Ring cavity type surface emitting semiconductor laser and fabrication method thereof
First Claim
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1. A surface emitting semiconductor laser comprising:
- a substrate; and
a ring cavity formed in a plane substantially perpendicular to said substrate, said cavity including an active region.
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Abstract
A surface emitting semiconductor laser of a ring cavity type with a small cavity loss includes a ring cavity or resonator which is constructed wituout using at least one of a pair of special high-reflection multi-layer mirrors and formed in a plane approximately perpendicular to its substrate. The ring cavity is built by a parallel face parallel to the substrate and at least one total reflection face formed opposed to the parallel face. The total reflection face may be a mesa-shaped semiconductor face, a polygonal cone-shaped semiconductor face, a quadrangular cone-shaped semiconductor, a circular cone-shaped semiconductor face or the like.
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Citations
32 Claims
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1. A surface emitting semiconductor laser comprising:
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a substrate; and a ring cavity formed in a plane substantially perpendicular to said substrate, said cavity including an active region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification