Scanning-probe microscope including non-optical means for detecting normal tip-sample interactions

• US 6,094,971 A
• Filed: 09/24/1997
• Issued: 08/01/2000
• Est. Priority Date: 09/24/1997
• Status: Expired due to Term

• Current Assignee: Texas Instruments, Inc.
• Original Assignee: Texas Instruments, Inc.
• Inventors: Duncan, Walter, Edwards, Hal
• Primary Examiner(s): Larkin, Daniel S.
• Application Number:
  US08/936,210
• Time in Patent Office: 1,042 Days
• Field of Search: 73/105, 250/306
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 10/045 Self-actuating probes, i.e. wherein the actuating means for driving are part of the probe itself, e.g. piezoelectric means on a cantilever probe
• CPC Class Codes: G01Q 20/04 Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
• CPC Class Codes: G01Q 60/34 Tapping mode
• CPC Class Codes: G01Q 60/38 Probes, their manufacture, or their related instrumentation, e.g. holders
• CPC Class Codes: Y10S 977/851 Particular movement or positioning of scanning tip
• CPC Class Codes: Y10S 977/872 Positioner

Abstract

An embodiment of the instant invention is a scanning-probe microscope for measuring the topography of a surface of a sample, the scanning-probe microscope comprising: an XYZ piezo drive (piezo drive 1); a quartz tuning-fork oscillator (fork 2) having a first electrode (electrode 3 or 4) and a second electrode (electrode 3 or 4), wherein the quartz tuning-fork oscillator is attached to the XYZ piezo drive, and wherein the quartz tuning-fork oscillator is oriented such that the tines of the quartz tuning-fork oscillator each lie in the XY plane and their fundamental mode of oscillation vibrates the ends of the tines in the Z direction; a probe tip (probe tip 6) affixed to one of the tines, the probe tip comes to a point in the Z direction and directed away from the XYZ piezo drive; a signal source (source 7) to provide a drive signal to drive the first electrode at a mechanical resonant frequency of the quartz tuning-fork oscillator; a current-to-voltage amplifier (preamp 8) to monitor the electrical current flowing through the second electrode and having an output, wherein the electrical impedance of the quartz tuning-fork oscillator may be measured, and the resonant vibration amplitude of the quartz tuning-fork oscillator is monitored; and wherein the XYZ piezo drive is operable to move the probe tip close to the surface of the sample until the probe tip lightly taps the sample surface thereby decreasing and oscillation amplitude the electrical impedance of the quartz tuning-fork oscillator and wherein the interaction between the probe tip and the sample surface can be used to regulate the distance between the probe tip and the sample surface.

Claims

1. A scanning-probe microscope for measuring the topography of a surface of a sample, said scanning-probe microscope comprising:

an XYZ piezo drive;

a quartz tuning-fork oscillator having a first electrode and a second electrode, wherein said quartz tuning-fork oscillator is attached to said XYZ piezo drive, and wherein said quartz tuning-fork oscillator is oriented such that the tines of said quartz tuning-fork oscillator each lie in the XY plane and their fundamental mode of oscillation vibrates the ends of said tines in the Z direction;

a probe tip affixed to one of said tines, said probe tip comes to a point in the Z direction and directed away from said XYZ piezo drive;

a signal source to provide a drive signal to drive said first electrode at a mechanical resonant frequency of said quartz tuning-fork oscillator;

a current-to-voltage amplifier to monitor the electrical current flowing through said second electrode and having an output, wherein the electrical impedance of said quartz tuning-fork oscillator may be measured, and the resonant vibration amplitude of said quartz tuning-fork oscillator is monitored; and

wherein said XYZ piezo drive is operable to move said probe tip close to said surface of said sample until said probe tip lightly taps said sample surface thereby decreasing and oscillation amplitude said electrical impedance of said quartz tuning-fork oscillator and wherein the interaction between said probe tip and said sample surface can be used to regulate the distance between said probe tip and said sample surface.

2. The scanning-probe microscope of claim 1, wherein said probe tip is comprised of a wire which is comprised of a material selected from the group consisting of:

W, Pt, Ir, Pt/Ir alloys, Au, Ag, Al, Al/Si alloys, Al/Mg alloys, Nb, and Ti.

