Image detection apparatus

• US 6,097,483 A
• Filed: 03/01/1999
• Issued: 08/01/2000
• Est. Priority Date: 02/27/1998
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Komatsu, Koichiro
• Primary Examiner(s): Pham, Hoa Q.
• Application Number:
  US09/259,733
• Time in Patent Office: 519 Days
• Field of Search: 356/375, 356/376, 356/371, 356/400, 356/237.1, 356/237.2, 356/237.3, 356/237.4, 356/237.5, 356/399, 356/401, 356/139.1, 356/239.7, 356/239.8, 250/559.37
• US Class Current: 356/237.2
• CPC Class Codes: G01N 21/94 Investigating contamination, e.g. dust G01N21/85 takes precedence
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10

Abstract

An image detection apparatus (10) having an illumination system (IS) irradiates light onto the surface (30S) of an object 30 to be inspected for defects. A detection optical system (34) condenses the light from the surface and forms an image of the surface on an image detector (48). The detection optical system includes a receiving mirror (38) having an optical axis (A₃₈) that intersects the reference optical axis (A₃₄) of the detection optical system. A processing apparatus (60) includes a processing system (62) that performs image processing based on an output from the detector corresponding to the image. The processing system includes an image distortion correction unit (62a) for eliminating the effects of distortion in the image of the surface generated by the inclination of the surface with respect to the reference optical axis and the receiving mirror.

Claims

1. An image detection apparatus comprising:

a) a tilt stage capable of holding an object and inclining a surface of the object;

b) an illumination system designed so as to illuminate the surface with light;

c) a detection optical system to form an image of the surface;

d) a photoelectric detector, that photoelectrically detects said image;

e) an inclination detection apparatus in communication with said tilt stage, designed to detect said inclination and to provide an output signal corresponding to said inclination;

f) an image distortion correction unit, electrically connected to said photoelectric detector and said inclination detection apparatus, designed so as to substantially eliminate said amount of distortion in said image and form a substantially distortion-free image; and

g) an image processing unit, electrically connected to said image distortion correction unit, that inspects surface in said substantially distortion-free image.

2. An apparatus according to claim 1, wherein said detection optical system includes a mirror which reflects the light from said surface, wherein the mirror does not direct the reflected light back to said surface.

3. An apparatus according to claim 2, wherein said mirror comprises a concave mirror.

4. An apparatus according to claim 3, wherein said detection optical system further comprises, between said concave mirror and said detector:

a) an aperture stop; and

b) an imaging lens adjacent said aperture stop.

5. An image detection apparatus according to claim 2, wherein said light from said surface includes at least one of specularly reflected light, scattered light and diffracted light.

6. An apparatus according to claim 5, wherein said illumination system includes a concave mirror.

7. An apparatus according to claim 1, further including a drive apparatus in operable communication with said tilt stage and designed to tilt said tilt stage so as to provide said inclination.

8. An apparatus according to claim 7, further comprising a control unit, electrically connected to said image distortion correction unit and said drive apparatus, that controls said drive apparatus.

9. An apparatus according to claim 1, wherein said image distortion correction unit is electrically connected to said inclination detection apparatus, and wherein said inclination detection apparatus transmits said output signal to said image distortion correction system unit.

10. An image detection apparatus according to claim 1, wherein said light from said surface includes at least one of specularly reflected light, scattered light and diffracted light.

11. An apparatus according to claim 1, wherein said illumination system includes a concave mirror.

12. An apparatus according to claim 2, wherein said illumination system includes a concave mirror.

13. A method of forming a substantially distortion-free image of a surface, the method comprising the steps of:

a) tilting a stage capable of holding an object and inclining the surface of the object;

b) illuminating the surface;

c) collecting light from the surface using a detection optical system;

d) forming an image of the surface, said image having an amount of distortion;

e) determining said amount of distortion in said image; and

f) removing said amount of distortion, as determined in said step e), from said image, thereby forming a substantially distortion-free image.

14. A method according to claim 13, further including the step, after said step f), of inspecting surface in said substantially distortion-free image.

15. A method according to claim 13, further including the steps of detecting and controlling said inclination.

16. A method of forming a substantially distortion-free image of a surface having a surface normal to facilitate identifying surface defects, the method comprising the steps of:

a) obliquely illuminating the surface;

b) receiving light from the surface using a detection optical system having a first axis disposed at a first angle with respect to the surface normal;

c) forming an image of the surface along a second axis forming a second angle with said first axis, said image having an amount of distortion corresponding to said first and second angles;

d) detecting said image with said amount of distortion and providing a first output signal corresponding to said image with said amount of distortion;

e) determining said first and second angles and providing a second output signal corresponding to said first and second angles;

f) inputting said first and second output signals into a distortion correction unit and determining said amount of distortion based on said first and second output signals; and

g) substantially removing said amount of distortion from said first output signal, thereby creating a third output signal corresponding to a substantially distortion-free image.

17. A method according to claim 16, further comprising the step, after said step g), of:

a) electronically processing said third output signal so as to identify the surface defects in said substantially distortion-free image.