Method of forming films over insulating material
First Claim
1. A method of forming films over an insulating material comprising steps of:
- forming an underlayer film of a metal, a metal carbide, a metal nitride or a semiconductor on a surface of the insulating material; and
forming a diamond-like carbon film over the underlayer film, a surface electrical resistance value of the diamond-like carbon film being controlled by varying an electrical resistance value of the underlayer film.
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Accused Products
Abstract
A method of forming films over an insulating material is provided whereby an underlayer film having electric conductivity is formed on the surface of the insulating material constituting a base member, and a hard carbon film is formed over the underlayer film so that the surface electrical resistance value of the hard carbon film can be controlled so as not to cause the surface thereof to be charged with static electricity by varying an electrical resistance value of the underlayer film. In the case where the underlayer film is formed of a metal film composed of titanium, chromium, tungsten, or the like, the resistance value thereof can be changed by varying the thickness of the metal film. In the case where the underlayer film is formed of a semiconductor film composed of silicon, germanium, or the like, the resistance value thereof can be changed by varying the thickness of the semiconductor film, or the concentration of an impurity added thereto.
32 Citations
22 Claims
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1. A method of forming films over an insulating material comprising steps of:
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forming an underlayer film of a metal, a metal carbide, a metal nitride or a semiconductor on a surface of the insulating material; and forming a diamond-like carbon film over the underlayer film, a surface electrical resistance value of the diamond-like carbon film being controlled by varying an electrical resistance value of the underlayer film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification