Fluid storage and dispensing system

• US 6,101,816 A
• Filed: 04/28/1998
• Issued: 08/15/2000
• Est. Priority Date: 04/28/1998
• Status: Expired due to Term

• Current Assignee: Entegris Incorporated
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Wang, Luping, Tom, Glenn M.
• Primary Examiner(s): DOERRLER, WILLIAM CHARLES
• Application Number:
  US09/067,393
• Time in Patent Office: 840 Days
• Field of Search: 62/48.1-50.1, 62/48.4, 62/45.1
• US Class Current: 62/48.1
• CPC Class Codes: B01D 2253/10 Inorganic adsorbents
• CPC Class Codes: B01D 2253/102 Carbon
• CPC Class Codes: B01D 2253/104 Alumina
• CPC Class Codes: B01D 2253/106 Silica or silicates
• CPC Class Codes: B01D 2253/1085 characterized by a silicon-aluminium ratio
• CPC Class Codes: B01D 2253/202 Polymeric adsorbents
• CPC Class Codes: B01D 2258/0216 from CVD treatment or semi-conductor manufacturing
• CPC Class Codes: B01D 2259/40003 Methods relating to valve switching
• CPC Class Codes: B01D 2259/4009 using hot gas
• CPC Class Codes: B01D 2259/40094 by applying microwaves
• CPC Class Codes: B01D 2259/40098 with other heating means
• CPC Class Codes: B01D 2259/4525 for storage and dispensing systems
• CPC Class Codes: B01D 2259/455 for transportable use
• CPC Class Codes: B01D 53/0407 Constructional details of adsorbing systems
• CPC Class Codes: B01D 53/0415 Beds in cartridges
• CPC Class Codes: B01D 53/053 with storage or buffer vessel
• CPC Class Codes: B01J 20/20 comprising free carbon; comprising carbon obtained by carbonising processes
• CPC Class Codes: F17C 1/00 Pressure vessels, e.g. gas cylinder, gas tank, replaceable cartridge pressurised apparatus for purposes other than storage, see the relevant subclasses such as A62C, B05B; associated with vehicles, see the appropriate subclass of classes B60 - B64; pressure vessels in general F16J12/00 ; autoclaves B01J3/04; tank vehicles B60P3/22; railway tank wagons for carrying fluent materials B61D5/00; accumulators for supplying fluid under pressure F15B1/04; liquefied gas stoves F24C3/00
• CPC Class Codes: F17C 11/00 Use of gas-solvents or gas-sorbents in vessels absorbing compositions for acetylene C10L3/04; absorbing compositions for hydrogen C01B3/0005
• CPC Class Codes: F17C 11/005 for hydrogen
• CPC Class Codes: F17C 13/02 : Special adaptations of indicating, measuring, or monitoring equipment measuring in general G01
• CPC Class Codes: F17C 13/025 : having the pressure as the parameter
• CPC Class Codes: F17C 13/04 : Arrangement or mounting of valves valves per se F16K ; snap-coupling of nipples F16L37/00
• CPC Class Codes: F17C 13/045 : Automatic change-over switching assembly for bottled gas systems with two (or more) gas containers
• CPC Class Codes: F17C 2201/0109 : with exteriorly curved end-piece
• CPC Class Codes: F17C 2201/0114 : with interiorly curved end-piece
• CPC Class Codes: F17C 2201/058 : portable (<30 l)
• CPC Class Codes: F17C 2205/0329 : manually actuated
• CPC Class Codes: F17C 2205/0338 : Pressure regulators
• CPC Class Codes: F17C 2205/0341 : Filters
• CPC Class Codes: F17C 2205/035 : Flow reducers
• CPC Class Codes: F17C 2205/0385 : in blocks or units
• CPC Class Codes: F17C 2205/0391 : inside the pressure vessel
• CPC Class Codes: F17C 2223/0123 : gaseous, e.g. CNG, GNC
• CPC Class Codes: F17C 2223/033 : Small pressure, e.g. for liquefied gas
• CPC Class Codes: F17C 2223/035 : High pressure (>10 bar)
• CPC Class Codes: F17C 2250/043 : Pressure
• CPC Class Codes: F17C 2270/0518 : Semiconductors
• CPC Class Codes: F17C 7/00 : Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
• CPC Class Codes: F17C 7/02 : Discharging liquefied gases
• CPC Class Codes: Y02E 60/32 : Hydrogen storage

