Low vibration link

• US 6,098,462 A
• Filed: 01/30/1998
• Issued: 08/08/2000
• Est. Priority Date: 02/08/1991
• Status: Expired due to Fees

• Current Assignee: L-3 Communications Corporation (L3Harris Technologies, Inc.)
• Original Assignee: L-3 Communications Corporation (L3Harris Technologies, Inc.)
• Inventors: Hulsing, Rand H. II
• Primary Examiner(s): Kwok, Helen C.
• Application Number:
  US09/016,186
• Time in Patent Office: 921 Days
• Field of Search: 73/514.38, 73/514.24, 73/514.16, 73/514.29, 73/504.04, 73/504.12
• US Class Current: 73/514.38
• CPC Class Codes: F02G 1/044 having at least two working members, e.g. pistons, delivering power output
• CPC Class Codes: F02G 1/0445 Engine plants with combined cycles, e.g. Vuilleumier
• CPC Class Codes: F02G 2250/18 Vuilleumier cycles
• CPC Class Codes: F02G 2253/03 Stem seals
• CPC Class Codes: F16F 2230/0052 Physically guiding or influencing
• CPC Class Codes: F16F 2230/34 Flexural hinges
• CPC Class Codes: F16L 37/24 in which the connection is made by inserting one member axially into the other and rotating it to a limited extent, e.g. with bayonet action
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01C 19/5747 each sensing mass being connected to a driving mass, e.g. driving frames
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: Y10S 73/01 Vibration

Abstract

A symmetrical link device for linking first and second coplanar devices each movably mounted in a frame such that when one of the first and second coplanar devices is moved, a substantially equal and opposite motion is imparted to the other of the first and second coplanar devices.

Claims

1. A link device for linking first and second coplanar devices movably mounted in a frame, wherein each coplanar device includes a connecting point and, when one of the first and second coplanar devices is moved, a substantially equal and opposite motion is imparted to the other of the first and second coplanar devices, the link device comprising:

a rigid member formed between the first and second coplanar devices, said rigid member pivoting about a pivot point disposed between the connecting points of the first and second coplanar devices and axes-symmetric about an axis parallel to an axis passing through the geometric centers of the first and second coplanar devices;

first and second ends of said rigid member connected to said first and second coplanar devices at first and second connecting points, respectively; and

support means formed between said rigid member and the frame for supporting said rigid member and enabling said rigid member to pivot with respect to the frame about said pivot point.

2. The link recited in claim 1 wherein said rigid member formed between the first and second coplanar devices is formed having a shape which is essentially symmetric about said pivot point.

3. The link recited in claim 2 wherein said rigid member formed between the first and second coplanar devices is formed having an essentially rectangular shape.

4. The link recited in claim 2 wherein said rigid member formed between the first and second coplanar devices is formed having `U` shape.

5. The link device recited in claim 4 wherein said member formed having a `U` shape is formed with one or more cavities.

6. The link device recited in claim 4 wherein said cavities extend through said member.

7. The link recited in claim 3 wherein the frame includes a first support member projecting between said rigid member and the first coplanar device and a second support member projecting between said rigid member and the second coplanar device, and wherein said support means comprises:

a plurality of struts extending between said rigid member and each of the first and second support members.

8. The link recited in claim 7 wherein the substrate includes first and second parallel opposing surfaces and at least one epitaxial layers adhered to at least one of the first and second parallel opposing surfaces, respectively, and wherein said struts are formed in at least one of the epitaxial layers.

9. The link recited in claim 7 wherein the substrate includes first and second parallel opposing surfaces and first and second epitaxial layers adhered to the first and second parallel opposing surfaces, respectively, and wherein said struts are formed in at least one of the epitaxial layers.

10. The link recited in claim 7 wherein the substrate includes first and second parallel opposing surfaces and first and second epitaxial layers adhered to the first and second parallel opposing surfaces, respectively, and wherein said struts comprise first struts formed in the first epitaxial layer second struts formed in the second epitaxial layer.

11. The link device recited in claim 10 wherein said first struts and said second struts are formed symmetrically about said pivot point.

12. The link device recited in claim 11 wherein

at least one of said first struts extend between a first side of said rigid member and the first support member;

at least one of said first struts extend between a second side of said rigid member and the second support member;

at least one of said second struts extend between said first side of said rigid member and the first support member; and

at least one of said second struts extend between said second side of said rigid member and the second support member.

