Apparatus and method for providing pulsed fluids

• US 6,085,762 A
• Filed: 02/02/1999
• Issued: 07/11/2000
• Est. Priority Date: 03/30/1998
• Status: Expired due to Term

• Current Assignee: TRIAD National Security, LLC
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Barton, Jerome C.
• Primary Examiner(s): Stinson, Frankie L.
• Application Number:
  US09/243,191
• Time in Patent Office: 525 Days
• Field of Search: 134/94.1, 134/902, 134/104.2, 134/104.3, 134/109, 134/110, 134/111, 134/22.11, 134/22.12, 134/22.18, 134/166 R, 134/166 C, 134/186, 134/25.4, 134/26 , 134/34, 137/826, 137/256, 137/263, 118/600
• US Class Current: 134/25.4
• CPC Class Codes: B08B 3/102 with means for agitating the liquid by agitating the container B08B3/042, B08B3/044, B08B3/045, B08B3/06
• CPC Class Codes: B08B 7/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass
• CPC Class Codes: C11D 2111/22 Electronic devices, e.g. PCBs or semiconductors
• CPC Class Codes: C11D 7/24 Hydrocarbons
• CPC Class Codes: C11D 7/266 Esters or carbonates
• CPC Class Codes: C11D 7/267 Heterocyclic compounds
• CPC Class Codes: C11D 7/28 containing halogen
• CPC Class Codes: C11D 7/34 containing sulfur
• CPC Class Codes: C11D 7/50 Solvents
• CPC Class Codes: C11D 7/5004 Organic solvents
• CPC Class Codes: G03F 7/422 using liquids only G03F7/421 takes precedence
• CPC Class Codes: H01L 21/31133 by chemical means
• CPC Class Codes: Y10S 134/902 Semiconductor wafer
• CPC Class Codes: Y10T 137/469 Sequentially filled and emptied [e.g., holding type]
• CPC Class Codes: Y10T 137/4807 Tank type manifold [i.e., one tank supplies or receives from at least two others]

Abstract

There is provided a method and apparatus for supplying pulsed fluids to pressure vessels which comprises: at least one reservoir for the fluid to be pulsed; valved conduits connecting the reservoir to a pump; a conduit with control valves from the pump to one or more ballast tanks with the control valves able to sequentially or intermittantly direct a flow of fluid into each of the ballast tanks; conduits from each of the ballast tanks to a control valve and injection valve which injects fluid from the conduits from each of the ballast tanks into a high pressure processing vessel where materials to be contacted with the pulsed fluid are contacted with the fluid. For recycling the processing fluid, a conduit from the high pressure processing vessel can be connected to a separator vessel, secondary processing vessel or storage vessel. Conduits can be provided from the separator vessel, secondary processing vessel or storage vessel whereby the processing fluid can be returned to the reservoir for reuse in the process or conducted elsewhere for other purposes.

Claims

1. An apparatus for providing pulsed fluids to processing vessels comprising:

(a) at least one reservoir for the fluid to be pulsed;

(b) at least one valved conduit connecting the reservoir to a pumping means;

(c) at least one conduit with control valves from said pumping means to one or more ballast tanks with the control valves able to sequentially or intermittantly direct a flow of fluid into each of said one or more ballast tanks;

(d) conduits from each of the ballast tanks to a control and injection valve which injects fluid from the conduits from each of said one or more ballast tanks into a processing vessel.

2. An apparatus as recited in claim 1 wherein at least one conduit connects said at least one reservoir for fluid to be pulsed directly with said processing vessel, thereby providing a means for introducing fluid directly into said processing vessel, bypassing said one or more ballast tanks.

3. An apparatus as recited in claim 2 further having a preprogrammable control device on said means for introducing fluid directly into said processing vessel.

4. An apparatus as recited in claim 1 wherein said processing vessel is a high pressure processing vessel and wherein said pumping means is capable of producing and maintaining high pressures.

5. An apparatus as recited in claim 4 wherein said said high pressures are sufficiently high to maintain fluids in a supercritical state.

6. An apparatus as recited in claim 1 wherein said processing vessel is connected by a conduit to a storage vessel downstream from said processing vessel.

7. An apparatus as recited in claim 1 wherein said processing vessel is connected by a conduit to at least one additional processing vessel downstream from said processing vessel.

8. An apparatus as recited in claim 7 wherein said at least one additional processing vessel is a separator and has at least one conduit connecting said at least one additional processing vessel with said reservoir for fluid to be pulsed and at least one conduit for conducting substances other than fluid to be pulsed away from said at least one additional processing vessel.

9. An apparatus as recited in claim 8 wherein said separator has connected therewith a cooling device and valves which can be adjusted to allow reduction of pressure therein.

10. An apparatus as recited in claim 8 further having a valve and preprogrammable control device on said at least one conduit connecting said at least one additional processing vessel with said reservoir for fluid to be pulsed.

11. An apparatus as recited in claim 7 wherein said at least one additional processing vessel has two separate compartments, a first of which has connected therewith a cooling device and valves which can be adjusted to allow reduction of pressure therein and also connected therewith a conduit to a condensation vessel to receive gaseous discharge from said first separate compartment;

and a second compartment of which can contain liquid and solid materials.

12. An apparatus as recited in claim 11 wherein said condenser is connected by conduit to said reservoir for fluids to be pulsed so as to enable recirculation of condensed fluid to said reservoir for fluids to be pulsed.

