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Microscanner for portable laser diode displays

  • US 6,097,528 A
  • Filed: 07/20/1998
  • Issued: 08/01/2000
  • Est. Priority Date: 07/20/1998
  • Status: Expired due to Fees
First Claim
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1. A microscanner comprising:

  • a semiconductor wafer having integrally fabricated as a part thereof a cantilevered portion characterized as deflectable about at least one of an "x" axis and a "y" axis relative to a lower portion of the semiconductor wafer in response to an electrical stimulus applied thereto;

    at least one laser diode mounted to a surface of the cantilevered portion;

    a plurality of electrical interconnects in electrical interface with the at least one laser diode and the cantilevered portion; and

    at least one driver/control circuit connected to the at least one laser diode for delivering a voltage in response to data input and a driver/control circuit connected to the semiconductor wafer for delivering a plurality of varying voltages across the cantilevered portion, thereby deflecting the cantilevered portion in response thereto and generating a resultant integrated image viewable by an observer.

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