Composite trench-fin capacitors for DRAM
First Claim
1. A semiconductor memory device comprising:
- a semiconductor substrate having an upper surface;
a trench capacitor portion provided in said substrate and includinga trench extending from said upper surface downwardly into said semiconductor substrate, andan electrically conductive trench electrode provided interior to said trench; and
a fin capacitor portion provided on said substrate and includinga fin electrode having a body portion and two or more electrically conductive fins extending outwardly from said body portion,a fin dielectric layer conformally coating said two or more electrically conductive fins, anda cell electrode surrounding and in intimate capacitive contact with said two or more electrically conductive fins.
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Accused Products
Abstract
A semiconductor memory device capacitor is disclosed which has a trench capacitor portion provided in a semiconductor substrate and a fin capacitor portion provided above the substrate. The trench capacitor portion includes (i) a trench extending from an upper surface of the semiconductor substrate downwardly into the substrate, and (ii) an electrically conductive trench electrode provided interior to the trench. And the fin capacitor portion includes (i) a fin electrode having a body portion and two or more electrically conductive fins extending outwardly from the body portion, (ii) a fin dielectric layer conformally coating the two or more electrically conductive fins, and (iii) a cell electrode surrounding and in intimate contact with the two or more electrically conductive fins.
47 Citations
21 Claims
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1. A semiconductor memory device comprising:
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a semiconductor substrate having an upper surface; a trench capacitor portion provided in said substrate and including a trench extending from said upper surface downwardly into said semiconductor substrate, and an electrically conductive trench electrode provided interior to said trench; and a fin capacitor portion provided on said substrate and including a fin electrode having a body portion and two or more electrically conductive fins extending outwardly from said body portion, a fin dielectric layer conformally coating said two or more electrically conductive fins, and a cell electrode surrounding and in intimate capacitive contact with said two or more electrically conductive fins. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An integrated circuit incorporating active devices and capacitors in a semiconductor substrate having an upper surface, the integrated circuit comprising:
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a plurality of cell capacitors, each including (a) a trench capacitor portion provided in said substrate and having (i) a trench extending from said upper surface downwardly into said semiconductor substrate, and (ii) an electrically conductive trench electrode provided interior to said trench; and (b) a fin capacitor portion provided on said substrate and having (i) a fin electrode having a body portion and two or more electrically conductive fins extending outwardly from said body portion, (ii) a fin dielectric layer conformally coating said two or more electrically conductive fins, and (iii) a cell electrode surrounding and in intimate capacitive contact with said two or more electrically conductive fins; and a plurality of active devices arranged in a predefined circuit configuration with at least some of said plurality of cell capacitors. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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17. A digital system having a plurality of semiconductor integrated circuits, each incorporating active devices and cell capacitors in a semiconductor substrate having an upper surface, the digital system integrated circuits each comprising:
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a plurality of cell capacitors, each including (a) a trench capacitor portion provided in said substrate and having (i) a trench extending from said upper surface downwardly into said semiconductor substrate, and (ii) an electrically conductive trench electrode provided interior to said trench; and (b) a fin capacitor portion provided on said substrate and having (i) a fin electrode having a body portion and two or more electrically conductive fins extending outwardly from said body portion, (ii) a fin dielectric layer conformally coating said two or more electrically conductive fins, and (iii) a cell electrode surrounding and in intimate capacitive contact with said two or more electrically conductive fins; and a plurality of active devices arranged in a predefined circuit configuration with at least some of said plurality of capacitors. - View Dependent Claims (18, 19, 20, 21)
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Specification