Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method

• US 6,096,231 A
• Filed: 01/25/1999
• Issued: 08/01/2000
• Est. Priority Date: 10/06/1992
• Status: Expired due to Fees

• Current Assignee: Balzers Aktiengesellschaft (OC Oerlikon Corporation AG)
• Original Assignee: Balzers Aktiengesellschaft (OC Oerlikon Corporation AG)
• Inventors: Schertler, Roman
• Primary Examiner(s): Lund, Jeffrie R
• Assistant Examiner(s): Powell, Alva C
• Application Number:
  US09/236,388
• Time in Patent Office: 554 Days
• Field of Search: 118/721, 118/729, 118/500, 414/217, 414/221, 414/744.894, 414/941, 216/41, 279/128
• US Class Current: 216/41
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: C23C 14/566 using a load-lock chamber
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28
• CPC Class Codes: H01L 21/67161 characterized by the layout of the process chambers
• CPC Class Codes: H01L 21/67196 characterized by the construction of the transfer chamber
• CPC Class Codes: H01L 21/67236 the substrates being processed being not semiconductor wafers, e.g. leadframes or chips
• CPC Class Codes: H01L 21/67709 using magnetic elements
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices
• CPC Class Codes: H01L 21/68764 characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
• CPC Class Codes: H01L 21/68771 characterised by supporting more than one semiconductor substrate
• CPC Class Codes: Y10S 414/139 including wafer charging or discharging means for vacuum chamber
• CPC Class Codes: Y10S 414/141 includes means for gripping wafer
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

At least one chamber is provided for transport of workpieces such as storage disks, at least at times, into the vacuum atmosphere, during their manufacturing and comprises at least two exterior openings for the guiding-through of a workpiece. A majority of workpiece-receiving devices can be rotated jointly about an axis. At least one transport element is provided and is aligned with an opening. The transport element is disposed in the chamber independently of the rotatable workpiece-receiving devices and can be moved out and back in a radially controlled manner in at least one component, and engages on a workpiece in the opening area. A transport method for workpieces in an evacuatable chamber provides that at least two workpieces are rotated about a center in a plane of rotation and are displaced individually in a radial manner with respect to the center of rotation at least in one movement component.

Claims

1. A method for treating a non-magnetic workpiece by a vacuum treatment, comprising the steps of:

(a) providing a vacuum treatment chamber for said workpiece;

(b) providing a transport arrangement for said workpiece in vacuum and comprising a part of magnetic material;

(c) applying said workpiece adjacent to said part of magnetic material;

(d) clamping said workpiece towards said part of magnetic material by applying, opposite to said part of magnetic material and with respect to said workpiece, a member comprised of magnetic material onto said workpiece and adjacent to said part of magnetic material of the transport arrangement; and

(e) conveying said workpiece to or from said treatment chamber by said transport arrangement with said workpiece clamped thereon.

2. The method according to claim 1 further comprising the steps of conveying said workpiece to a surface treatment station and masking said treatment off said workpiece by way of said member.

3. The method according to claim 2, further comprising the steps of providing at said transport arrangement at least two parts of magnetic material and clamping at least two workpieces thereto by at least two of said members.

4. The method of claim 1 further comprising removing said member from said workpiece, exchanging said workpiece on said part by a further workpiece and rearranging said removed member on said further workpiece.