High-power external-cavity optically-pumped semiconductor lasers

• US 6,097,742 A
• Filed: 03/05/1999
• Issued: 08/01/2000
• Est. Priority Date: 03/05/1999
• Status: Expired due to Term

• Current Assignee: Coherent Inc (Coherent Corp.)
• Original Assignee: Coherent Inc (Coherent Corp.)
• Inventors: Caprara, Andrea, Chilla, Juan L., Spinelli, Luis A.
• Primary Examiner(s): Scott, Jr., Leon
• Application Number:
  US09/263,380
• Time in Patent Office: 515 Days
• Field of Search: 372/22, 372/97, 372/36, 372/45, 372/105
• US Class Current: 372/22
• CPC Class Codes: H01S 3/094 by coherent light
• CPC Class Codes: H01S 3/109 Frequency multiplication, e.g. harmonic generation
• CPC Class Codes: H01S 5/02484 Sapphire or diamond heat spreaders
• CPC Class Codes: H01S 5/041 Optical pumping
• CPC Class Codes: H01S 5/141 using a wavelength selective device, e.g. a grating or etalon H01S5/146 takes precedence
• CPC Class Codes: H01S 5/183 having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]

Abstract

External-cavity optically-pumped semiconductor lasers (OPS-lasers) including an OPS-structure having a mirror-structure surmounted by a surface-emitting, semiconductor multilayer (periodic) gain-structure are disclosed. The gain-structure is pumped by light from diode-lasers. The OPS-lasers can provide fundamental laser output-power of about two Watts (2.0 W) or greater. Intracavity frequency-converted arrangements of the OPS-lasers can provide harmonic laser output-power of about one-hundred milliwatts (100 mW) or greater, even at wavelengths in the ultraviolet region of the electromagnetic spectrum. These high output powers can be provided even in single axial-mode operation. Particular features of the OPS-lasers include a heat sink-assembly for cooling the OPS-structure, a folded resonator concept for providing optimum beam size at optically-nonlinear crystals used for frequency conversion, preferred selection of optically-nonlinear materials for frequency-conversion, and compound resonator designs for amplifying second harmonic-radiation for subsequent conversion to third or fourth harmonic radiation.

Claims

1. A laser comprising:

first and second laser-resonators arranged such that a portion of the resonator axes of each are on a coaxial path;

said first resonator including an OPS-structure arranged outside the coaxial path and having the composition of active layers thereof selected to provide a predetermined fundamental-wavelength of laser-radiation;

an optical arrangement for delivering said pump-light to said gain-structure, thereby causing fundamental laser-radiation having said fundamental-wavelength to oscillate in said first laser-resonator;

an optically-nonlinear crystal located in said coaxial path of said first and second laser-resonators and arranged for frequency-doubling said fundamental laser-radiation thereby providing frequency-doubled radiation having a wavelength half of said fundamental-wavelength; and

said second laser-resonator arranged cooperative with said first resonator to cause said frequency-doubled radiation and said fundamental radiation to oscillate together along said coaxial path in a manner which causes amplification of said frequency doubled-radiation.

2. The laser of claim 1, further including a second optically-nonlinear crystal located in said coaxial path and arranged for mixing said fundamental laser-radiation and said frequency-doubled radiation, thereby generating frequency-tripled radiation.

3. The laser of claim 1, wherein said second laser resonator includes a second optically-nonlinear crystal located outside said coaxial path, and arranged for doubling the frequency of said frequency-doubled radiation, thereby generating frequency-quadrupled radiation.

