Fluid delivery system and method

• US 6,083,321 A
• Filed: 07/11/1997
• Issued: 07/04/2000
• Est. Priority Date: 07/11/1997
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Huston, Joel M., Trihn, Son, Lei, Lawrence
• Primary Examiner(s): LUND, JEFFRIE ROBERT
• Application Number:
  US08/893,462
• Time in Patent Office: 1,089 Days
• Field of Search: 118/715, 118/719, 204/298.07, 204/298.25, 156/345
• US Class Current: 118/719
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67196 characterized by the construction of the transfer chamber

Abstract

The present invention generally provides a gas delivery system adapted for positioning near the process chamber. More particularly, the present invention provides an apparatus for processing a substrate that includes a process chamber and a gas delivery system. The gas delivery system is in fluid communication with and is adapted to supply one or more process gases and/or carrier/purge gases to the process chamber. The gas delivery system is positioned proximal the process chamber within about two to three feet of the process chamber.

Claims

1. An apparatus for processing a substrate using one or more gases, comprising:

a modular support frame;

a process chamber mounted on and supported by the modular support frame; and

a gas delivery system mounted on and supported by the modular support frame in fluid communication with and adapted to supply the one or more gases to the process chamber, the gas delivery system comprising;

one or more liquid precursors.

2. The apparatus of claim 1, wherein the gas delivery system is attached to the process chamber.

3. The apparatus of claim 1, further comprising wheels attached to a lower end of the module support frame.

4. The apparatus of claim 1, wherein the process chamber is a chemical vapor deposition process chamber.

5. The apparatus of claim 1, wherein the gas delivery system further comprises:

a set of gas supply lines in flow communication with the process chamber, and

a plurality of valves in flow communication with the set of gas supply lines and the process chamber adapted to control the flow therebetween.

6. The apparatus of claim 1, wherein the gas delivery system further comprises an evaporator.

7. The apparatus of claim 1, wherein the distance between the gas delivery system and the process chamber is less than about three feet.

8. A process chamber module, comprising:

a module support frame;

a process chamber mounted on and supported by the module support frame; and

a gas delivery system mounted on and supported by the module support frame and adapted to supply one or more gases to the process chamber, the gas delivery system comprising;

one or more liquid precursors and one or more evaporators.

9. The apparatus of claim 8, wherein the gas delivery system is positioned proximal the process chamber.

10. The apparatus of claim 8, wherein the gas delivery system is attached to the process chamber.

11. The apparatus of claim 8, further comprising wheels attached to a lower end of the module support frame.

12. The apparatus of claim 8, wherein the process chamber is a chemical vapor deposition process chamber.

13. The apparatus of claim 8, wherein the distance between the gas delivery system and the process chamber is less than about three feet.

14. A method for delivering one or more gases to a process chamber, comprising:

mounting a gas delivery system, adapted to supply the one or more gases, and a process chamber on a modular support frame wherein the modular support frame supports the gas delivery system and the process chamber;

providing fluid communication between the gas delivery system and the process chamber; and

delivering one or more gases from the gas delivery system, including one or more gases from one or more liquid precursors disposed in the gas delivery system.

15. The method of claim 14, wherein the module support frame comprises wheels.

16. The method of claim 14, wherein the gas delivery system comprises an evaporator.