3. The scanning-probe microscope of claim 2, wherein said wire comprising said probe tip is electrically connected to either said first electrode or said second electrode and the electrical potential of said probe tip is controlled.

4. The scanning-probe microscope of claim 2, wherein said wire is electrically isolated from said first and second electrodes and is electrically connected to an external device.

5. The scanning-probe microscope of claim 4, wherein said external device is a capacitance sensor thereby allowing the mapping of the capacitance between said probe tip and said sample surface.

6. The scanning-probe microscope of claim 5, wherein said probe tip is comprised of a metal selected from the member of the group consisting of:

Al, Ti, Nb, alloys of Al, alloys of Ti, alloys of Nb, and any other metal with a stable oxide.

7. The scanning-probe microscope of claim 6, wherein said probe tip is electrically isolated from said sample surface.

8. The scanning-probe microscope of claim 4, wherein said external device is a bias voltage source thereby allowing the potential of said probe tip to be controlled independently of said first and second electrodes.

9. The scanning-probe microscope of claim 4, wherein said external device measures the electrical potential difference between said probe tip and said sample surface, and electrostatic properties of said sample surface are mapped in order to perform scanning Kelvin-probe microscopy.

10. The scanning-probe microscope of claim 4, wherein said external device includes a sensitive current electrometer to measure the tunneling current between said probe tip and said sample surface so as to perform scanning-tunneling microscopy and scanning-tunneling spectroscopy.

11. The scanning-probe microscope of claim 1, further including a phase-sensitive detector to monitor the electrical phase difference between the drive signal and the output of said current-to-voltage amplifier, whereby the interaction between said probe tip and said sample surface is monitored by measuring the phase difference between the drive signal and the electromechanical response of said quartz tuning-fork oscillator.

12. The scanning-probe microscope of claim 11, wherein said signal source comprises a voltage-controlled oscillator, and wherein the output of said phase-sensitive detector is an input to said voltage-controlled oscillator thereby forming a phase-locked loop wherein the interaction between said probe tip and said sample surface is monitored as a shift in the mechanical resonant frequency of said quartz tuning-fork oscillator.

13. The scanning-probe microscope of claim 12, wherein said probe tip is further comprised of a magnetic material such that the resonant frequency of said quartz tuning-fork oscillator is shifted, said frequency shift detected by said phase-locked loop.

14. The scanning-probe microscope of claim 13, wherein the magnetic field structure of said sample surface is mapped in order to perform magnetic-force microscopy.

15. The scanning-probe microscope of claim 12, wherein said probe tip is coated with a thin film of a magnetic material such that a magnetic field exerts a force on said probe tip thereby shifting the resonant frequency of said quartz tuning-fork oscillator, said frequency shift being detected by said phase-locked loop.

16. The scanning-probe microscope of claim 15, wherein the magnetic field structure of said sample surface is mapped in order to perform magnetic-force microscopy.

17. A near-field scanning optical microscope for mapping the topography and optical properties of a sample surface, said near-field scanning optical microscope comprising:

a XYZ piezo drive;

a quartz tuning-fork oscillator having a first electrode and a second electrode, said quartz tuning-fork oscillator is attached to said XYZ piezo drive and is oriented such that tines of said quartz tuning-fork oscillator each lie in the XY plane and their fundamental mode of oscillation vibrates the ends of said tines in the Z direction;

an optical fiber affixed to one of said tines, said optical fiber comes to a point in the Z direction and directed away from said XYZ piezo drive;

a signal source to drive said first electrode at a mechanical resonant frequency of said quartz tuning-fork oscillator;

a current-to-voltage amplifier to monitor the electrical current flowing through said second electrode, the electrical impedance of said quartz tuning-fork oscillator is measured and the resonant vibration amplitude of said quartz tuning-fork oscillator is monitored; and

wherein said XYZ piezo drive moves said optical fiber close to a sample surface until said optical fiber lightly taps said sample surface so as to decrease, said oscillation amplitude and said electrical impedance of said quartz tuning-fork oscillator, the interaction between said optical fiber and said sample surface is utilized so as to regulate the distance between optical fiber and sample surface.