Electro-actuated microlens assemblies

• US 6,091,537 A
• Filed: 12/11/1998
• Issued: 07/18/2000
• Est. Priority Date: 12/11/1998
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Maeda, Patrick Y., Peeters, Eric, Sun, Decai, Bringans, Ross D.
• Primary Examiner(s): MAI, HUY KIM
• Application Number:
  US09/209,347
• Time in Patent Office: 585 Days
• Field of Search: 359/248, 359/619, 359/290, 359/291, 359/295, 359/298
• US Class Current: 359/248
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 2201/047 Optical MEMS not provided for in B81B2201/042 - B81B2201/045
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 3/0062 Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
• CPC Class Codes: G02B 26/0875 by means of one or more refracting elements
• CPC Class Codes: G02B 26/10 Scanning systems
• CPC Class Codes: G02B 7/023 permitting adjustment
• CPC Class Codes: G02B 7/08 adapted to co-operate with a remote control mechanism
• CPC Class Codes: H01S 5/0071 for beam steering, e.g. using a mirror outside the cavity to change the beam direction
• CPC Class Codes: H01S 5/0607 by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
• CPC Class Codes: H01S 5/18388 Lenses

Abstract

A micro-machined movable microlens assembly is formed on undoped or pure a semiconductor substrate. The movable microlens assemblies are to be actuated using force generators which cause various mechanical degrees of freedom depending upon the type of stage suspension and actuation used.

Claims

1. A micro-machined microlens assembly, comprising:

a substrate made of semiconductor material;

a microlens;

a microlens support which movably supports the microlens;

at least one suspension member, the at least one suspension member having a first end and a second end, the first end being attached to the microlens support and the second end being attached to the substrate thereby suspending the microlens support above the substrate; and

at least one force generator which moves the microlens support.

2. The micro-machined microlens assembly as claimed in claim 1, wherein the microlens support is made of a semiconductor material.

3. The micro-machined microlens assembly as claimed in claim 1, wherein the at least one suspension member is made of a semiconductor material.

4. The micro-machined microlens assembly as claimed in claim 1, wherein the at least one force generator is made of semiconductor material.

5. The micro-machined microlens assembly as claimed in claim 1, wherein the at least one suspension member includes two suspension members attached to opposite sides of the substrate.

6. The micro-machined microlens assembly as claimed in claim 1, further comprising a light source supported on the substrate.

7. The micro-machined microlens assembly as claimed in claim 1, wherein the at least one force generator causes the microlens support to move horizontally parallel to the substrate.

8. The micro-machined microlens assembly as claimed in claim 7, wherein the at least one force generator is a pair of electrostatic comb sets each electrostatic comb set having a fixed comb attached to the substrate and a movable comb attached to the microlens support.

9. The micro-machined microlens assembly as claimed in claim 1, wherein the at least one force generator causes the microlens support to move perpendicular to the substrate.

10. The micro-machined microlens assembly as claimed in claim 9, wherein the at least one force generator is a pair of electrodes fixed to the substrate beneath the microlens support.

11. An array of micro-machined microlens assemblies, comprising:

a substrate made of semiconductor material;

a plurality of microlenses;

at least one microlens support which movably supports the microlenses;

a plurality of suspension members, each suspension member having a first end and a second end, the first end of each suspension member being attached to the microlens support and the second end of each suspension member being attached to the substrate thereby suspending the at least one microlens support above the substrate; and

at least one force generator which moves the plurality of microlenses with respect to the substrate.

12. The array of micro-machined microlens assemblies as claimed in claim 11, further comprising a plurality of light sources, a light source being associated with each microlens, light rays from each light source passing through the microlens associated with each light source.

13. The array of micro-machined microlens assemblies as claimed in claim 11, wherein each microlens is supported by a separate microlens support.

14. The array of micro-machined microlens assemblies as claimed in claim 12, further comprising a secondary lens, wherein light rays from a single microlens pass through the secondary lens.

15. The array of micro-machined microlens assemblies as claimed in claim 12, further comprising a secondary lens, wherein light rays from more than one microlens pass through the secondary lens.

16. A method of moving a micro-machined microlens assembly, comprising:

suspending a microlens assembly on a semiconductor substrate, the microlens assembly being supported on a microlens support; and

actuating a first force generator which moves the microlens support in a first direction; and

actuating a second force generator which moves the microlens support in a second direction.

17. The method of moving a micro-machined movable microlens assembly as claimed in claim 16, further comprising:

actuating a second force generator which moves the microlens support in a second direction, wherein the first and second direction are substantially parallel to the substrate.

18. The method of moving a micro-machined movable microlens assembly as claimed in claim 17, wherein actuating a first force generator includes applying a first voltage to a first set of electric comb actuators which moves the microlens support in the first direction and actuating a second force generator includes applying a second voltage to a second set of electric comb actuators.

19. The method of moving a micro-machined movable microlens assembly as claimed in claim 16, further comprising:

actuating the first force generator which moves the microlens support in a second direction, wherein the first and second directions are substantially perpendicular to the substrate.

20. The method of moving a micro-machined movable microlens assembly as claimed in claim 19, wherein actuating a first force generator includes applying a first voltage to a pair of electrodes actuator which moves the microlens support in the first direction.