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Acceleration sensor

  • US 6,082,197 A
  • Filed: 08/12/1997
  • Issued: 07/04/2000
  • Est. Priority Date: 12/20/1994
  • Status: Expired due to Fees
First Claim
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1. A multi-axis acceleration sensor comprising:

  • a base plate;

    two supporting posts extending vertically from an upper surface of said base plate;

    a supporting beam comprising a first axle portion and a second axle portion which intersects said first axle portion at right angles, wherein said second axle portion has opposite ends which are connected to said supporting posts, respectively;

    a weight supported by said supporting beam such that a clearance is provided between said second axle portion and said base plate to allow movement of said weight relative to said base plate, said weight being formed in the shape of a frame defining an opening,wherein said first and second axle portions are disposed within the opening, and opposite ends of the first axle portion are connected to inner peripheral side surfaces of the frame at central portions thereof;

    a plurality of electrode segments fixedly mounted on an outer peripheral surface of said weight so as to extend outwardly therefrom;

    a first electrode provided with a plurality of electrode segments which are parallel to said electrode segments extending from said weight, said first electrode being fixedly mounted on said base plate in the vicinity of said weight; and

    a second electrode fixedly mounted on said base plate and facing a flat surface of said weight,wherein displacement of said weight is determined by using a variation in capacitance between said electrode segments of said weight and said first and second electrodes.

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