Formation of microchannels from low-temperature plasma-deposited silicon oxynitride

• US 6,096,656 A
• Filed: 06/24/1999
• Issued: 08/01/2000
• Est. Priority Date: 06/24/1999
• Status: Expired due to Term

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Bridges, Monica M., Manginell, Ronald P., Ashby, Carol I. H., Matzke, Carolyn M.
• Primary Examiner(s): Bowers, Charles
• Assistant Examiner(s): KILDAY, LISA A
• Application Number:
  US09/339,715
• Time in Patent Office: 404 Days
• Field of Search: 205/122, 216/2, 156/643.1, 438/694, 438/697, 438/700, 438/702
• US Class Current: 438/702
• CPC Class Codes: B81B 2201/058 Microfluidics not provided for in B81B2201/051 - B81B2201/054
• CPC Class Codes: B81C 1/00071 Channels
• CPC Class Codes: B81C 1/00436 Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
• CPC Class Codes: B81C 2201/0109 Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
• CPC Class Codes: G01N 27/44791 Microapparatus sample containers with integrated microfluidic structures B01L3/5027
• CPC Class Codes: G01N 30/6095 Micromachined or nanomachined, e.g. micro- or nanosize

Abstract

A process for forming one or more fluid microchannels on a substrate is disclosed that is compatible with the formation of integrated circuitry on the substrate. The microchannels can be formed below an upper surface of the substrate, above the upper surface, or both. The microchannels are formed by depositing a covering layer of silicon oxynitride over a mold formed of a sacrificial material such as photoresist which can later be removed. The silicon oxynitride is deposited at a low temperature (≦100° C.) and preferably near room temperature using a high-density plasma (e.g. an electron-cyclotron resonance plasma or an inductively-coupled plasma). In some embodiments of the present invention, the microchannels can be completely lined with silicon oxynitride to present a uniform material composition to a fluid therein. The present invention has applications for forming microchannels for use in chromatography and electrophoresis. Additionally, the microchannels can be used for electrokinetic pumping, or for localized or global substrate cooling.

Claims

1. A method for forming a fluid microchannel in a substrate, comprising steps for:

(a) forming a trench below an upper surface of the substrate;

(b) filling the trench with a sacrificial material;

(c) forming at least one silicon oxynitride layer covering the trench; and

(d) removing the sacrificial material from the trench, thereby forming the microchannel.

2. The method of claim 1 wherein the step for forming the trench comprises forming the trench by etching.

3. The method of claim 2 wherein the step for forming the trench comprises etching the trench in a substrate selected from the group consisting of semiconductors, crystalline quartz, fused silica, glasses, ceramics, polymers, metals, and ferroelectrics.

4. The method of claim 1 wherein the step for forming the trench comprises forming the trench with a pair of sidewalls aligned substantially perpendicular to the upper surface of the substrate.

5. The method of claim 4 wherein the step for forming the trench further comprises forming a plurality of shaped columns in the trench, with the shaped columns being aligned substantially perpendicular to the upper surface of the substrate.

6. The method of claim 1 wherein the step for forming the trench comprises forming the trench with curved sidewalls.

7. The method of claim 1 wherein the step for filling the trench with the sacrificial material comprises spinning on a photoresist or photodefinable polymer over the surface of the substrate and in the trench, photolithographically exposing and developing the photoresist or photodefinable polymer to remove a portion thereof outside of the trench.

8. The method of claim 7 wherein the step for removing the sacrificial material comprises removing the photoresist or photodefinable polymer from the trench by dissolution using a solvent.

9. The method of claim 1 further including a step for cleaning the substrate to remove any sacrificial material from the upper surface of the substrate after the step for filling the trench with the sacrificial material.

10. The method of claim 9 wherein the step for cleaning the substrate comprises exposing the substrate to an oxygen plasma for sufficient time to remove the sacrificial material from the upper surface of the substrate.

11. The method of claim 1 wherein the step for depositing the silicon oxynitride layer comprises depositing the silicon oxynitride layer by a high-density plasma deposition process.

12. The method of claim 11 wherein the step for depositing the silicon oxynitride layer is carried on at a substrate temperature of ≦

100°

C.

13. The method of claim 11 wherein the high-density plasma deposition process comprises electron-cyclotron resonance (ECR) plasma deposition or inductively-coupled plasma (ICP) deposition.

