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Corrugated MEMS heater structure

  • US 6,087,638 A
  • Filed: 07/10/1998
  • Issued: 07/11/2000
  • Est. Priority Date: 07/15/1997
  • Status: Expired due to Term
First Claim
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1. A thermal actuator in a micro-electro mechanical system, comprising a heater element formed from a first conductive material, said heater element being encased in a second non-conductive thermally expansive material, wherein said heater element is corrugated so as to increase the rate of thermal transfer to said second non-conductive thermally expansive material.

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