Dry etching apparatus having means for preventing micro-arcing

• US 6,096,161 A
• Filed: 11/03/1998
• Issued: 08/01/2000
• Est. Priority Date: 12/24/1997
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Kim, Hag-pil, Lee, Young-woo, Kim, Tae-ryong
• Primary Examiner(s): Beck, Shrive
• Assistant Examiner(s): TORRES VELAZQUEZ, NORCA LIZ
• Application Number:
  US09/185,091
• Time in Patent Office: 637 Days
• Field of Search: 156/345
• US Class Current: 156/345.47
• CPC Class Codes: H01J 37/32623 Mechanical discharge control means
• CPC Class Codes: H01J 37/32642 Focus rings
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: Y10S 156/915 Differential etching apparatus including focus ring surrounding a wafer for plasma apparatus

Abstract

A dry etching apparatus used for manufacture of a semiconductor device includes a plasma confinement ring secured by screws to a cathode, an anode, and a metal focusing ring extending around the anode for enhancing the uniformity of the plasma. The screws are located a maximum distance away from the focusing ring. Thus, micro-arcing is prevented from occurring between the focusing ring and the screws. The confinement ring is also designed to distribute the plasma stream only onto the wafer, so that the generation of contamination particles is suppressed during etching.

Claims

1. A dry etching apparatus comprising:

a processing chamber in which plasma is produced;

a plate fixed in place at an upper portion of said processing chamber;

a wafer chuck disposed at a lower portion of said processing chamber;

a metal focusing ring extending around a portion of the chuck for enhancing the uniformity of the density of the plasma;

a cathode disposed at an upper portion of the dry etching apparatus, facing said chuck and spaced apart from said chuck by a predetermined distance;

a confinement ring supporting said cathode at an outer peripheral portion of said cathode and protruding downwardly from said cathode;

a plurality of metal screws fixing said confinement ring to said plate;

caps of electrically insulating material covering said screws, wherein each of said caps has a vacuum hole extending horizontally therethrough; and

an RF power source connected to said anode and said cathode so as to produce an RF electric field therebetween, and wherein said screws are located outside a region in which the RF electric field is produced.

2. The apparatus of claim 1, wherein said metal ring is of an anodized metal.

3. The apparatus of claim 1, wherein said confinement ring protrudes 7 to 9 mm downwardly from said cathode.

4. The apparatus of claim 1, wherein said confinement ring is of a material selected from the group consisting of ceramic, anodized aluminum and quartz.

5. The apparatus of claim 1, wherein said confinement ring has a smooth heat resistant/scratch resistant polymer coating.

6. The apparatus of claim 1, wherein each of said screws is located 9 to 12 mm away from an inner peripheral edge of said confinement ring as taken along a line extending radially of said confinement ring and intersecting the screw.