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Methods of making composite ultrasonic transducers

  • US 6,088,894 A
  • Filed: 11/17/1998
  • Issued: 07/18/2000
  • Est. Priority Date: 02/11/1997
  • Status: Expired due to Term
First Claim
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1. A method of fabrication of an element of an ultrasonic transducer, said element comprising an array of piezoelectric emitters spaced from one another by a polymer matrix, each emitter comprising an equal number of stacked individual ceramic members electrically connected to one another by planar strip-like electrical conductors disposed therebetween and extending continuously between opposed edges of said array, such that each of said members can be excited simultaneously by a drive signal applied to said conductors, said method comprising the steps of:

  • forming a number of planar precursors, each comprising a plurality of parallel elongated ceramic strips spaced from one another by strips of a polymer material;

    providing a continuous layer of the material of said electrical conductors on at least one of opposed planar faces of each said planar precursor;

    stacking a number of said planar precursors equal to the number of elements desired in each of said emitters atop one another, such that the parallel elongated ceramic strips of each of said planar precursors are aligned with respect to one another;

    bonding said planar precursors to one another, forming a bonded assembly wherein the conductors disposed between opposed planar precursors are in good electrical contact with the aligned ceramic strips of both;

    cutting through said bonded assembly along a number of parallel cutting lines perpendicular to the direction of elongation of said parallel elongated ceramic strips, whereby each of said parallel elongated ceramic strips is subdivided into a number of members spaced from one another by kerfs remaining after said cutting step, and said conductors are simultaneously divided into a number of strip-like conductors extending between opposite edges of said assembly;

    filling the kerfs remaining after said cutting step with a hardening polymer material; and

    providing electrical connections to said conductors at the edges of the assembly.

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