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Semiconductor thin film and semiconductor device

  • US 6,087,679 A
  • Filed: 07/22/1998
  • Issued: 07/11/2000
  • Est. Priority Date: 07/23/1997
  • Status: Expired due to Term
First Claim
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1. A semiconductor thin film comprising a collected body of a plurality of rod-like or flat-rod-like crystals each comprising silicon as a main component, wherein a main orientation plane substantially coincides with a {110} plane,wherein a concentration, in the semiconductor thin film, of each of carbon and nitrogen is 5×

  • 1017 atoms/cm3 or less and a concentration of oxygen is 1×

    1018 atoms/cm3 or less, respectively, andwherein the rod-like or flat-rod-like crystals contact each other while forming rotation angles having absolute values that are within 3°

    .

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