4. A laser comprising:

first and second laser-resonators each thereof having a resonator axis, said first laser-resonator formed between first and second mirrors, and said second laser resonator formed between said first mirror and a third mirror, and said first and second laser-resonators arranged with a portion of the resonator axes of each combined on a coaxial path;

said first resonator including an OPS-structure arranged outside said coaxial path, said OPS-structure having a surface-emitting gain-structure surmounting a mirror structure, said gain-structure including a plurality of active layers having pump-light-absorbing layers therebetween, said active layers having a composition selected to provide emission of electromagnetic radiation at a predetermined fundamental-wavelength when pump-light is incident on said gain-structure;

an optical arrangement for delivering said pump-light to said gain-structure, thereby causing fundamental laser-radiation having said fundamental-wavelength to oscillate in said first laser-resonator;

a first optically-nonlinear crystal located in said coaxial path of said first and second laser-resonators and arranged for frequency-doubling said fundamental laser-radiation thereby providing frequency-doubled radiation having a wavelength one-half of said fundamental-wavelength;

said second laser-resonator arranged cooperative with said first laser-resonator to cause said frequency-doubled radiation and said fundamental laser-radiation to oscillate together along said coaxial path in a manner which causes amplification of said frequency-doubled radiation; and

a second optically-nonlinear crystal located in said coaxial path and arranged for mixing said fundamental laser-radiation and said amplified frequency-doubled radiation, thereby generating frequency-tripled radiation having a wavelength one-third of said fundamental-wavelength.

5. The laser of claim 4, wherein said active layers of said gain-structure have a gain-bandwidth including said fundamental-wavelength and said first laser-resonator includes a wavelength-selective element located outside said coaxial path and configured to select said fundamental-wavelength of laser-radiation from within said gain-bandwidth.

6. The laser of claim 5 wherein said wavelength-selective element is a birefringent filter.

7. The laser of claim 5 wherein said wavelength-selective element is an etalon.

8. The laser of claim 4 wherein the length of said second resonator is adjustable for optimizing generation of said frequency-tripled radiation.

9. The laser of claim 4, wherein said resonator-axes are combined by a fourth mirror with said coaxial path extending between said first and fourth mirrors, said fourth mirror being reflective for said frequency-doubled radiation and transmissive for said fundamental laser-radiation, and wherein said coaxial path is folded into first and second portions by a fifth mirror, said fifth mirror being reflective for said frequency-doubled radiation and said fundamental laser-radiation and transmissive for said frequency-tripled radiation, said first portion of said coaxial path being between said first mirror and said fifth mirror and said second portion of said coaxial path being between said fifth mirror and said fourth mirror.

10. The laser of claim 9, wherein said first optically-nonlinear crystal is located in said second portion of said coaxial path and said second optically-nonlinear crystal is located in said first portion of said coaxial path.

11. The laser of claim 10, wherein said frequency-tripled radiation exits the laser via said fifth-mirror.

12. The laser of claim 4, wherein said OPS-structure further includes a mirror-structure, said mirror-structure surmounted by said gain-structure and including alternating layers of high and low refractive-index materials.

13. The laser of claim 12 wherein said mirror-structure is said second mirror.

14. The laser of claim 13, further including a heat sink for cooling said OPS-structure, said mirror-structure of said OPS-structure being in thermal contact with said heat sink.

15. The laser of claim 12, wherein said mirror-structure further includes a layer of a reflective metal, said metal layer located in said mirror structure such that said alternating layers of high and low refractive-index materials are between said metal-layer and said gain-structure.

16. The laser of claim 12, wherein said active layers of said gain-structure are selected from the group of semiconductor compounds consisting of In_x Ga_1-x As_y P_1-y, Al_x Ga_1-x As_y P_1-y, and In_x Ga_1-x N where 0.0≦

x ≦

1.0 and 0≦

y≦

1.

17. The laser of claim 16, wherein said active layers of said gain-structure have a composition of In_x Ga_1-x As where 0.0<

x<

1.0 and x is selected such that said fundamental-wavelength is between about 900 and 1050 nanometers, and said pump-light-absorbing layers have a composition GaAs_y P_1-y.

18. The laser of claim 17, wherein said high refractive-index layers of said mirror-structure have a composition GaAs and said low refractive-index layers of said mirror-structure have a composition AlAs_y P_1-y where 0.0<

y<

1.0.