Abstract

A fluid storage and dispensing system comprising a vessel for holding a fluid at a desired pressure. The vessel has a pressure regulator associated with a port of the vessel, and set at a predetermined pressure. A dispensing assembly, e.g, including a flow control means such as a valve, is arranged in gas/vapor flow communication with the regulator, whereby the opening of the valve effects dispensing of gas/vapor from the vessel. The fluid in the vessel may be constituted by a liquid which is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g., ambient (room) temperature. A phase separator such as a gas/vapor-permeable liquid-impermeable membrane, may be associated with the regulator, as a barrier to flow of liquid into the regulator, when the contained fluid in the vessel is in a liquid state.

Claims

1. A fluid storage and dispensing system, comprising:

a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;

a fluid dispensing assembly coupled in fluid flow communication with the port;

a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;

the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel;

so that gas during said discharge flows through the fluid pressure regulator prior to flow through the flow control element.

2. A fluid storage and dispensing system according to claim 1, wherein the fluid pressure regulator is interiorly disposed in the interior volume of the vessel.

3. A fluid storage and dispensing system according to claim 1, wherein the fluid pressure regulator has operatively associated therewith a phase separator, for preventing flow of liquid through the fluid pressure regulator.

4. A fluid storage and dispensing system according to claim 3, wherein the phase separator comprises a gas-permeable, liquid-impermeable membrane.

5. A fluid storage and dispensing system according to claim 1, wherein the dispensing assembly includes a flow control valve operatively coupled with a valve actuator therefor, and an automatic controller for actuating the valve actuator to initiate adjustment of the valve for controlled discharge flow of gas deriving from fluid in the vessel.

22. A fluid storage and dispensing system according to claim 1, wherein the fluid pressure regulator is arranged for discharge of the gas from the vessel at a pressure below 700 Torr.

65. The fluid storage and dispensing system of claim 1, wherein said vessel comprises a neck bounding said fluid flow port.

66. The fluid storage and dispensing system of claim 65, wherein at least a portion of the fluid pressure regulator is within the neck of the vessel.

67. The fluid storage and dispensing system of claim 65, wherein at least a portion of the fluid pressure regulator is in the interior volume of the vessel.

68. The fluid storage and dispensing system of claim 1, wherein said interior volume of the vessel does not contain a heater.

69. The fluid storage and dispensing system of claim 1, wherein the fluid pressure regulator is set to a subatmospheric predetermined pressure level.

70. The fluid storage and dispensing system of claim 1, wherein the fluid pressure regulator is set to an atmospheric predetermined pressure level.

71. The fluid storage and dispensing system of claim 1, wherein the fluid pressure regulator is set to a superatmospheric predetermined pressure level.

72. The fluid storage and dispensing system of claim 1, wherein said fluid comprises gas.

73. The fluid storage and dispensing system of claim 1, wherein said fluid comprises liquefied gas.

74. The fluid storage and dispensing system of claim 1, further comprising a central processor unit coupled in controlling relationship with the flow control element to modulate flow of gas in said discharge thereof.

75. The fluid storage and dispensing system of claim 1, wherein said fluid storage and dispensing vessel comprises a vertically elongate generally cylindrical vessel.

6. A fluid storage and dispensing system, comprising:

a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;

a fluid dispensing assembly coupled in fluid flow communication with the port;

a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;

the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly for discharge of the gas from the vessel; and

a liquid contained in the vessel interior volume selected from the group consisting of liquefied hydride gases and liquefied acid gases.

7. A fluid storage and dispensing system, comprising:

a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;

a fluid dispensing assembly coupled in fluid flow communication with the port;

a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;

the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel; and

wherein the liquid hydride comprises a hydride species selected from the group consisting of arsine, phosphine, stibine, silane and diborane.

8. A fluid storage and dispensing system, comprising:

a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;

a fluid dispensing assembly coupled in fluid flow communication with the port;

a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;

the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel; and

a liquid contained in the vessel interior volume selected from the group consisting of arsine, boron trichloride and boron trifluoride.