13. An apparatus as recited in claim 12 further having a valve and preprogrammable control device on said conduit to said reservoir for fluids to be pulsed.

14. An apparatus as recited in claim 11 further having a valve and preprogrammable control device on said conduit to said condensation vessel to receive gaseous discharge from said first separate compartment.

15. An apparatus as recited in claim 7 wherein said at least one additional processing vessel is a multi-unit separator vessel which has a first separate compartment which has connected therewith a cooling device and valves which can be adjusted to allow reduction of pressure therein and which is fluidly connected with a second separate compartment which has a heater connected therewith for boiling off fractions of fluid contained therein.

16. An apparatus as recited in claim 15 wherein said second separate compartment is connected by a conduit to said at least one reservoir for fluid to be pulsed and by another conduit to conduct fluids and solids not boiled off away from said second separate compartment.

17. An apparatus as recited in claim 16 further having a valve and preprogrammable control device on said conduit to said at least one reservoir for fluid to be pulsed.

18. An apparatus as recited in claim 8 further having a valve and preprogrammable control device on said conduit to said at least one additional processing vessel downstream from said processing vessel.

19. An apparatus as recited in claim 1 having two ballast tanks.

20. An apparatus as recited in claim 1 having three ballast tanks.

21. An apparatus as recited in claim 1 wherein said reservoir for fluids to be pulsed has connected therewith a temperature controller and a means for maintaining pressure in said reservoir for fluids to be pulsed.

22. An apparatus as recited in claim 21 wherein said temperature controller and means for maintaining pressure are sufficient to enable containment therein of fluids in a supercritical state.

23. An apparatus as recited in claim 1 having two separate reservoirs for fluids to be pulsed, each of which is connected by valved conduits to said pumping means.

24. An apparatus as recited in claim 23 further having a valve and preprogrammable control device on said conduit to said valved conduits to said pumping means.

25. An apparatus as recited in claim 1 further having a preprogrammable control device on said at least one valved conduit connecting the reservoir to a pumping means.

26. An apparatus as recited in claim 1 further having a preprogrammable control device on said at least one conduit with control valves from said pumping means to said one or more ballast tanks.

27. An apparatus as recited in claim 1 further having a preprogrammable control device on said conduits from each of the ballast tanks to said control and injection valve.

28. A method of pulsing fluids onto the surface of a material to be treated comprising:

(a) containing a treating fluid under pressure in a reservoir connected to a pump;

(b) pumping said treating fluid under pressure into one or more ballast tanks;

(c) releasing said treating fluid from one of said one or more ballast tanks into a processing vessel wherein a material to be treated is positioned;

(d) conducting treating fluid away from said processing vessel;

thereafter,

(e) another pulse of said treating fluid from one of said one or more ballast tanks is released into said processing vessel;

(f) after pressure in said one of said one or more ballast tanks and in said processing vessel is equalized, treating fluid is conducted away from said processing vessel.

29. A method as recited in claim 28 wherein said one of said one or more ballast tanks in step (e) is being filled and pressurized with said treating fluid contemporaneously with release of said treating fluid from said one of said one or more ballast tanks in step (c).

30. A method as recited in claim 28 wherein said treating fluid which is conducted away from said processing vessel is conducted into a separator.

31. A method as recited in claim 30 wherein a gaseous portion of said treating fluid from said separator is recycled back into said reservoir.

32. A method as recited in claim 28 wherein said treating fluid is maintained in a supercritical state in said reservoir and in a dense phase state in said ballast tanks.

33. A method as recited in claim 28 wherein after said treating fluid is released from one of said one or more ballast tanks into said processing vessel, pressure in said one of said one or more ballast tanks and in said processing vessel is equalized.

34. A method of pulsing fluids onto the surface of a material to be treated comprising:

(a) containing two or more treating fluids under pressure in two or more reservoirs connected to a pump;

(b) combining said treating fluids to form a mixture and pumping said mixture under pressure into one or more ballast tanks;

(c) releasing said treating fluid mixture from one of said one or more ballast tanks into a processing vessel wherein the material to be treated is positioned;

(d) after pressure in said one of said one or more ballast tanks and in said processing vessel is equalized, treating fluid mixture is conducted away from said processing vessel;

thereafter,

(e) another pulse of said treating fluid mixture from one of said one or more ballast tanks is released into said processing vessel;

(f) after pressure in said one of said one or more ballast tanks and in said processing vessel is equalized, treating fluid mixture is conducted away from said processing vessel.

35. A process as recited in claim 34 wherein said treating fluids are combined prior to pumping into said one of said one or more ballast tanks.

36. A process as recited in claim 34 wherein said treating fluids are pumped separately into said one of said one or more ballast tanks.

37. A process as recited in claim 34 wherein said treating fluids are pumped into a conduit simultaneously to form a mixture therein prior to entering said one of said one or more ballast tanks.

38. A method as recited in claim 34 wherein said one of said one or more ballast tanks in step (e) is being filled and pressurized with said treating fluid contemporaneously with release of said treating fluid from said one of said one or more ballast tanks in step (c).

39. A method as recited in claim 34 wherein said treating fluid which is conducted away from said processing vessel is conducted into a separator.

40. A method as recited in claim 39 wherein a gaseous portion of said treating fluid from said separator is recycled back into said reservoir.

41. A method as recited in claim 34 wherein said treating fluid is maintained in a supercritical state in said reservoir and in a dense phase state in said ballast tanks.