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Acceleration sensor with a circuit board separated from a base plate by a space

  • US 6,094,984 A
  • Filed: 09/08/1997
  • Issued: 08/01/2000
  • Est. Priority Date: 11/09/1993
  • Status: Expired due to Term
First Claim
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1. An acceleration sensor comprising:

  • an acceleration detecting element comprising a piezoelectric element subjected to polarization processing, and a weight fastened on said piezoelectric element and composed of a material having a coefficient of thermal expansion equal to that of said piezoelectric element;

    a circuit board on which said acceleration detecting element is mounted, said acceleration detecting element being mounted at a center position of a major surface of said circuit board, such that the direction in which acceleration is to be detected is parallel to the major surface of said circuit board;

    a base plate arranged opposed to said circuit board while being separate from said circuit board by a space;

    at least one connecting terminal extending from said circuit board toward one side of said base plate, and projecting away from an opposite side of said base plate, and fixed to said base plate, said connecting terminal comprising a plurality of connecting terminals arranged along each of a pair of opposite sides of said circuit board in a rectangular shape, and said acceleration detecting element being mounted on said circuit board so that the direction in which acceleration is to be detected is a direction orthogonal to the direction in which said connecting terminals are aligned along said circuit board; and

    a substrate supporting member arranged between said circuit board and said base plate for separating the same.

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