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Hardcoats for flat panel display substrates

  • US 6,083,313 A
  • Filed: 07/27/1999
  • Issued: 07/04/2000
  • Est. Priority Date: 07/27/1999
  • Status: Expired due to Term
First Claim
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1. An abrasive resistant, transparent barrier coating for plastic substrates comprised of carbon, hydrogen, silicon and oxygen in an amorphous structure wherein said coating is deposited at a temperature of or below about 70°

  • C. and at a pressure in the range of from about 50 mTorr to about 500 mTorr and further said coating having the properties of Nanoindentation hardness in the range of about 2 to about 10 GPa.

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  • 4 Assignments
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