Plasma processing apparatus with a dielectric body in the waveguide

• US 6,084,356 A
• Filed: 05/28/1998
• Issued: 07/04/2000
• Est. Priority Date: 06/03/1997
• Status: Expired due to Fees

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Murakami, Hajime, Takemori, Satoshi, Okada, Sensuke, Mochizuki, Yasuhiro, Seki, Hirofumi, Ichimura, Satoshi, Ishiguro, Kouji, Setoyama, Eiji
• Primary Examiner(s): Bettendorf, Justin P.
• Application Number:
  US09/084,911
• Time in Patent Office: 768 Days
• Field of Search: 315/111.21, 315/111.41, 315/111.71, 313/231.31, 156/345 MW, 156/345 ME, 118/723 MR, 118/723 MA
• US Class Current: 315/111.41
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32229 Waveguides
• CPC Class Codes: H01J 37/32266 Means for controlling power transmitted to the plasma
• CPC Class Codes: H01J 37/32678 Electron cyclotron resonance

Abstract

Dielectric bodies are arranged in waveguide portions for passing microwave radiation and for holding a plasma generating chamber 25 at a vacuum. The dielectric bodies are arranged to intersect at least an electron cyclotron resonance area of the waveguide portions. A tip end portion of the dielectric bodies at a side of the plasma generating chamber are positioned toward at a side of the plasma generating chamber from an intermediate portion in an axial direction length of a first permanent magnet which is arranged by enclosing an outer periphery of the waveguide portions, and a tip end portion of the dielectric bodies at a side of the plasma generating chamber is substantially consistent with an inner face of the plasma generating chamber.

Claims

1. A plasma processing apparatus, comprising:

a plasma generating chamber for generating a plasma in an interior portion thereof;

a waveguide portion connected to said plasma generating chamber, for introducing microwave radiation which generates said plasma;

a dielectric body arranged in said waveguide portion, for passing said microwave radiation and for contributing to maintaining said plasma generating chamber at a vacuum;

a first permanent magnet enclosing an outer periphery of said waveguide portion, for providing an electron cyclotron resonance magnetic field at at least one portion of said waveguide portion and said plasma generating chamber, and for forming a cusp magnetic field in which an orientation of the cusp magnetic field is reversed along a transmission direction of said radiation;

a plurality of second permanent magnets surrounding portions of said plasma generating chamber, said second permanent magnets arranged to have alternating polarities; and

means for holding a processing subject to be plasma processed in said plasma generating chamber;

wherein

said dielectric body is arranged to intersect an entire electron cyclotron resonance area of said waveguide portion.

2. A plasma processing apparatus, comprising:

a plasma generating chamber for generating a plasma in an interior portion thereof;

a waveguide portion connected to said plasma generating chamber, for introducing microwave radiation which generates said plasma;

a dielectric body arranged in said waveguide portion, for passing said microwave radiation and for contributing to maintaining said plasma generating chamber at a vacuum;

a first permanent magnet enclosing an outer periphery of said waveguide portion, for providing an electron cyclotron resonance magnetic field at at least one portion of said waveguide portion and said plasma generating chamber, and for forming a cusp magnetic field in which an orientation of the cusp magnetic field is reversed along a transmission direction of said radiation;

a plurality of second permanent magnets surrounding portions of said plasma generating chamber, said second permanent magnets arranged to have alternating polarities; and

means for holding a processing subject to be plasma processed in said plasma generating chamber;

wherein

a tip end portion of said dielectric body at a side of said plasma generating chamber is positioned toward a side of said plasma generating chamber from an intermediate portion in an axial direction of said first permanent magnet.

3. A plasma processing apparatus, comprising:

a plasma generating chamber for generating a plasma in an interior portion thereof;

a waveguide portion connected to said plasma generating chamber, for introducing microwave radiation which generates said plasma;

a dielectric body arranged in said waveguide portion, for passing said microwave radiation and for contributing to maintaining said plasma generating chamber at a vacuum;

a first permanent magnet enclosing an outer periphery of said waveguide portion, for providing an electron cyclotron resonance magnetic field at least one portion of said waveguide portion and said plasma generating chamber, and for forming a cusp magnetic field in which an orientation of the cusp magnetic field is reversed along a transmission direction of said radiation;

a plurality of second permanent magnets surrounding portions of said plasma generating chamber, said second permanent magnets arranged to have alternating polarities; and

means for holding a processing subject to be plasma processed in said plasma generating chamber;

wherein

a tip end portion of said dielectric body at a side of said plasma generating chamber is substantially consistent with an inner face of said plasma generating chamber.

