Gap filling of shallow trench isolation by ozone-tetraethoxysilane

• US 6,100,163 A
• Filed: 01/07/1999
• Issued: 08/08/2000
• Est. Priority Date: 01/07/1999
• Status: Expired due to Term

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Yu, Chen-Hua, Jang, Syun-Ming, Chen, Ying-Ho
• Primary Examiner(s): Pham, Long
• Application Number:
  US09/226,277
• Time in Patent Office: 579 Days
• Field of Search: 438/435, 438/424, 438/437, 438/789, 438/425, 438/427, 148/DIG. 50
• US Class Current: 438/437
• CPC Class Codes: H01L 21/76224 using trench refilling with dielectric materials trench filling with polycristalline silicon H01L21/763; together with vertical isolation, e.g. trench refilling in a SOI substrate H01L21/76264

Abstract

A method for filling a trench within a silicon substrate. There is first provided a silicon substrate having a trench formed therein. There is then oxidized thermally the silicon substrate to form within the trench a thermal silicon oxide trench liner layer. There is then treated the thermal silicon oxide trench liner layer by exposure to a plasma formed from a gas composition which upon plasma activation simultaneously supplies an active nitrogen containing species and an active oxygen containing species to form a plasma treated thermal silicon oxide trench liner layer. There is then formed upon the plasma treated thermal silicon oxide trench liner layer a conformal silicon oxide intermediate layer formed through a plasma enhanced chemical vapor deposition (PECVD) method employing a silane silicon source material. Finally, there is then formed upon the conformal silicon oxide intermediate layer a gap filling silicon oxide trench fill layer through an ozone assisted sub-atmospheric pressure thermal chemical vapor deposition (SACVD) method employing an ozone oxidant and a tetra-ethyl-ortho-silicate (TEOS) silicon source material.

Claims

1. A method for filling a trench within a silicon substrate comprising:

providing a silicon substrate, the silicon substrate having a trench formed therein;

oxidizing thermally the silicon substrate to form within the trench a thermal silicon oxide trench liner layer;

treating the thermal silicon oxide trench liner layer with a plasma formed from a plasma gas phase composition which upon plasma activation simultaneously supplies active nitrogen containing species and active oxygen containing species to form a plasma treated thermal silicon oxide trench liner layer, wherein the plasma gas composition is nitrous oxide and the plasma is employed at;

a reactor chamber pressure of from about 1 to about 2 torr;

a radio frequency power of about 50 to about 150 watts at a radio frequency of 13.56 MHz;

a nitrous oxide gas flow of from about 400 to about 600 standard cubic centimeters per minute (sccm);

forming upon the thermal silicon oxide trench liner layer a conformal silicon oxide intermediate layer formed through a plasma enhanced chemical vapor deposition (PECVD) method employing silane as a silicon source material; and

forming upon the conformal silicon oxide intermediate layer a gap filling silicon oxide trench fill layer formed employing a sub-atmospheric pressure thermal chemical vapor deposition (SACVD) method employing ozone as an oxidant and tetra-ethyl-ortho-silicate (TEOS) as a silicon source material.

2. The method of claim 1 wherein the plasma treatment of the thermal silicon oxide trench liner layer provides the gap filling silicon oxide trench fill layer with attenuated surface sensitivity, enhanced bulk properties and attenuated surface roughness.

3. The method of claim 1 wherein:

the silicon substrate is a silicon semiconductor substrate; and

the trench is an isolation trench within the silicon semiconductor substrate.

4. The method of claim 1 wherein the width of the trench is greater than about 0.3 microns and the depth of the trench is from about 3000 to about 5000 angstroms.

5. The method of claim 1 wherein:

the thermal silicon oxide trench liner layer is formed to a thickness of from about 200 to about 400 angstroms; and

the conformal silicon oxide intermediate layer is formed to a thickness greater than about 300 angstroms.

6. The method of claim 1 wherein the plasma gas composition is selected from the group consisting of nitrous oxide, nitric oxide, dinitrogen tetroxide, nitrogen and oxygen mixtures and mixtures thereof.

7. The method of claim 1 wherein the ozone assisted sub-atmospheric pressure thermal chemical vapor deposition (SACVD) method employs a reactor chamber pressure of from about 400 to about 600 torr and an ozone:

tetra-ethyl-ortho-silicate volume ratio of from about 10;

1 to about 15;

1.

8. The method of claim 1 further comprising planarizing the gap filling silicon oxide trench fill layer to form within the trench a planarized gap filling silicon oxide trench fill layer.