Six axis active vibration isolation and payload reaction force compensation system

• US 6,089,525 A
• Filed: 10/07/1997
• Issued: 07/18/2000
• Est. Priority Date: 10/07/1997
• Status: Expired due to Term

• Current Assignee: Ultratech Incorporated (Veeco Instruments Incorporated)
• Original Assignee: Ultratech Stepper, Inc. (Veeco Instruments Incorporated)
• Inventors: Williams, Mark
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): MILLER, ROSE MARY
• Application Number:
  US08/946,457
• Time in Patent Office: 1,015 Days
• Field of Search: 73/662, 73/663, 73/664, 73/665, 248/550, 248/562, 248/563, 248/636, 248/638, 248/188.2, 248/559, 364/528.15, 702/56
• US Class Current: 248/550
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

An active vibration isolation and payload reaction force compensation system includes a number of isolation legs which support equipment subject to undesirable vibrations. Each leg includes an elastomeric support member which supports the mass of the equipment and attenuates seismic forces transmitted from the ground to the system. A number of force actuators fixed to each leg and to the equipment in oppositely directed pairs provide forces directed to compensate for motions of the equipment. Six accelerometers are provided on the equipment to measure accelerations in six degrees of freedom. A control system, responsive to signals from the accelerometers, causes actuation of the force actuators.

Claims

1. A vibration isolation and payload reaction force compensation system comprising:

a base having a movable payload supporting assembly; and

a plurality of isolation legs disposed to support said base on a ground surface, each isolation leg comprising;

a housing disposed to contact said ground surface, and

an elastomeric support member having balanced horizontal and vertical stiffness coupled to said housing and disposed to support and isolate said base from direct contact with said housing, and to attenuate seismic forces transmitted from said ground in all directions.

2. The system of claim 1, wherein:

each of said isolation legs further includes a plurality of force actuators disposed between said housing and said base to compensate for motions of said base in response to control signals; and

said system further includes a control system in communication with said plurality of force actuators to generate said control signals to cause actuation of said plurality of force actuators.

3. The system of claim 1, wherein said system further includes

a plurality of accelerometers in communication with, and disposed to detect accelerations of, said base.

4. The system of claim 3, wherein said plurality of accelerometers detect accelerations in six degrees of freedom.

5. The system of claim 2, wherein said system further includes a plurality of accelerometers in communication with, and disposed to detect accelerations of, said base.

6. The system of claim 5, wherein said plurality of accelerometers are disposed to detect accelerations of said base in six degrees of freedom.

7. The system of claim 5, wherein said plurality of accelerometers are coupled to said control system to provide acceleration information for the generation of said control signals.

8. The system of claim 5, wherein said plurality of accelerometers comprise six accelerometers disposed to detect linear accelerations along three orthogonal axes and angular accelerations about said three orthogonal axes.

9. The system of claim 2, wherein each of said plurality of force actuators are non-contact, tractive type actuators.

10. The system of claim 2, wherein said plurality of force actuators are provided in pairs with each providing oppositely directed forces.

11. The system of claim 10, wherein there are three pairs of force actuators, with a different pair of force actuators oriented in each of said x, y and z axis.

12. The system of claim 9, wherein each force actuator comprises a variable reluctance tractive type force actuator.

13. An isolation leg for use with a vibration isolation and payload reaction force compensation system having a base with a movable payload supporting assembly and a plurality of isolation legs disposed to support said base on a ground surface, each isolation leg comprising:

a housing disposed to contact said ground surface; and

an elastomeric support member having balanced horizontal and vertical stiffness coupled to said housing and disposed to support and isolate said base from direct contact with said housing, and to attenuate seismic forces transmitted from said ground in all directions.

14. The isolation leg of claim 13, further comprising a plurality of force actuators disposed between said housing and said base to compensate for motions of said base in response to control signals.

15. The isolation leg of claim 14, wherein each of said plurality of force actuators are non-contact, tractive type actuators.

16. The isolation leg of claim 14, wherein said plurality of force actuators are provided in pairs with each providing oppositely directed forces.

17. The isolation leg of claim 15, wherein each force actuator comprises a variable reluctance tractive type force actuator.