Sub-micron chemical imaging with near-field laser desorption

• US 6,080,586 A
• Filed: 04/05/1996
• Issued: 06/27/2000
• Est. Priority Date: 04/05/1996
• Status: Expired due to Term

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Beauchamp, Jesse L., O'Connor, Stephen D., Kossakovski, Dmitri, Widmer, Marcel, Baldeschwieler, John D.
• Primary Examiner(s): Soderquist, Arlen
• Application Number:
  US08/628,875
• Time in Patent Office: 1,544 Days
• Field of Search: 436/173, 436/181, 250/282, 250/288
• US Class Current: 436/173
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01N 1/4022 by thermal techniques; Phase changes
• CPC Class Codes: G01N 1/44 Sample treatment involving radiation, e.g. heat
• CPC Class Codes: G01N 2001/028 Sampling from a surface, swabbing, vaporising
• CPC Class Codes: G01N 2001/045 Laser ablation; Microwave vaporisation
• CPC Class Codes: G01Q 30/02 Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
• CPC Class Codes: G01Q 60/22 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: H01J 49/0004 Imaging particle spectrometry
• CPC Class Codes: H01J 49/0463 Desorption by laser or particle beam, followed by ionisation as a separate step sample holder per se H01J49/0418
• CPC Class Codes: Y10S 977/852 for detection of specific nanostructure sample or nanostructure-related property
• CPC Class Codes: Y10S 977/862 Near-field probe
• CPC Class Codes: Y10T 436/24 Nuclear magnetic resonance, electron spin resonance or other spin effects or mass spectrometry
• CPC Class Codes: Y10T 436/25875 Gaseous sample or with change of physical state

Abstract

The present invention discloses an improved method and apparatus for analyzing the surface of materials using sub-micron laser desorption gas phase analysis. The method uses a combination of Near-field Optical Microscopy and Time-of Flight Mass Spectroscopy.

Claims

1. A method of desorbing particles from a surface, comprising:

obtaining a near-field probe which is driven by a laser to produce an output light at an output aperture at an output end;

determining a near-field distance between said probe and the surface which will enable said probe to image in a near-field mode in which light output from the probe will remain collimated to approximately within a width of the output aperture;

adjusting an actual distance between the output end of the near-field probe and the sample to be analyzed, to keep said distance close to said near-field distance;

illuminating said sample using said probe, with an amount of energy effective to desorb particles from the surface of the surface;

wherein said laser is pulsed with an energy that is effective to desorb particles with each pulse; and

a mass spectrometer device which has an element for sucking in particles that are desorbed, and further comprising pulsing said sucking and synchronizing the sucking of particles with pulses of the laser.

2. A method as in claim 1, wherein said laser is pulsed with an energy that is effective to desorb particles with each pulse.

3. A method as in claim 1, further comprising a mass spectrometer device with an input that receives particles which are desorbed by said laser.

4. A method as in claim 1, wherein said adjusting comprises electrically moving a mounting surface on which the sample is mounted, until the actual distance between the sample and the probe comes within said near-field distance.

5. A method as in claim 1, wherein said adjusting brings the tip of the probe to a distance approximately equal to a radius of the aperture.

6. A method as in claim 1, further comprising monitoring said actual distance, and maintaining said distance within a predesired amount, using a feedback loop.

7. A method as in claim 6, wherein said sample has an uneven topography, and further comprising moving said probe to a random position on said surface, and adjusting said actual distance to the near-field distance on said surface.

8. A method of determining characteristics of a sample of an uneven topography, comprising:

placing a sample having an uneven topography on a sample table;

moving a near-field probe to a random position on said sample;

positioning said probe and said sample to be spaced by a distance that is effective to allow said probe to transmit a light beam that impinges on said sample with a size substantially equal to or less than a size of an end of said probe;

illuminating said sample using said laser light pulses through said probe, with an energy that is effective to desorb particles from a surface of said sample;

sucking up said particles into a mass spectrometer to thereby determine a characteristic of said particles;

wherein said illuminating comprises pulsing said particles with said laser, each pulse causing particles to be desorbed;

wherein said sucking is carried out in a pulsed manner, pulses defining timing of said sucking being synchronized with a timing of said pulses to said laser, each pulse to said laser causing one suck by said mass spectrometer.

9. A method as in claim 8, wherein said illuminating comprises pulsing said particles with said laser, each pulse causing particles to be desorbed.

10. A method as in claim 8, wherein said distance is substantially a diameter of said probe.

11. An apparatus for determining chemical characteristics of a sample having an uneven topography, comprising:

a near-field probe;

a sample table, holding a sample to be investigated;

a moving element, moving a distance between said sample table and said probe to be within a near-field distance of said probe, in which an output of said probe has a spot size on said sample substantially equal to or smaller than an output diameter of said probe;

a controller, maintaining distance information about a current distance between said probe and said sample, to thereby hold said sample within said distance; and

a mass spectrometer element, having a sucking portion, which sucks in particles which are desorbed by said laser element, and analyzes said particles to determine a characteristic thereof;

wherein said controller controls said laser beam in a pulsed mode, and said mass spectrometer sucks from said laser beam in said pulsed mode.