Bond pad for a flip-chip package

• US 6,087,732 A
• Filed: 09/28/1998
• Issued: 07/11/2000
• Est. Priority Date: 09/28/1998
• Status: Expired due to Term

• Current Assignee: Bell Semiconductor, LLC (Hilco Inc. (d/b/a Hilco Global))
• Original Assignee: Lucent Technologies, Inc. (Nokia Corporation)
• Inventors: Chittipeddi, Sailesh, Ryan, Vivian
• Primary Examiner(s): Arroyo, Teresa M.
• Application Number:
  US09/162,247
• Time in Patent Office: 652 Days
• Field of Search: 257/786, 257/780, 257/778
• US Class Current: 257/786
• CPC Class Codes: H01L 2224/02125 Reinforcing structures
• CPC Class Codes: H01L 2224/0401 Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
• CPC Class Codes: H01L 24/02 Bonding areas on insulating substrates, e.g. chip carriers, H01L23/49816, H01L23/49838, H01L23/5389; Manufacturing methods related thereto
• CPC Class Codes: H01L 24/05 of an individual bonding area
• CPC Class Codes: H01L 24/13 of an individual bump connector
• CPC Class Codes: H01L 2924/01013 Aluminum [Al]
• CPC Class Codes: H01L 2924/01014 Silicon [Si]
• CPC Class Codes: H01L 2924/01022 Titanium [Ti]
• CPC Class Codes: H01L 2924/01029 Copper [Cu]
• CPC Class Codes: H01L 2924/01033 Arsenic [As]
• CPC Class Codes: H01L 2924/014 Solder alloys
• CPC Class Codes: H01L 2924/04941 TiN
• CPC Class Codes: H01L 2924/14 Integrated circuits

Abstract

A bond pad support structure is located beneath a bond pad on an integrated circuit. The bond pad support structure includes a first bond pad support layer at least partly located below the bond pad. The first bond pad support layer has a plurality of radial patterns with at least one space between the radial patterns. The radial patterns may be, for example, straight lines having approximately uniform thickness. Alternatively, the radial patterns may be triangles, each of which has an apex pointing to the center of a region below the bond pad. The radial patterns may have a plurality of different lengths. A second bond pad support layer is located on the first bond pad support layer. The second bond pad support layer fills at least a portion of the space between the radial patterns.

Claims

1. In an integrated circuit having a bond pad located thereon, a bond pad support structure, comprising:

a first bond pad support layer at least partly located below the bond pad, the first bond pad support layer comprising a plurality of radial patterns with at least one space therebetween; and

a second bond pad support layer located on the first bond pad support layer and filling at least a portion of the space.

2. A structure according to claim 1, wherein the plurality of radial patterns include:

a first set of patterns having a first length; and

a second set of patterns having a second length different from the first length.

3. A structure according to claim 2, wherein:

the second length is shorter than the first length, and

the second set of patterns includes a larger number of members than the first set of patterns.

4. A structure according to claim 2, wherein:

the second length is shorter than the first length, and

the patterns in the second set of patterns begin at a radius that is further from a point beneath the center of the bond pad than the patterns in the first set of patterns.

5. A structure according to claim 1, wherein a locus of outermost points of each of the plurality of patterns lie along a polygon having at least four sides.

6. A structure according to claim 1, wherein the first bond pad support layer comprises a conductive metal, and the second bond pad support layer comprises a dielectric material or a metal.

7. A structure according to claim 1, wherein each of the patterns is a line segment having about the same width as each of the other line segments.

8. A structure according to claim 1, wherein each of the patterns is a triangle.

9. A structure according to claim 8, wherein each of the triangles has an apex that points towards a point beneath the center of the bond pad.

10. A structure according to claim 8, wherein the plurality of triangles include:

a first set of triangles, each triangle in the first set having an apex which lies within a region beneath the bond pad; and

a second set of triangles, each triangle in the second set lying substantially outside of the region beneath the bond pad.

11. A structure according to claim 8, wherein the plurality of triangles include:

a first set of triangles having a first altitude and a first base dimension; and

a second set of triangles having a second altitude shorter than the first altitude and a second base dimension wider than the first base dimension.

12. An integrated circuit, system comprising:

a substrate having a circuit pattern on a surface thereof;

a bond pad support structure formed over the substrate, comprising;

a first bond pad support layer comprising a plurality of radial patterns with at least one space therebetween, and

a second bond pad support layer located on the first bond pad support layer and filling at least a portion of the space; and

a bond pad lying above at least a portion of the bond pad support structure.

13. An integrated circuit system according to claim 12, further comprising a solder ball or solder bump formed on the bond pad.

14. An integrated circuit system according to claim 13, further comprising a printed circuit board which is bonded to the bond pad by the solder ball or solder bump.