being coupled to a valve and being capable of adjusting said valve in response to said step signal, to detect a specified rate of change of said step signal; and

d) extinguishing said plasma in response to detecting said specified rate of change of said step signal.

12. The method of claim 11 wherein said controlled pressure of step (b) is between about 0.05 and 1.5 torr.

13. The method of claim 11 wherein said cleaning gas comprises a halogen.

14. The method of claim 11 wherein said cleaning gas comprises fluorine.

15. The method of claim 11 wherein said cleaning gas comprises NF₃.

18. The method of claim 11 wherein the remote plasma generator is a remote microwave plasma generator.

17. A substrate processing system comprising:

a processing chamber;

a plasma system configured to provide a plasma in said processing chamber;

a gas delivery system configured to deliver a cleaning gas to said plasma system;

a vacuum system configured to evacuate said processing chamber, said vacuum system including a chamber pressure sensing device producing a pressure signal;

a controller configured to control said gas delivery system, said vacuum system, and said plasma system; and

a memory, coupled to said controller, having a computer-readable program embedded therein for directing operation of said substrate processing system, said computer-readable program including;

i) a first set of computer instructions for controlling said gas delivery system to flow said cleaning gas to said plasma system;

ii) a second set of computer instructions to read said pressure signal to determine a rate of change of chamber pressure, said specified rate of change of chamber pressure being stored in said memory;

iii) a third set of computer instructions for controlling said plasma system to energize said plasma system to produce a plasma from said cleaning gas, and to extinguish said plasma in response to said specified rate of change of pressure.

19. A method of cleaning silicon nitride deposits from a substrate processing chamber, the method comprising:

(a) flowing NF₃ into a remote plasma generator;

(b) forming a plasma from the NF₃ in the remote plasma generator, the plasma containing plasma species;

(c) flowing the plasma species from the remote plasma generator into the substrate processing chamber through a gas distribution faceplate;

(d) measuring a pressure level within said chamber to determine a specified rate of change of pressure; and

(e) extinguishing the plasma in response to the specified rate of change of pressure.

20. A method of cleaning silicon nitride deposits from a substrate processing chamber, the method comprising:

a) flowing NF₃ into a remote plasma generator;

b) forming a plasma from the NF₃ in the remote plasma generator, the plasma containing plasma species;

c) flowing the plasma species from the remote plasma generator into the substrate processing chamber through a gas distribution faceplate;

d) measuring a pressure level within said chamber to determine a rate of change of pressure; and

e) in response to detecting a specified rate of change of pressure, waiting a selected period of time and then extinguishing the plasma.

21. A method of cleaning silicon nitride deposits from a substrate processing chamber, the method comprising:

(a) flowing NF₃ into a remote plasma generator;

(b) forming a plasma from the NF₃ in the remote plasma generator, the plasma containing plasma species;

(c) flowing the plasma species from the remote plasma generator into the substrate processing chamber through a gas distribution faceplate;

(d) establishing a controlled pressure in the substrate processing chamber;

(e) monitoring a pressure control signal to detect a specified rate of change of the pressure control signal; and

(f) extinguishing the plasma in response to detecting the specified rate of change of the pressure control signal.

22. A method of setting a chamber operating pressure, the method comprising:

(a) determining a minimum pressure attainable by each of a plurality of vacuum chamber substrate processing systems; and

(b) setting a controlled pressure set-point for each of at least two of the plurality of vacuum chamber substrate processing systems, wherein the controlled pressure set-point is above the minimum pressure.

23. A method of detecting an endpoint of a process occurring in a substrate processing chamber having a vacuum system and a throttle valve fluidly coupled between the vacuum system and the chamber, the method comprising:

(a) performing a process in the substrate processing chamber;

(b) monitoring a control signal that corresponds to a position of the throttle valve;

wherein said control signal is generated according to a difference between a measured value of a pressure in said process chamber and a target value for said pressure; and

(c) determining an endpoint of said process in response to a behavior of said control signal; and

subsequently

(d) terminating said process.

24. The method of claim 23 wherein said behavior of said control signal corresponds to a constant closed loop signal.

25. The method of claim 23, wherein said (c) includes distinguishing said behavior of said control signal from an open loop control signal.

26. The method of claim 23, further comprising:

between said (c) and said (d), in response to detecting a specified change of said control signal, waiting a selected period of time before terminating said process.

27. The method of claim 23, wherein said process is a cleaning process.

28. The method of claim 27, wherein said cleaning process uses a remote plasma.

29. The method of claim 28, wherein said cleaning process removes silicon nitride deposits from exposed surfaces within the processing chamber.