19. The laser of claim 12, wherein said active layers of said gain-structure have a composition of In_x Ga_1-x P where 0.0<

x<

1.0 and x is selected such that said fundamental-wavelength is between about 700 and 900 nanometers, and said pump-light-absorbing layers have a composition In_y Ga_1-y As_z P_1-z where 0.0<

y <

1.0 and 0.0<

z<

1.0.

20. The laser of claim 19, wherein said high refractive-index layers of said mirror-structure have a composition In_p Al_1-p P, 0.0<

p<

1.0, and said low refractive-index layers of said mirror-structure have a composition Al_q Ga_1-q As, where 0.0<

q<

1.0.

21. The laser of claim 12, wherein said active layers of said gain-structure have a composition of In_x As_1-x P where 0.0<

x<

1.0 and x is selected such that said fundamental-wavelength is between about 700 and 900 nanometers, and said pump-light-absorbing layers have a composition Al_y Ga_1-y As where 0.0<

y<

1.0.

22. The laser of claim 21, wherein said high refractive-index layers and said low refractive-index layers of said mirror-structure are layers of respectively high and low refractive-index dielectric materials transparent to said fundamental-wavelength.

23. The laser of claim 22, wherein said high refractive-index material is zinc selenide and said low refractive-index material is aluminum oxide.

24. The laser of claim 4, wherein said first optically-nonlinear crystal is a crystal of a material selected from the group of optically-nonlinear materials consisting of LBO, and CLBO.

25. The laser of claim 24 wherein said second optically-nonlinear crystal is a crystal of a material selected from the group of optically-nonlinear materials consisting of LBO, CLBO, BB0, SBBO, SBO, and BZBO.

26. A laser comprising:

first and second laser-resonators each thereof having a resonator axis, said first laser-resonator formed between first and second mirrors, and said second laser resonator formed between third and fourth mirrors, and said first and second laser-resonators arranged with a portion of the resonator axes of each combined on a coaxial path;

said first resonator including an OPS-structure arranged outside said coaxial path, said OPS-structure having a surface-emitting gain-structure, said gain-structure including a plurality of active layers having pump-light-absorbing layers therebetween, said active layers having a composition selected to provide emission of electromagnetic radiation at a predetermined fundamental-wavelength when pump-light is incident on said gain-structure;

an optical arrangement for delivering said pump-light to said gain-structure, thereby causing fundamental laser-radiation having said fundamental-wavelength to oscillate in said first laser-resonator;

a first optically-nonlinear crystal located in said coaxial path of said first and second laser-resonators and arranged for frequency-doubling said fundamental laser-radiation thereby providing frequency-doubled radiation having a wavelength one-half of said fundamental-wavelength;

said second laser-resonator arranged cooperative with said first laser-resonator to cause said frequency-doubled radiation and said fundamental laser-radiation to oscillate together along said coaxial path in a manner which causes amplification of said frequency doubled-radiation; and

a second optically-nonlinear crystal located in said second resonator outside of said coaxial path and arranged for doubling the frequency of said amplified frequency-doubled radiation, thereby generating frequency-quadrupled radiation having a wavelength one-quarter of said fundamental-wavelength.

27. The laser of claim 26, wherein said active layers of said gain-structure have a gain-bandwidth including said fundamental-wavelength and said first laser-resonator includes a wavelength-selective element located outside said coaxial path and configured to select said fundamental-wavelength of laser-radiation from within said gain-bandwidth.

28. The laser of claim 27 wherein said wavelength-selective element is a birefringent filter.

29. The laser of claim 27 wherein said wavelength-selective element is an etalon.

30. The laser of claim 26 wherein the length of said second resonator is adjustable for optimizing generation of said frequency-quadrupled radiation.

