×

Method for forming vertical interconnect process for silicon segments with dielectric isolation

  • US 6,080,596 A
  • Filed: 08/22/1997
  • Issued: 06/27/2000
  • Est. Priority Date: 06/23/1994
  • Status: Expired due to Term
First Claim
Patent Images

1. A method of forming a segment of silicon having a plurality of edges defining said segment, the method comprising the steps of:

  • providing one or more die on said segment, each of said die including a plurality of first bond pads;

    locating a plurality of edge bond pads located on more than one of said edges of said segment for external electrical connections;

    connecting one or more layers of metal traces between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections,forming a conformal dielectric coating around the edge of said die and over said bond pads;

    making openings in the conformal coating at selected locations to form openings for making electrical connections to said bond pads; and

    wherein said segment further includes a front side and a backside, and wherein said plurality of first bond pads, said plurality of edge bond pads, and said layer of metal traces are located on said front side of said segment.

View all claims
  • 10 Assignments
Timeline View
Assignment View
    ×
    ×