Corrugated MEMS heater structure

• US 6,087,638 A
• Filed: 07/10/1998
• Issued: 07/11/2000
• Est. Priority Date: 07/15/1997
• Status: Expired due to Term

• Current Assignee: Memjet Technology Ltd. (Memjet Limited)
• Original Assignee: Silverbrook Research Pty Limited
• Inventors: Silverbrook, Kia
• Primary Examiner(s): Paschall, Mark
• Assistant Examiner(s): ROBINSON, DANIEL LEON
• Application Number:
  US09/113,100
• Time in Patent Office: 732 Days
• Field of Search: 219/201, 219/209, 219/540, 251/11, 251/30.02, 251/30.01, 251/30.03, 347/84, 347/85
• US Class Current: 219/540
• CPC Class Codes: B41J 2/14427 Structure of ink jet print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/1623 bonding and adhesion
• CPC Class Codes: B41J 2/1625 electroforming
• CPC Class Codes: B41J 2/1626 etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1632 machining
• CPC Class Codes: B41J 2/1634 laser machining
• CPC Class Codes: B41J 2/1639 sacrificial molding
• CPC Class Codes: B41J 2/1642 thin film formation by CVD [chemical vapor deposition]
• CPC Class Codes: B41J 2/1648 Production of print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/17596 Ink pumps, ink valves
• CPC Class Codes: G06F 21/79 in semiconductor storage media, e.g. directly-addressable memories
• CPC Class Codes: G06F 21/86 Secure or tamper-resistant housings
• CPC Class Codes: G06F 2221/2129 Authenticate client device independently of the user
• CPC Class Codes: H04N 1/2112 using still video cameras
• CPC Class Codes: H04N 1/2154 the still video camera incorporating a hardcopy reproducing device, e.g. a printer
• CPC Class Codes: H04N 2101/00 Still video cameras
• CPC Class Codes: H04N 23/00 Cameras or camera modules comprising electronic image sensors; Control thereof
• CPC Class Codes: H04N 5/2628 Alteration of picture size, shape, position or orientation, e.g. zooming, rotation, rolling, perspective, translation
• CPC Class Codes: H05B 2214/04 Heating means manufactured by using nanotechnology

Abstract

A thermal actuator comprising a first conductive material encased in a second non-conductive expansive material wherein said first conductive material is constructed in the form of a corrugated heater element so as to increase the rate of thermal transfer to said second non-conductive expansive material.

Claims

1. A thermal actuator in a micro-electro mechanical system, comprising a heater element formed from a first conductive material, said heater element being encased in a second non-conductive thermally expansive material, wherein said heater element is corrugated so as to increase the rate of thermal transfer to said second non-conductive thermally expansive material.

2. A thermal actuator as claimed in claim 1 wherein said thermal actuator is utilized in the ejection of ink from an ink ejection nozzle.