Pressure sensor having an insulating layer and fluid tight amorphous metal layer

• US 6,085,596 A
• Filed: 04/11/1997
• Issued: 07/11/2000
• Est. Priority Date: 04/12/1996
• Status: Expired due to Term

• Current Assignee: Grundfos A/S (Poul Due Jensens Fond)
• Original Assignee: Grundfos A/S (Poul Due Jensens Fond)
• Inventors: Dyrbye, Karsten, Andersen, Per Ellemose, Jensen, Niels Due, Brown, Tina Romedahl
• Primary Examiner(s): OEN, WILLIAM L
• Application Number:
  US08/827,751
• Time in Patent Office: 1,187 Days
• Field of Search: 73/715, 73/716, 73/717, 73/718, 73/719, 73/720, 73/721, 73/722, 73/723, 73/724, 73/725, 73/726, 73/727, 73/754, 73/756, 257/419, 361/283.1
• US Class Current: 73/754
• CPC Class Codes: G01L 19/0038 being part of the housing other details about the housing G01L19/14
• CPC Class Codes: G01L 19/147 Details about the mounting of the sensor to support or covering means
• CPC Class Codes: G01L 9/0054 integral with a semiconducting diaphragm
• CPC Class Codes: H01L 2224/02166 Collar structures
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48137 the bodies being arranged next to each other, e.g. on a common substrate
• CPC Class Codes: H01L 2224/48464 the other connecting portion not on the bonding area also being a ball bond, i.e. ball-to-ball
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

The invention relates to a pressure or differential pressure sensor comprising a membrane with at least one measuring element located thereon, as well evaluation electronics for measuring the membrane deflection. The membrane is covered against environmental influences with a protective layer and is gripped within a mounting in a pressure tight manner. The protective layer is composed of a fluid tight amorphous metal layer, a so called metal glass layer which with the interposing of an electrically insulating layer, is directly deposited onto the membrane, the measuring element located thereon and where appropriate, onto further electronic components located thereon. In this manner, on the one hand, the membrane is protected but on the other hand it may be deflected sensitively since the amorphous metal layer is fluid and gas tight even with layer thicknesses in the μm region.

Claims

1. A pressure or differential sensor comprising:

a membrane comprising at least one measuring element located thereon;

evaluation electronics for measuring a membrane deflection;

a protection layer;

a mounting which grips the membrane in a pressure-tight manner;

said protection layer comprising an electrically insulating layer deposited directly onto said evaluation electronics and said membrane; and

a fluid tight amorphous metal layer deposited on said electrically insulating layer.

2. The sensor as recited in claim 1, wherein at least one conductor is situated under said electrically insulating layer and is formed to permit said conductor to be contacted from an outside of said mounting layer.

3. The sensor as recited in claim 1 wherein said membrane comprises silicon and said electrically insulating layer comprises at least one of silicon oxide, silicon nitrite or polyimide and said amorphous metal layer comprises a metal glass based upon at least one of chrome-tantalum or chrome titanium.

4. The sensor as recited in claim 1 wherein said membrane is formed as one piece with a plate-shaped substrate, whereby said mounting grips said membrane in a region of said plate-shaped substrate.

5. The sensor as recited in claim 1 wherein said amorphous metal layer comprises a thickness between 0.1 micrometers to 5 micrometers.

6. The sensor as recited in claim 1 wherein a sealing element is interposed between said membrane and said mounting.

7. The sensor as recited in claim 1 wherein said sensor comprises an adhesive to secure said membrane to said mounting.

8. The sensor as recited in claim 1 wherein said mounting comprises two plate-shaped components which cooperate to define a recess for receiving said membrane, said plate-shaped components each comprising an aperture which are substantially aligned to one another.

9. The sensor as recited in claim 8 wherein each of said plate-shaped components further comprise an annular groove for receiving an annular sealing element.

10. The sensor as recited in claim 1 wherein said amorphous metal layer is electrically coupled to either a voltage source or ground.

11. The sensor as recited in claim 4 wherein said plate-shaped substrate is electrically insulated in a region of said mounting to permit said plate-shaped substrate to be gripped.

12. The sensor as recited in claim 5 wherein said thickness is between 0.5 micrometers and 1.5 micrometers.

13. The sensor as recited in claim 6 wherein said sealing element comprises at least one O-ring.

14. The sensor as recited in claim 9 wherein said annular sealing element comprises an O-ring.