Method and system for anomaly detection
First Claim
1. A system for detecting anomalies on a semiconductor wafer, the system comprising:
- a moveable stage for holding and positioning the semiconductor wafer;
a camera for capturing an image of the semiconductor wafer;
a digitizer coupled to the camera for producing a digital-pixel-based representation of the image;
a computer having a processor and memory, the computer coupled to the digitizer for receiving the digital-pixel-based representation from the digitizer and coupled to the stage for selectively moving the stage to align the wafer; and
the computer is programmed to be operable to;
symbolically decompose the digital-pixel-based representation of an image to create a primitive-based representation of the image,the computer further operable to develop a histogram of angles and lengths of geometric objects within the image and compare the histogram to a reference histogram of a reference image to determine rotational shift of the image.
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Accused Products
Abstract
A system and method for detecting anomalies on a manufactured device includes or utilizes a moveable stage for holding and positioning the device, a camera for capturing an image of the device on the stage, a digitizer coupled to the camera for producing a digital-pixel-based representation of the image, and a computer having a processor and memory. The computer is coupled to the digitizer for receiving the digital-pixel-based representation from the digitizer and coupled to the stage for selectively moving the stage to align the device. The computer is programmed to be operable to symbolically decompose a digital-pixel-based representation of an image to create a primitive-based representation of the image. The image may be aligned by the computer with respect to the rotation of geometric objects in the image by developing a histogram of angles and lengths and matching them to determine a rotational shift.
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Citations
14 Claims
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1. A system for detecting anomalies on a semiconductor wafer, the system comprising:
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a moveable stage for holding and positioning the semiconductor wafer; a camera for capturing an image of the semiconductor wafer; a digitizer coupled to the camera for producing a digital-pixel-based representation of the image; a computer having a processor and memory, the computer coupled to the digitizer for receiving the digital-pixel-based representation from the digitizer and coupled to the stage for selectively moving the stage to align the wafer; and the computer is programmed to be operable to; symbolically decompose the digital-pixel-based representation of an image to create a primitive-based representation of the image, the computer further operable to develop a histogram of angles and lengths of geometric objects within the image and compare the histogram to a reference histogram of a reference image to determine rotational shift of the image. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A system for detecting anomalies on a manufactured device, the system comprising:
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a moveable stage for holding and positioning the device; a camera for capturing an image of the device on the stage; a digitizer coupled to the camera for producing a digital-pixel-based representation of the image; a computer having a processor and memory, the computer coupled to the digitizer for receiving the digital-pixel-based representation from the digitizer and coupled to the stage for selectively moving the stage to align the device; and the computer is programmed to be operable to; symbolically decompose a digital-pixel-based representation of the image to create a primitive-based representation of the image; analyze the primitive-based representation of the image to detect and locate any anomalies; and the computer further to develop a histogram of angles and lengths of objects within the image and compare the histogram to a reference histogram of a reference image to determine the rotational shift of the image. - View Dependent Claims (9)
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10. A method for detecting anomalies on a manufactured device, the system comprising:
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placing the manufactured device on a moveable stage; capturing and preparing a digital-pixel-based representation of the image; symbolically decomposing the digital-pixel-based representation of an image to create a primitive-based representation of the image; analyzing the primitive-based representation of the image to detect and locate any anomalies; and wherein the step of decomposing the digital-pixel-based representation of an image includes aligning geometric objects in the pixel-based representation of the image with respect to rotation by developing a histogram of angles and lengths and matching them with a reference histogram of a reference image to determine a rotational shift. - View Dependent Claims (11, 12, 13, 14)
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Specification