9. A fluid storage and gas dispensing system, comprising:

a storage and dispensing vessel constructed and arranged for holding a liquid whose vapor constitutes the fluid to be dispensed, wherein the fluid is contained in the storage and dispensing vessel, at a pressure at which the fluid is in a liquid state;

the storage and dispensing vessel including a fluid flow port;

a dispensing assembly coupled to the outlet port; and

a fluid pressure regulator/phase separator assembly interiorly disposed in the vessel, to retain liquid in the vessel and to prevent liquid from flowing into the dispensing assembly during gas dispensing; and

a controller for selectively actuating the dispensing assembly to effect flow of gas deriving from the liquid in the vessel, through the fluid regulator/phase separator assembly and the dispensing assembly, for discharge of the gas from the system;

so that gas during said discharge flows through the fluid pressure regulator prior to flow through the flow control element.

11. A fluid storage and gas dispensing system according to claim 9, wherein the phase separator comprises a porous membrane which is permeable to gas deriving from the liquid, but is not permeable to the liquid, disposed upstream of the pressure regulator so that the liquid is prevented from entering and interfering with the function of the fluid pressure regulator in maintaining the liquid in the vessel, and preventing egress of liquid from the vessel.

12. A fluid storage and gas dispensing system according to claim 9, wherein the vessel has dual fluid flow ports.

23. A fluid storage and gas dispensing system according to claim 9, wherein the fluid pressure regulator/phase separator assembly is arranged for discharge of the gas from the system at a subatmospheric pressure.

24. A fluid storage and gas dispensing system according to claim 9, wherein the fluid pressure regulator/phase separator assembly is arranged for discharge of the gas from the system at a pressure below 700 Torr.

10. A fluid storage and gas dispensing system, comprising:

a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;

a fluid dispensing assembly coupled in fluid flow communication with the port;

a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;

the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel; and

having a single seam at the fluid flow port.

13. A fluid storage and gas dispensing system, comprising:

a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;

a fluid dispensing assembly coupled in fluid flow communication with the port;

a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;

the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel; and

wherein the vessel contains a hydride fluid selected from the group consisting of arsine, phosphine, stibine, silane and diborane.

14. A semiconductor manufacturing system comprising a semiconductor manufacturing apparatus utilizing a gas, and a source of said gas, wherein said source comprises:

a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;

a fluid dispensing assembly coupled in fluid flow communication with the port;

a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;

the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel, so that gas during said discharge flows through the fluid pressure regulator prior to flow through the flow control element; and

a fluid in the interior volume of the fluid storage and dispensing vessel, wherein said fluid is selected from the group consisting of high pressure gases and liquefied gases.

15. A semiconductor manufacturing system according to claim 14, wherein the semiconductor manufacturing apparatus is selected from the group consisting of ion implantation chambers, chemical vapor deposition reactors, lithotracks units, bubblers, liquid delivery units, and cleaning equipment.

26. A semiconductor manufacturing system according to claim 14, wherein the fluid pressure regulator is arranged for discharge of the gas from the vessel at a pressure below 700 Torr.

16. A method for storage and dispensing of a fluid, comprising:

containing the fluid in a confined state against a fluid pressure regulator in a fluid flow path closed to fluid flow downstream of the fluid pressure regulator by a flow control element in said fluid flow path downstream of said fluid pressure regulator; and

selectively dispensing the confined fluid by opening the flow control element in said fluid flow path to cause fluid to flow downstream of the fluid pressure regulator, and discharging fluid, so that fluid during such discharge flows through the fluid pressure regulator prior to flow through the flow control element;

wherein said fluid is maintained in said confined state in an enclosed interior volume of a fluid storage and dispensing vessel having a fluid flow port, and said fluid pressure regulator is associated with the fluid flow port.

17. A method according to claim 16, wherein the contained fluid is a liquid and the fluid during dispensing is phase-separated upstream of the fluid pressure regulator, to permit only gas to be discharged from the fluid contained in a confined state.

28. A method according to claim 16, wherein the fluid pressure regulator is arranged for discharge of fluid to the fluid flow path at a pressure below 700 Torr.

