Endpoint detection for semiconductor processes

• US 6,081,334 A
• Filed: 04/17/1998
• Issued: 06/27/2000
• Est. Priority Date: 04/17/1998
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lill, Thorsten B., Grimbergen, Michael N.
• Primary Examiner(s): Kim, Robert H.
• Assistant Examiner(s): LEE, HWA S
• Application Number:
  US09/062,520
• Time in Patent Office: 802 Days
• Field of Search: 216/60, 356/369, 356/357
• US Class Current: 356/499
• CPC Class Codes: G01B 11/0683 measurement during deposition or removal of the layer
• CPC Class Codes: H01L 21/32137 of silicon-containing layers
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32

Abstract

A substrate 20 in a process chamber 42 is processed at process conditions suitable for processing a layer 30 on the substrate 20, the process conditions comprising one or more of process gas composition and flow rates, power levels of process gas energizers, process gas pressure, and substrate temperature. The intensity of a reflected light beam 78 reflected from the layer 30 on the substrate 20 is measured over time, to determine a measured waveform pattern. The measured waveform pattern is compared to a pretetermined characteristic waveform pattern, and when the two waveform patterns are similar or substantially the same, the process conditions are changed to change a rate of processing or a process selectivity ratio of the layer 30 on the substrate 20 before the entire layer 30 is completely processed.

Claims

1. A method of etching a layer on a substrate substantially without etching or damaging an underlayer, the method comprising the steps of:

(a) placing the substrate in a process zone;

(b) providing in the process zone, an energized process gas comprising etchant gas and cleaning gas, to etch the layer on the substrate;

(c) detecting an etching endpoint immediately prior to etching through the entire layer on the substrate; and

(d) changing the composition of the process gas to remove the cleaning gas, to etch the remaining portion of the layer substantially without damaging the underlayer.

2. A method according to claim 1 wherein the etchant gas comprises one or more of Cl₂, HBr, N₂, O₂ or He--O₂ ;

and wherein the cleaning gas comprises one or more of NF₃, CF₄, or SF₆.

3. A method according to claim 2 wherein the volumetric flow ratio of cleaning gas to etchant gas is selected to remove the etchant residue formed during etching of at least 2000 substrates in the chamber, without performing a separate cleaning step for cleaning the etching chamber.

4. A method according to claim 3 wherein the volumetric flow ratio of cleaning gas to etchant gas is from about 1:

20 to about 1;

1.

5. A method according to claim 1 wherein the etching endpoint is detected by the steps of:

(1) directing radiation onto the layer on the substrate;

(2) measuring the intensity of reflected radiation over time to obtain a measured waveform pattern; and

(3) comparing the measured waveform pattern to a predetermined waveform pattern to determine the etching endpoint.

6. A method of processing a substrate while simultaneously cleaning a process chamber, the method comprising the steps of:

(a) placing a substrate having a layer, into the process chamber;

(b) in one process stage, providing an energized process gas into the process chamber to etch the layer on the substrate;

(c) in another process stage, providing another energized process gas into the process chamber to etch the layer on the substrate; and

(d) during at least one of the process stages, measuring the intensity of radiation reflected from the layer on the substrate to determine a measured waveform pattern, comparing the measured waveform pattern to a predetermined waveform pattern, and changing from one process stage to another process stage, when the measured waveform pattern is substantially the same as the predetermined waveform pattern, wherein the process gas in one of step (b) or (c) comprises a cleaning gas in a volumetric ratio sufficiently high to remove etchant residue deposited on process chamber surfaces.

7. A method according to claim 6 wherein the cleaning gas comprises one or more of NF₃, CF₄, or SF₆.

8. A method of simultaneously etching a substrate and cleaning an etching chamber, the method comprising the steps of:

(a) placing the substrate in the etching chamber, the substrate comprising a silicon-containing layer comprising elemental silicon or silicon compounds;

(b) providing energized process gas to the etching chamber to etch the silicon-containing layer on the substrate and simultaneously clean the etchant residue formed on chamber surfaces, the energized process gas comprising etchant gas selected from the group consisting of Cl₂, HBr, N₂, O₂, and He--O₂, and cleaning gas selected from the group consisting of NF₃, CF₄, and SF₆, the volumetric flow ratio of etchant gas to cleaning gas being selected to remove etchant residue formed on the chamber surfaces upon completion of the etching process;

(c) during step (b), measuring an intensity of radiation reflected from the silicon-containing layer on the substrate to determine a measured waveform pattern; and

(d) changing process conditions to remove the cleaning gas when the measured waveform pattern is substantially similar to a predetermined characteristic waveform pattern.

9. A method according to claim 8 wherein in step (b) the process gas comprises Cl₂, N₂, and CF₄ in a volumetric flow ratio selected to remove substantially all the etchant residue formed during etching of at least 2000 substrates in the chamber, without performing a separate cleaning step for cleaning the chamber in between etching of the 2000 substrates.