31. The laser of claim 26, wherein said resonator-axes are combined by fifth and sixth mirrors with said coaxial path extending therebetween, said fifth and sixth mirrors being reflective for said frequency-doubled radiation and transmissive for said fundamental laser-radiation, and wherein said resonator axis of said second laser-resonator outside of said coaxial path is folded into first and second portions by a seventh mirror, said seventh mirror being reflective for said frequency-doubled radiation and transmissive for said frequency-quadrupled radiation, said first portion of said resonator axis of said second laser-resonator being between said fifth and seventh mirrors and said second portion of said resonator axis of said second laser-resonator being between said seventh and third mirrors.

32. The laser of claim 31, wherein said first optically-nonlinear crystal is located in said second portion of said coaxial path and said second optically-nonlinear crystal is located in said first portion of said coaxial path.

33. The laser of claim 32, wherein said frequency-tripled radiation exits the laser via said fifth-mirror.

34. The laser of claim 26, wherein said OPS-structure further includes a mirror-structure, said mirror-structure surmounted by said gain-structure and including alternating layers of high and low refractive-index materials.

35. The laser of claim 34 wherein said mirror-structure is said second mirror.

36. The laser of claim 35, further including a heat sink for cooling said OPS-structure, said mirror-structure of said OPS-structure being in thermal contact with said heat sink.

37. The laser of claim 34, wherein said mirror-structure further includes a layer of a reflective metal, said metal layer located in said mirror structure such that said alternating layers of high and low refractive-index materials are between said metal-layer and said gain-structure.

38. The laser of claim 34 wherein, said active layers of said gain-structure are selected from the group of semiconductor compounds consisting of In_x Ga_1-x As_y P_1-y, Al_x Ga_1-x As_y P_1-y, and In_x Ga_1-x N where 0.0≦

x ≦

1.0 and 0≦

y≦

1.

39. The laser of claim 38, wherein said active layers of said gain-structure have a composition of In_x Ga_1-x As where 0.0<

x<

1.0 and x is selected such that said fundamental-wavelength is between about 900 and 1050 nanometers, and said pump-light-absorbing layers have a composition GaAs_y P_1-y.

40. The laser of claim 39 wherein, said high refractive-index layers of said mirror-structure have a composition GaAs and said low refractive-index layers of said mirror-structure have a composition AlAs_y P_1-y where 0.0<

y<

1.0.

41. The laser of claim 34, wherein said active layers of said gain-structure have a composition of In_x Ga_1-x P where 0.0<

x<

1.0 and x is selected such that said fundamental-wavelength is between about 700 and 900 nanometers, and said pump-light-absorbing layers have a composition In_y Ga_1-y As_z P_1-z where 0.0<

y <

1.0 and 0.0<

z<

1.0.

42. The laser of claim 40, wherein said high refractive-index layers of said mirror-structure have a composition In_p Al_1-p P, 0.0<

p<

1.0, and said low refractive-index layers of said mirror-structure have a composition Al_q Ga_1-q As, where 0.0<

q<

1.0.

43. The laser of claim 34 wherein said active layers of said gain-structure have a composition of In_x As_1-x P where 0.0<

x<

1.0 and x is selected such that said fundamental-wavelength is between about 700 and 900 nanometers, and said pump-light-absorbing layers have a composition Al_y Ga_1-y As where 0.0<

y<

1.0.

44. The laser of claim 43, wherein said high refractive-index layers and said low refractive-index layers of said mirror-structure are layers of respectively high and low refractive-index dielectric materials transparent to said fundamental-wavelength.

45. The laser of claim 44, wherein said high refractive-index material is zinc selenide and said low refractive-index material is aluminum oxide.

46. The laser of claim 26, wherein said first optically-nonlinear crystal is a crystal of a material selected from the group of optically-nonlinear materials consisting of LBO, and CLPO.

47. The laser of claim 46 wherein said second optically-nonlinear crystal is a crystal of a material selected from the group of optically-nonlinear materials consisting of LBO, CLBO, BB0, SEBO, SBO, and BZBO.