13. The link device recited in claim 12 wherein said first struts form a first `X` shape having an intersection coincident with said pivot point;

and

said second struts form a second `X` shape having an intersection coincident with said pivot point.

14. The link device recited in claim 13 wherein said rigid member includes a longitudinal axis;

and

wherein said first and second struts are formed at substantially equal angles from said longitudinal axis of said rigid member.

15. The link device recited in claim 13 wherein said rigid member includes a longitudinal axis;

and

wherein said first and second struts are formed at forty-five degree angles from said longitudinal axis of said rigid member.

16. The link device recited in claim 12 wherein said first struts form an `X` shape having an intersection coincident with said pivot point;

and

said second struts comprise first and second beams projecting from said first and second sides, respectively, of said rigid member and extending between said rigid member and the first and second support members, respectively.

17. The link device recited in claim 16 wherein said first and second beams project perpendicularly from said first and second sides of said rigid member adjacent said pivot point.

18. The link device recited in claim 12 wherein said first struts comprise first and second beams projecting from said first and second sides, respectively, of said rigid member;

and

said second struts comprise third and fourth beams projecting from said first and second sides, respectively, of said rigid member.

19. The link device recited in claim 18 wherein said first, second, third and fourth beams each comprise first and second longitudinal portions joined by a dog leg portion therebetween, said dog leg portion having a minimum length longer than the combined width of said first and second longitudinal portions.

20. The link device recited in claim 19 wherein the length of said first longitudinal portion is approximately equal to the length of said second longitudinal portion.

21. A link device for linking first and second coplanar devices formed in a silicon substrate, each coplanar device movably mounted in a frame, each coplanar device including a connecting point, the link device comprising:

first and second support members projecting from the frame between the coplanar devices, said first support member positioned adjacent to and spaced apart from said second support member;

a columnar beam positioned between and spaced away from said first and second support members, said columnar beam having an essentially rectangular shape symmetric about a pivot point intermediate the connecting points of the coplanar devices;

a plurality of struts extending between said columnar beam and said first and second support members; and

wherein first and second ends of said columnar beam are connected to said first and second coplanar devices at first and second connecting points, respectively, enabling said columnar beam to pivot about said pivot point and, when one of the first and second coplanar devices is moved, to impart a substantially equal and opposite motion to the other of the first and second coplanar devices.

22. The link device recited in claim 21 wherein the substrate includes first and second parallel opposing surfaces and first and second epitaxial layers adhered to the first and second parallel opposing surfaces, respectively.

23. The link device recited in claim 22 wherein said struts further comprise first struts formed in the first epitaxial layer and second struts formed in the second epitaxial layer.

24. The link device recited in claim 23 wherein said first struts and said second struts are axes-symmetric about said pivot point.

25. The link device recited in claim 24 wherein said first struts form a first `X` shape having an intersection coincident with said pivot point;

and

said second struts form a second `X` shape having an intersection coincident with said pivot point.

26. The link device recited in claim 25 wherein said rectangular columnar beam includes a longitudinal axis;

and

wherein said first and second struts are formed at substantially equal angles to said longitudinal axis of said rectangular columnar beam.

27. The link device recited in claim 26 wherein said first and second struts are formed at forty-five degree angles to said longitudinal axis of said rectangular columnar beam.

28. The link device recited in claim 24 wherein said first struts form an `X` shape having an intersection coincident with said pivot point;

and

said second struts comprise first and second beams projecting from first and second sides, respectively, of said columnar beam.

29. The link device recited in claim 28 wherein said first and second beams project perpendicularly from said first and second sides of said columnar beam adjacent said pivot point.

30. The link device recited in claim 24 wherein said first struts comprise first and second beams projecting from first and second sides, respectively, of said columnar beam;

and

said second struts comprise third and fourth beams projecting from said first and second sides, respectively, of said columnar beam.

31. The link device recited in claim 30 wherein said first, second, third and fourth beams each comprise first and second longitudinal portions joined by a dog leg portion therebetween, said dog leg portion having a minimum length longer than the combined width of said first and second longitudinal portions.

32. The link device recited in claim 31 wherein the length of said first longitudinal portion is approximately equal to the length of said second longitudinal portion.

