Laser machining apparatus
First Claim
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1. A laser machining apparatus which includes:
- a laser oscillator for generating a pulsed laser beam;
splitting means for splitting said laser beam into a plurality of split laser beams; and
a plurality of X-Y scanners which swing and radiate the split laser beams in an X-axis direction and a Y-axis direction, respectively, relative to a face of a work, and wherein;
a plurality of process regions which are divided and set on said work are processed simultaneously by said split laser beams, respectively.
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Abstract
A pulsed laser beam from a laser oscillator 10 is split into two by a beam splitter 13. The split laser beams are radiated by X-Y scanners 14 and 16 through working lenses 17 and 18 onto a work 20. Additionally on the work, the laser beams are swung in X-axis and Y-axis directions. These X-Y scanners simultaneously process a plurality of process regions which are divided and set on the work.
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5 Claims
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1. A laser machining apparatus which includes:
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a laser oscillator for generating a pulsed laser beam; splitting means for splitting said laser beam into a plurality of split laser beams; and a plurality of X-Y scanners which swing and radiate the split laser beams in an X-axis direction and a Y-axis direction, respectively, relative to a face of a work, and wherein; a plurality of process regions which are divided and set on said work are processed simultaneously by said split laser beams, respectively. - View Dependent Claims (2, 3, 4)
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5. A laser machining apparatus which includes:
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a laser oscillator for generating a pulsed laser beam; a beam chopper for reflecting and penetrating said laser beam to produce a reflected laser beam and a penetrated laser beam; and a plurality of X-Y scanners which swing and radiate said reflected and said penetrated laser beams in an X-axis direction and a Y-axis direction, respectively, relative to a face of a work, and wherein; a plurality of regions which are divided and set on said work are processed by said reflected and said penetrated laser beams, said beam chopper being provided with a rotation body constituted by alternatively arranging laser beam reflecting mirrors and penetrating portions in areas equally divided around a central axis, a drive mechanism for rotating and operating the rotation body and control means for controlling said drive mechanism in such a manner that said pulsed laser beam is alternately and repeatedly reflected and penetrated.
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Specification