Method and apparatus for constant composition delivery of hydride gases for semiconductor processing
First Claim
1. A method for consistent composition delivery of a product gas stream including a hydride gas, comprising:
- electrochemically generating a first gas feed stream including a hydride gas, said first gas feed stream having a varying level of the hydride gas over time;
mixing said first gas feed stream with a second gas including a diluent gas, to form a product gas stream including a level of the diluent gas and a level of the hydride gas;
monitoring the level of the diluent gas and the hydride gas in said product gas stream; and
executing control software for maintaining a predetermined ratio of said hydride gas to said diluent gas in said product stream over time, the execution of said control software causing variation in an amount of said second gas provided to said mixing step in response to said monitored level, so as to form said product gas having said predetermined ratio of gases.
4 Assignments
0 Petitions
Accused Products
Abstract
The present invention provides an electrochemical system and process for the production of very high purity hydride gases and the feed product streams including these hydride gases at constant composition over extended periods of time. The processes and apparatuses of the invention can employ a lined pressure vessel (1) within which resides an electrochemical cell including cathode (2) and anode (3) material. The hydride gas produced within the vessel exits through port (4) to a manifold which contains automatic valve (8) to allow exit of the hydride gas. The hydride gas passes through one or more filters (7). The gas finally exits the manifold through a pressure regulator (6) to the point where it is utilized in semiconductor fabrication. A source of gas (11) for mixing with the hydride gas is also included.
-
Citations
42 Claims
-
1. A method for consistent composition delivery of a product gas stream including a hydride gas, comprising:
-
electrochemically generating a first gas feed stream including a hydride gas, said first gas feed stream having a varying level of the hydride gas over time; mixing said first gas feed stream with a second gas including a diluent gas, to form a product gas stream including a level of the diluent gas and a level of the hydride gas; monitoring the level of the diluent gas and the hydride gas in said product gas stream; and executing control software for maintaining a predetermined ratio of said hydride gas to said diluent gas in said product stream over time, the execution of said control software causing variation in an amount of said second gas provided to said mixing step in response to said monitored level, so as to form said product gas having said predetermined ratio of gases. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
-
-
21. A system for consistent composition delivery of a product gas stream including a hydride gas, the system comprising:
-
an electrolytic cell for generating a first gas feed including a hydride gas; a controllable source for delivering a second gas feed including a diluent gas so as to mix said second gas feed and said first gas feed to produce a product gas stream; means for obtaining a first signal proportional to a ratio of hydride gas and diluting gas in said product gas stream; digital signal processing means for processing the first signal and producing a second signal; and wherein said controllable source for delivering a second gas feed varies the level of said second gas feed in response to said second signal, so as to maintain a substantially constant ratio of the hydride gas and the diluent gas in the product stream over time. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
-
-
40. An apparatus for delivering product gas containing a controlled level of hydride gas, comprising:
-
an electrolytic cell for generating a hydride gas feed in which the concentration of hydride gas varies over time; a source of diluent gas feed fluidly coupled to said hydride gas feed to form a product gas feed; and electronic control means operable to automatically control the ratio of said hydride gas feed and diluent gas feed in said product gas feed so as to maintain a predetermined ratio of the hydride gas and the diluent gas in the product gas.
-
-
41. An apparatus for delivering product gas containing a controlled level of hydride gas, comprising:
-
electrochemical means for electrochemically generating a hydride gas feed for inclusion in a product gas feed, said electrochemical means generating hydride gas at a rate which varies over time; means for delivering a diluent gas to the product gas feed; and controlled means operable to modulate an amount of diluent gas delivered to the product gas feed as necessary to maintain a substantially constant, predetermined ratio of hydride gas and diluent gas in the product gas over time.
-
-
42. A method for delivering product gas containing a controlled level of hydride gas, comprising:
-
generating, in an electrolytic cell, a hydride gas feed in which the concentration of hydride gas varies over time; feeding a diluent gas feed to said hydride gas feed to form a product gas feed; and executing electronic control means which automatically controls the ratio of said hydride gas feed and diluent gas feed in said product gas feed so as to maintain a predetermined ratio of the hydride gas and the diluent gas in the product gas feed.
-
Specification