Microelectromechanical beam for allowing a plate to rotate in relation to a frame in a microelectromechanical device

• US 6,087,747 A
• Filed: 04/01/1999
• Issued: 07/11/2000
• Est. Priority Date: 09/27/1996
• Status: Expired due to Fees

• Current Assignee: Royal Bank Capital Partners
• Original Assignee: MCNC, Inc.
• Inventors: Koester, David A., Markus, Karen W., Walters, Mark D., Dhuler, Vijayakumar R.
• Primary Examiner(s): Enad, Elvin
• Assistant Examiner(s): TAMAI, KARL I
• Application Number:
  US09/285,206
• Time in Patent Office: 467 Days
• Field of Search: 310/309, 310/90, 310/40 MM, 384/2, 384/3, 384/4, 384/5, 384/6, 359/224, 359/225, 359/230, 359/298, 359/214, 359/198, 359/872, 200/181, 335/78, 335/79
• US Class Current: 310/90
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129
• CPC Class Codes: Y10S 359/90 Methods
• CPC Class Codes: Y10T 428/24273 including aperture
• CPC Class Codes: Y10T 428/24322 Composite web or sheet
• CPC Class Codes: Y10T 428/24355 Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
• CPC Class Codes: Y10T 428/24479 including variation in thickness

Abstract

An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90° angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis. Related methods are also disclosed.

Claims

1. A microelectromechanical beam for supporting a plate and allowing the plate to rotate in relation to a frame, wherein said beam comprises:

a first end having an arched contact surface for contacting the frame; and

an opposed end connected to the plate, such that the arched contact surface of said first end allows the plate to rotate in relation to the frame with reduced rotational torque.

2. A microelectromechanical beam according to claim 1, wherein said arched contact surface is spaced apart from the frame such that said arched contact surface only contacts the frame when a force is exerted on the plate pushing the plate toward the frame.

3. A microelectromechanical beam according to claim 1, wherein said arched contact surface is connected to said frame such that the plate and frame are connected, and wherein said arched contact surface allows the plate to rotate in relation to the frame with reduced rotational torque.

4. A microelectromechanical beam according to claim 1, wherein said arched contact surface of said beam is pointed.