14. The method of claim 13 wherein the silicon oxynitride after deposition thereof has a composition Si_w O_x N_y H_z, with 25-65 atomic percent (at. %) silicon (Si), 5-40 at. % oxygen (O), 10-40 at. % nitrogen (N), and 0-25 at. % hydrogen (H).

15. The method of claim 14 further including a step for densifying the silicon oxynitride by thermal annealing after the step for removing the sacrificial material from the trench.

16. The method of claim 1 further including a step for lining the trench with an underlayer of silicon oxynitride prior to the step for filling the trench with the sacrificial material.

17. The method of claim 16 wherein the underlayer has a thickness in the range of 0.05 microns.

18. The method of claim 1 wherein the step for removing the sacrificial material from the trench comprises forming at least one opening through the silicon oxynitride layer to expose the sacrificial material.

19. The method of claim 18 further including a step for sealing each opening through the silicon oxynitride layer after the step for removing the sacrificial material from the trench.

20. The method of claim 1 further including a step for depositing an encapsulating layer over the silicon oxynitride layer after the step for removing the sacrificial material.

21. A method for forming a fluid microchannel on a substrate, comprising steps for:

(a) depositing a sacrificial material over an upper surface of the substrate and patterning the sacrificial material to form an elongate-shaped mold for the microchannel to be formed on the substrate;

(b) depositing at least one covering layer of silicon oxynitride over the patterned sacrificial material, and providing at least one opening for exposing the sacrificial material; and

(c) removing the sacrificial material through the opening, thereby forming the microchannel.

22. The method of claim 21 wherein the substrate comprises a material selected from the group consisting of semiconductors, crystalline quartz, fused silica, glasses, ceramics, polymers, metals, and ferroelectrics.

23. The method of claim 21 wherein the step for depositing the sacrificial material comprises spinning on a photoresist over the upper surface of the substrate, and patterning the photoresist to form the mold.

24. The method of claim 23 further including a step for heating the patterned photoresist and flowing the patterned photoresist, thereby producing a curved cross-section shape for the mold.

25. The method of claim 23 wherein the step for removing the sacrificial material comprises removing the photoresist by solvent dissolution.

26. The method of claim 23 further including a step for cleaning the upper surface of the substrate to remove any photoresist residue after patterning of the photoresist by exposing the upper surface of the substrate to an oxygen plasma for sufficient time to remove the photoresist residue.

27. The method of claim 21 wherein the step for depositing the covering layer comprises depositing the covering layer by a high-density plasma deposition process.

28. The method of claim 27 wherein the high-density plasma deposition process is carried on at a substrate temperature of ≦

100°

C.

29. The method of claim 27 wherein the high-density plasma deposition process comprises electron-cyclotron resonance (ECR) plasma deposition or inductively-coupled plasma (ICP) deposition.

30. The method of claim 21 wherein the silicon oxynitride covering layer after deposition thereof has a composition Si_w O_x N_y H_z, with 25-65 atomic percent (at. %) silicon (Si), 5-40 at. % oxygen (O), 10-40 at. % nitrogen (N), and 0-25 at. % hydrogen (H).

31. The method of claim 30 further including a step for densifying the silicon oxynitride covering layer by thermal annealing after the step for removing the sacrificial material.

32. The method of claim 21 further including a step for lining the upper surface of the substrate with an underlayer of silicon oxynitride layer prior to the step for depositing the sacrificial material.

33. The method of claim 32 further including a step for treating an exposed portion of the underlayer prior to the step for depositing the covering layer to improve adhesion of the covering layer to the exposed portion of the underlayer.

34. The method of claim 21 further including a step for forming a trench in the substrate prior to the step for depositing the sacrificial material.

35. The method of claim 34 further including a step for lining the trench with an underlayer of silicon oxynitride layer prior to the step for depositing the sacrificial material.

36. The method of claim 34 wherein the step for depositing the sacrificial material over the substrate fills the trench, with the sacrificial material extending upward beyond the upper surface of the substrate.

37. The method of claim 35 wherein the mold formed by patterning the sacrificial material lies within the trench and further extends upward beyond the upper surface of the substrate.

38. The method of claim 36 wherein the sacrificial material comprises a photoresist, and further including a step, after patterning of the photoresist to form the mold, for heating the photoresist to a temperature sufficiently high to produce a flowing of the photoresist, thereby generating a curved cross-section shape for the mold.

39. The method of claim 21 further including a step for sealing each opening after the step for removing the sacrificial material.

40. The method of claim 21 further including a step for depositing an encapsulating layer over the covering layer after the step for removing the sacrificial material.