Method for fabricating a head/slider assembly integrated with a track-following micro actuator
First Claim
1. A method for fabricating a head/slider assembly integrated with an track-following electrostatic micro actuator, including the steps of:
- a) forming a micro actuator structure layer on a slider substrate with a cavity formed therebetween;
b) forming metal signal lines on the micro actuator structure layer;
c) forming a read/write magnetic head on a central part of the micro actuator structure layer;
d) etching to separate the micro actuator and the read/write magnetic head; and
e) forming a protective cover on top of the micro actuator and the read/write magnetic head to form the head/slider assembly.
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Abstract
A head/slider assembly is integrated with a track-following electrostatic micro actuator. A method for fabricating the head/slider assembly includes the steps of: forming a micro actuator structural layer on a slider substrate with a cavity formed therebetween; forming metal signal lines on the micro actuator structure layer; forming the read/write magnetic head on a central part of the micro actuator structure layer; etching to separate the micro actuator and the read/write magnetic head; and forming a protective cover on top of the micro actuator and the read/write magnetic head to form the head/slider assembly, to thereby make the assembly to allow it to be used in a HDD system of a very high track density having a track pitch of 1 μm and a recording density of more than 10 Gb/in2.
17 Citations
4 Claims
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1. A method for fabricating a head/slider assembly integrated with an track-following electrostatic micro actuator, including the steps of:
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a) forming a micro actuator structure layer on a slider substrate with a cavity formed therebetween; b) forming metal signal lines on the micro actuator structure layer; c) forming a read/write magnetic head on a central part of the micro actuator structure layer; d) etching to separate the micro actuator and the read/write magnetic head; and e) forming a protective cover on top of the micro actuator and the read/write magnetic head to form the head/slider assembly. - View Dependent Claims (2, 3, 4)
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Specification