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Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed

  • US 6,082,208 A
  • Filed: 04/01/1998
  • Issued: 07/04/2000
  • Est. Priority Date: 04/01/1998
  • Status: Expired due to Term
First Claim
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1. A microelectromechanical (MEM) apparatus, comprising:

  • (a) a plurality of gears on a silicon substrate forming an incomplete gear train; and

    (b) a bridging set of gears located on a carriage, with the bridging set of gears and the carriage being moveable on the silicon substrate from a disengaged state to engage the plurality of gears, thereby completing the gear train.

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