Image detection apparatus
First Claim
1. An image detection apparatus comprising:
- a) a tilt stage capable of holding an object and inclining a surface of the object;
b) an illumination system designed so as to illuminate the surface with light;
c) a detection optical system to form an image of the surface;
d) a photoelectric detector, that photoelectrically detects said image;
e) an inclination detection apparatus in communication with said tilt stage, designed to detect said inclination and to provide an output signal corresponding to said inclination;
f) an image distortion correction unit, electrically connected to said photoelectric detector and said inclination detection apparatus, designed so as to substantially eliminate said amount of distortion in said image and form a substantially distortion-free image; and
g) an image processing unit, electrically connected to said image distortion correction unit, that inspects surface in said substantially distortion-free image.
1 Assignment
0 Petitions
Accused Products
Abstract
An image detection apparatus (10) having an illumination system (IS) irradiates light onto the surface (30S) of an object 30 to be inspected for defects. A detection optical system (34) condenses the light from the surface and forms an image of the surface on an image detector (48). The detection optical system includes a receiving mirror (38) having an optical axis (A38) that intersects the reference optical axis (A34) of the detection optical system. A processing apparatus (60) includes a processing system (62) that performs image processing based on an output from the detector corresponding to the image. The processing system includes an image distortion correction unit (62a) for eliminating the effects of distortion in the image of the surface generated by the inclination of the surface with respect to the reference optical axis and the receiving mirror.
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Citations
17 Claims
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1. An image detection apparatus comprising:
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a) a tilt stage capable of holding an object and inclining a surface of the object; b) an illumination system designed so as to illuminate the surface with light; c) a detection optical system to form an image of the surface; d) a photoelectric detector, that photoelectrically detects said image; e) an inclination detection apparatus in communication with said tilt stage, designed to detect said inclination and to provide an output signal corresponding to said inclination; f) an image distortion correction unit, electrically connected to said photoelectric detector and said inclination detection apparatus, designed so as to substantially eliminate said amount of distortion in said image and form a substantially distortion-free image; and g) an image processing unit, electrically connected to said image distortion correction unit, that inspects surface in said substantially distortion-free image. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of forming a substantially distortion-free image of a surface, the method comprising the steps of:
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a) tilting a stage capable of holding an object and inclining the surface of the object; b) illuminating the surface; c) collecting light from the surface using a detection optical system; d) forming an image of the surface, said image having an amount of distortion; e) determining said amount of distortion in said image; and f) removing said amount of distortion, as determined in said step e), from said image, thereby forming a substantially distortion-free image. - View Dependent Claims (14, 15)
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16. A method of forming a substantially distortion-free image of a surface having a surface normal to facilitate identifying surface defects, the method comprising the steps of:
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a) obliquely illuminating the surface; b) receiving light from the surface using a detection optical system having a first axis disposed at a first angle with respect to the surface normal; c) forming an image of the surface along a second axis forming a second angle with said first axis, said image having an amount of distortion corresponding to said first and second angles; d) detecting said image with said amount of distortion and providing a first output signal corresponding to said image with said amount of distortion; e) determining said first and second angles and providing a second output signal corresponding to said first and second angles; f) inputting said first and second output signals into a distortion correction unit and determining said amount of distortion based on said first and second output signals; and g) substantially removing said amount of distortion from said first output signal, thereby creating a third output signal corresponding to a substantially distortion-free image. - View Dependent Claims (17)
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Specification