4. A plasma processing apparatus according to claim 3, wherein

said plasma generating chamber has a cylindrical form, and

a curvature of an inner face of said plasma generating chamber is substantially consistent with a curvature of a tip end portion of said dielectric body at a side of said plasma generating chamber.

5. A plasma processing apparatus, comprising:

a plasma generating chamber for generating a plasma in an interior portion thereof;

a waveguide portion connected to said plasma generating chamber, for introducing microwave radiation which generates said plasma;

a dielectric body arranged in said waveguide portion, for passing said microwave radiation and for contributing to maintaining said plasma generating chamber at a vacuum;

a first permanent magnet enclosing an outer periphery of said waveguide portion, for providing an electron cyclotron resonance magnetic field at at least one portion of said waveguide portion and said plasma generating chamber, and for forming a cusp magnetic field in which an orientation of the cusp magnetic field is reversed along a transmission direction of said radiation;

a plurality of second permanent magnets surrounding portions of said plasma generating chamber, said second permanent magnets arranged to have alternating polarities;

means for holding a processing subject to be plasma processed in said plasma generating chamber;

wherein

said dielectric body is provided to intersect an entire electron cyclotron resonance area in said waveguide portion;

first means for applying a high frequency voltage to said processing subject;

second means for applying a high frequency voltage to an upper wall which serves as one portion of said plasma generating chamber; and

phase adjusting means for controlling a phase of each high frequency voltage applied by said first and second means for applying a high frequency voltage.

6. A plasma processing apparatus according to claim 5, wherein said plasma generating chamber has a side wall that is insulated electrically from said upper wall;

said apparatus further comprising;

third means for applying a high frequency voltage to said side wall;

wherein said phase adjusting means varies a phase difference which is applied between said side wall and said upper wall, and a phase difference which is applied between said side wall and said processing subject.

7. In a plasma processing apparatus according to claim 6, further comprising:

an element in said waveguide portion, for passing said microwave radiation and for shielding high frequency voltage.

8. A plasma processing apparatus, comprising:

a plasma generating chamber for generating a plasma in an interior portion thereof;

a waveguide portion connected to said plasma generating chamber, for introducing microwave radiation which generates said plasma;

a dielectric body arranged in said waveguide portion, for passing said microwave radiation and for contributing to maintaining said plasma generating chamber at a vacuum;

a first permanent magnet enclosing an outer periphery of said waveguide portion, for providing an electron cyclotron resonance magnetic field at at least one portion of said waveguide portion and said plasma generating chamber, and for forming a cusp magnetic field in which an orientation of the cusp magnetic field is reversed along a transmission direction of said radiation;

a plurality of second permanent magnets surrounding portions of said plasma generating chamber, said second permanent magnets arranged to have alternating polarities; and

means for holding a processing subject to be plasma processed in said plasma generating chamber;

wherein

said waveguide portion has a taper form which inclines to be gradually more narrow toward a proceeding direction of said microwave;

said first permanent magnet is arranged along said inclination of said waveguide portion;

a winding is provided at a periphery of said first permanent magnet; and

a tip end portion of said dielectric body at a side of said plasma generating chamber is substantially consistent with an inner face of said plasma generating chamber.

9. A plasma processing apparatus, comprising:

a plasma generating chamber for generating a plasma in an interior portion thereof;

a waveguide portion connected to said plasma generating chamber, for introducing microwave radiation which generates said plasma;

a dielectric body arranged in said waveguide portion, for passing said microwave radiation and for contributing to maintaining said plasma generating chamber at a vacuum;

a first permanent magnet enclosing an outer periphery of said waveguide portion, for providing an electron cyclotron resonance magnetic field at at least one portion of said waveguide portion and said plasma generating chamber, and for forming a cusp magnetic field in which an orientation of the cusp magnetic field is reversed along a transmission direction of said radiation;

a plurality of second permanent magnets surrounding portions of said plasma generating chamber, said second permanent magnets arranged to have alternating polarities;

means for holding a processing subject to be plasma processed in said plasma generating chamber;

wherein

said dielectric body is arranged to be substantially consistent with an inner face of said plasma generating chamber;

first means for applying a high frequency voltage to said processing subject;

second means for applying a high frequency voltage to an upper wall which serves as one portion of said plasma generating chamber; and

means for controlling a phase of each high frequency voltage applied by said first and second means for applying a high frequency voltage.