33. A method for linking first and second coplanar devices formed in a substrate, each coplanar device movably mounted in a frame, wherein each coplanar device includes a connecting point and, when one of the first and second coplanar devices is moved, a substantially equal and opposite motion is imparted to the other of the first and second coplanar devices, the linking method comprising:

forming a rigid member between the first and second coplanar devices, said rigid member pivoting about a pivot point disposed intermediate between the connecting points of the first and second coplanar devices and axes-symmetric about an axis parallel to an axis passing through the geometric centers of the first and second coplanar devices;

connecting first and second ends of said rigid member to said first and second coplanar devices at first and second connecting points, respectively; and

forming support means for supporting said rigid member and enabling said rigid member to pivot with respect to the frame about said pivot point, epitaxial layers, respectively.

34. The linking method recited in claim 33 wherein said pivot point is disposed intermediate between said first and second connecting points.

35. The linking method recited in claim 34 wherein said forming a rigid member between the first and second coplanar devices further comprises forming said rigid member having a shape essentially symmetric about said pivot point.

36. The linking method recited in claim 35 wherein said forming a rigid member between the first and second coplanar devices further comprises forming said rigid member having an essentially rectangular shape.

37. The linking method recited in claim 35 wherein said forming a rigid member between the first and second coplanar devices further comprises forming said rigid member having a `U` shape which is essentially symmetric about said pivot point.

38. The linking method recited in claim 37 wherein said forming a rigid member between the first and second coplanar devices further comprises forming one or more cavities in said rigid member.

39. The linking method recited in claim 38 wherein said forming one or more cavities in said rigid member further comprises extending one or more of said cavities through said rigid member.

40. The linking method recited in claim 36 wherein said forming support means further comprises:

forming a first support member projecting from the frame between said rigid member and the first coplanar device;

forming a second support member projecting from the frame between said rigid member and the second coplanar device; and

forming a plurality of struts extending between said rigid member and each of said first and second support members, said struts being formed symmetrically about said pivot point.

41. The linking method recited in claim 40 wherein the substrate comprises first and second substantially parallel opposing surfaces and first and second epitaxial layers formed on the first and second opposing surfaces, respectively, and wherein said forming support means further comprises forming first and second struts in the first and second epitaxial layers, respectively.

42. A link device for linking first and second coplanar devices each movably mounted in a frame, wherein each coplanar device includes a connecting point and the frame includes a support means for supporting the link device and enabling the link device to pivot with respect to the frame and, when one of the first and second coplanar devices is moved, to impart a substantially equal and opposite motion to the other of the first and second coplanar devices, the link device comprising:

a) a substantially axes-symmetric `U` shaped member, said `U` shaped member comprising

first and second parallel beams, each of said first and second parallel beams having first and second ends, said first parallel beam having dimensions substantially identical to the dimensions of said second parallel beam, said first parallel beam disposed coextensively with and spaced apart from said second parallel beam, and

an interconnecting member extending between said first ends of said first and second parallel beams; and

b) said second ends of said first and second parallel beams connected respectively to said first and second coplanar devices at first and second connecting points.

43. The link device recited in claim 42 wherein the link device pivots about a pivot point disposed intermediate between said first and second connecting points.

44. The link device recited in claim 43 wherein said `U` shaped member is formed with one or more cavities.

45. The link device recited in claim 44 wherein said cavities extend through said `U` shaped member.

46. A link device for linking first and second coplanar devices each movably mounted in a frame, wherein each coplanar device includes a connecting point, the link device comprising:

a link comprising;

first and second parallel beams, each of said first and second parallel beams having first and second ends,

an interconnecting beam extending between said first ends of said first and second parallel beams and forming a `U` shaped link substantially symmetric about a pivot point disposed axes-symmetric about an axis parallel to an axis passing through the geometric centers of the first and second coplanar devices, and

said second ends of said first and second parallel beams connected respectively to said first and second coplanar devices at first and second connecting points; and

support means for supporting said link and enabling said link to pivot with respect to the frame about said pivot point and, when one of the first and second coplanar devices is moved, to impart a substantially equal and opposite motion to the other of the first and second coplanar devices.

47. The link device recited in claim 46 wherein said support means comprises a pivot flexure comprising said pivot point.

48. The link device recited in claim 47 wherein said pivot point is disposed intermediate between the first and second connecting points.

49. The link device recited in claim 48 wherein said pivot flexure has length and cross-sectional dimensions such that said pivot flexure flexes with a simple bend.

50. The link device recited in claim 49 wherein said pivot flexure further comprises a distal end connected to said interconnecting beam, whereby said pivot point is aligned with said first and second parallel beams in radial fashion.

51. The link device recited in claim 50 wherein said `U` shaped link is formed with one or more cavities.

52. The link device recited in claim 51 wherein said cavities extend through said `U` shaped link.