Method for forming a trench power metal-oxide semiconductor transistor

• US 6,080,627 A
• Filed: 07/12/1999
• Issued: 06/27/2000
• Est. Priority Date: 06/09/1999
• Status: Expired due to Term

• Current Assignee: ProMOS Technologies, Inc.
• Original Assignee: Mosel Vitelic Incorporated
• Inventors: Chang, Yao-Chi, Fan, Chun-Liang, Lai, Shih-Chi, Yuan, Tien-Min
• Primary Examiner(s): Pham, Long
• Application Number:
  US09/351,183
• Time in Patent Office: 351 Days
• Field of Search: 438/425, 438/426, 438/439, 438/444, 438/445, 438/268, 438/270
• US Class Current: 438/270
• CPC Class Codes: H01L 21/02 Manufacture or treatment of semiconductor devices or of parts thereof
• CPC Class Codes: H01L 29/4236 within a trench, e.g. trench gate electrode, groove gate electrode
• CPC Class Codes: H01L 29/42368 the thickness being non-uniform
• CPC Class Codes: H01L 29/42376 characterised by the length or the sectional shape
• CPC Class Codes: H01L 29/66553 using inside spacers, permanent or not
• CPC Class Codes: H01L 29/66621 using etching to form a recess at the gate location etching of semiconductor bodies H01L21/302
• CPC Class Codes: H01L 29/7813 with trench gate electrode, e.g. UMOS transistors trench gate electrodes per se H01L29/4236

Abstract

A method of forming a trench power metal-oxide semiconductor (MOS) transistor over a semiconductor substrate is proposed in the present invention. First, a pad oxide layer is formed on said substrate, a masking layer is then formed on the pad oxide layer. Next, the masking layer and the pad oxide layer are defined the trench pattern, and the substrate is etched to form the trench structure. A gate oxide layer is formed on the outer surface of the trench structure. Then, a conducting layer is fill into said trench structure for serving as a gate structure. The doped areas are formed in the substrate to serve as source structures. Next, the sidewall spacers are formed on sidewalls of the masking layer and the pad oxide layer. A field oxide layer is then formed on the conducting layer.

Claims

1. A method of forming a trench power metal-oxide semiconductor (MOS) transistor over a semiconductor substrate, said method comprises the following steps of:

forming a pad oxide layer on said substrate;

forming a masking layer on said pad oxide layer;

etching said masking layer and said pad oxide layer to define a trench pattern on said masking layer and said pad oxide layer;

etching said substrate to form a trench structure on said substrate by using said masking layer as an etching mask;

forming a gate oxide layer on an outer surface of said trench structure;

forming a conducting layer to fill into said trench structure for serving as a gate structure, wherein a top surface of said conducting layer is lower than a top surface of said substrate,

forming doped areas in said substrate to serve as source structures, wherein said doped areas are underneath said pad oxide layer and adjacent to said gate oxide layer

forming sidewall spacers on sidewalls of said masking layer and said pad oxide layer for covering out surfaces of said gate oxide layer; and

forming a field oxide layer on said conducting layer, wherein said sidewall spacers are used to insulate said pad oxide layer for avoiding encroachment areas occurring and extending into said doped areas during forming said field oxide layer.

2. The method of claim 1, wherein said masking layer comprises a nitride layer.

3. The method of claim 1, wherein said substrate is used to serve as a drain structure of said trench power MOS transistor.

4. The method of claim 1, wherein said conducting layer is selected from the group of doped polysilicon, in-situ doped polysilicon, aluminum, copper, tungsten, titanium, platinum and alloy.

5. The method of claim 1, wherein said pad oxide layer has a thickness about 50 to 250 angstroms.

6. The method of claim 1, wherein said gate oxide layer has a thickness about 15 to 250 angstroms.

7. The method of claim 1, wherein said gate oxide layer is formed by using a thermal oxidization procedure.

8. The method of claim 1, further comprises a step to form a nitride layer to cover said masking layer, said pad oxide layer, said gate oxide layer, and said conducting layer before forming said sidewall spacers.

9. The method of claim 8, further comprises a step to etch back said nitride layer after forming said nitride layer to form said sidewall spacers on said sidewall on said sidewalls of said masking layer and said pad oxide layer, and to expose a top surface of said conducting layer.

10. The method of claim 8, wherein said nitride layer has a thickness about 600 to 1400 angstroms.

11. The method of claim 1, wherein said field oxide layer is formed by using a thermal oxidization procedure.

12. The method of claim 1, wherein said field oxide layer has a thickness about 2000 to 5000 angstroms.

13. A method of forming a trench power metal-oxide semiconductor (MOS) transistor over a semiconductor substrate, said method comprises the following steps of:

forming a pad oxide layer on said substrate;

forming a first nitride layer on said pad oxide layer;

etching said first nitride layer and said pad oxide layer to define a trench pattern on said first nitride layer and said pad oxide layer;

etching said substrate to form a trench structure on said substrate by using said first nitride layer as an etching mask;

forming a gate oxide layer on an outer surface of said trench structure;

forming a doped polysilicon layer to fill into said trench structure, wherein a top surface of said doped polysilicon layer is lower than a top surface of said substrate;

forming doped areas in said substrate, wherein said doped areas are underneath said pad oxide layer and adjacent to said gate oxide layer;

forming a second nitride layer on surfaces of said first nitride layer, said pad oxide layer, said gate oxide layer and said doped polysilicon layer;

etching said second nitride layer to expose a top surface of said doped polysilicon layer, wherein sidewall spacers are formed on sidewalls of said first nitride layer and said pad oxide layer for covering out surfaces of said gate oxide layer; and

forming a field oxide layer on said doped polysilicon layer, wherein said sidewall spacers are used to insulate said pad oxide layer for avoiding encroachment areas extending into said doped areas during forming said field oxide layer.

14. The method of claim 13, wherein said pad oxide layer has a thickness about 50 to 250 angstroms.

15. The method of claim 13, wherein said gate oxide layer has a thickness about 15 to 250 angstroms.

16. The method of claim 13, wherein said gate oxide layer is formed by using a thermal oxidization procedure.

17. The method of claim 13, wherein said nitride layer has a thickness about 600 to 1400 angstroms.

18. The method of claim 13, wherein said field oxide layer is formed by using a thermal oxidization procedure.

19. The method of claim 13, wherein said field oxide layer has a thickness about 2000 to 5000 angstroms.

20. The method of claim 13, wherein said substrate is used to serve as a drain structure of said trench power MOS transistor.