10. A method according to claim 9 wherein the volumetric flow ratio of CF₄ :

(Cl₂ +N₂) is from about 1;

20 to about 1;

1.

11. A method of processing a substrate in a chamber, the method comprising the steps of:

(a) placing the substrate into the chamber, the substrate having a layer;

(b) processing the layer on the substrate;

(c) during step (b), monitoring an intensity of radiation reflected from the layer on the substrate, over time, to obtain a waveform;

(d) recognizing a characteristic feature of the waveform that occurs before the layer on the substrate is completely processed; and

(e) changing a process condition when the characteristic feature is recognized.

12. A method according to claim 11 wherein the step of changing a process condition comprises changing a rate of processing of the layer on the substrate.

13. A method according to claim 11 wherein the characteristic feature comprises a waveform shape.

14. A method according to claim 13 wherein the waveform shape is a small dip before a large peak.

15. A method according to claim 13 wherein the waveform shape is independent of the number of maxima or minima in the waveform.

16. A method according to claim 13 wherein the waveform shape comprises a curved portion.

17. A method according to claim 13 wherein step (c) comprises the step of monitoring the intensity of radiation having substantially a single wavelength.

18. A method according to claim 13 wherein step (c) further comprises the step of providing radiation comprising substantially only non-polarized light, on the substrate.

19. A method according to claim 11 wherein step (d) comprises recognizing a characteristic waveform shape that occurs immediately prior to a terminal peak or dip in the waveform, the terminal peak or dip corresponding to completion of a stage of processing of the layer.

20. A method according to claim 11 wherein the step of changing a process condition comprises terminating the processing of the layer on the substrate.

21. A method according to claim 20 comprising during step (b), adding a cleaning gas to the chamber in a volumetric ratio sufficiently high to clean a surface of the chamber.

22. A method of processing a substrate in a chamber, the method comprising the steps of:

(a) placing the substrate into a chamber, the substrate having a layer;

(b) processing the layer on the substrate;

(c) during step (b), monitoring an intensity of radiation reflected from the layer on the substrate to determine a waveform;

(d) evaluating the waveform to recognize a characteristic shape; and

(e) changing a process condition when the characteristic shape is recognized.

23. A method according to claim 22 wherein the characteristic shape is a small dip before a large peak.

24. A method according to claim 22 wherein the characteristic shape is independent of the number of maxima or minima in the waveform.

25. A method according to claim 22 wherein the characteristic shape occurs immediately prior to a terminal peak or dip in the determined waveform, the terminal peak or dip corresponding to completion of a stage of processing of the layer.

26. A method of etching a layer on a substrate substantially without etching or damaging an underlayer, the method comprising the steps of:

(a) placing the substrate in a process zone, and maintaining first process conditions in the process zone to etch the layer on the substrate; and

(b) monitoring an intensity of radiation reflected from the layer, and upon recognizing a characteristic feature comprising a change in intensity of the reflected radiation, changing the first process conditions to second process conditions to change a rate of etching of the layer or change an etching selectivity ratio of etching the layer relative to the underlayer, before the entire layer is etched through.

27. A method according to claim 26 wherein the second process conditions comprise process conditions that reduce or stop etching of the layer.

28. A method according to claim 27 wherein the first process conditions are changed to second process conditions when the layer has a thickness of about 200 angstroms to about 1000 angstroms.

29. A method according to claim 26 further comprising the initial steps of providing radiation onto a layer on a test substrate while etching the test substrate, measuring the intensity of reflected radiation to obtain a measured waveform, and determining a characteristic feature of the measured waveform that is obtained at a particular stage of the etching process.

30. A method according to claim 26 wherein the characteristic feature comprises a waveform shape occurring immediately prior to a terminal peak or dip in the measured waveform, the terminal peak or dip corresponding to a completed stage of etching of the layer.

31. A method according to claim 26 wherein the first process conditions include providing a first process gas comprising etchant gas for etching the substrate and cleaning gas for cleaning etchant residue formed on the chamber surfaces during etching of the substrate and wherein the second process conditions include providing a second process gas comprising etchant gas that is substantially absent the cleaning gas.

32. A method according to claim 31 wherein the etchant gas comprises one or more of Cl₂, HBr, N₂, O₂, or He--O₂ ;

and the cleaning gas comprises one or more of NF₃, CF₄, or SF₆.

33. A method according to claim 31 further comprising the step of selecting a volumetric flow ratio of cleaning gas to etchant gas that removes the etchant residue formed during etching of at least 2000 substrates in the chamber, without performing a separate cleaning step for cleaning the etching chamber.

34. A method according to claim 33 wherein the volumetric flow ratio of cleaning gas to etchant gas is from about 1:

20 to about 1;

1.