18. A method of manufacturing a semiconductor product, comprising:

containing the fluid in a confined state against a fluid pressure regulator in a fluid flow path closed to fluid flow downstream of the fluid pressure regulator by a flow control element in said fluid flow path downstream of said fluid pressure regulator;

selectively dispensing the confined fluid by opening the flow control element in said fluid flow path to cause fluid to flow downstream of the fluid pressure regulator, and discharging fluid, so that fluid during such discharge flows through the fluid pressure regulator prior to flow through the flow control element; and

using the discharged fluid in the manufacture of the semiconductor product;

wherein said fluid is maintained in said confined state in an enclosed interior volume of a fluid storage and dispensing vessel having a fluid flow port, and said fluid pressure regulator is associated with the fluid flow port.

19. A method according to claim 18, wherein the use of the discharged fluid comprises ion implantation.

20. A method according to claim 18, wherein the use of the discharged fluid comprises chemical vapor deposition.

30. A method according to claim 18, wherein the fluid pressure regulator is arranged for discharge of fluid to the fluid flow path at a pressure below 700 Torr.

21. A fluid storage and dispensing system, comprising:

a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;

a fluid dispensing assembly coupled in fluid flow communication with the port;

a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;

the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly for discharge of the gas from the vessel;

wherein the fluid pressure regulator is arranged for discharge of the gas from the vessel at a subatmospheric pressure.

25. A semiconductor manufacturing system comprising a semiconductor manufacturing apparatus utilizing a gas, and a source of said gas, wherein said source comprises:

a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;

a fluid dispensing assembly coupled in fluid flow communication with the port;

a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel;

the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, through the fluid pressure regulator and fluid dispensing assembly for discharge of the gas from the vessel;

wherein the fluid pressure regulator is arranged for discharge of the gas from the vessel at a subatmospheric pressure.

27. A method for storage and dispensing of a fluid, comprising:

containing the fluid in a confined state against a fluid pressure regulator in a fluid flow path closed to fluid flow downstream of the fluid pressure regulator; and

selectively dispensing the confined fluid by opening the fluid flow path to fluid flow downstream of the fluid pressure regulator, and discharging fluid at a rate determined by the fluid pressure regulator;

wherein the fluid pressure regulator is arranged for discharge of fluid to the fluid flow path at a subatmospheric pressure.

29. A method of manufacturing a semiconductor product, comprising:

containing the fluid in a confined state against a fluid pressure regulator in a fluid flow path closed to fluid flow downstream of the fluid pressure regulator;

selectively dispensing the confined fluid by opening the fluid flow path to fluid flow downstream of the fluid pressure regulator, and discharging fluid at a rate determined by the fluid pressure regulator;

using the discharged fluid in the manufacture of the semiconductor product;

wherein the fluid pressure regulator is arranged for discharge of fluid to the fluid flow path at a subatmospheric pressure.

31. A fluid storage and dispensing system, comprising:

a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid, wherein the vessel includes a fluid flow port;

a fluid at superatmospheric pressure in said interior volume;

a fluid dispensing assembly coupled in fluid flow communication with the port;

a fluid pressure regulator associated with the port, and arranged to maintain a predetermined pressure of gas discharged from the vessel, deriving from fluid in the interior volume of the vessel so that gas is discharged from the vessel at pressure lower than said superatmospheric pressure;

the fluid dispensing assembly comprising a flow control element which is selectively actuatable to flow gas, deriving from the fluid in the interior volume of the vessel, along a flow path through the fluid pressure regulator and fluid dispensing assembly, for discharge of the gas from the vessel, so that gas during said discharge flows through the fluid pressure regulator prior to flow through the flow control element.

32. A fluid storage and dispensing system according to claim 31, wherein said fluid comprises a fluid species selected from the group consisting of hydrides, halides, etch gases, and cleaning reagents for semiconductor manufacturing equipment.

33. A fluid storage and dispensing system according to claim 31, wherein said fluid comprises a fluid species selected from the group consisting of arsine, phosphine, stibine, silane, chlorosilane, diborane, and boron trifluoride.

34. A fluid storage and dispensing apparatus, comprising:

a fluid storage and dispensing vessel having a neck defining a port of the vessel;

a gas regulator mounted in the port, and set to a predetermined pressure level, for dispensing of gas, deriving from fluid in said vessel, at the predetermined pressure level; and

a valve head joined to the neck of the vessel, said valve head including a valve that is selectively openable or closable, arranged so that gas during said dispensing flows through the fluid pressure regulator prior to flow through the valve, to control dispensing of gas at the predetermined pressure level for which the gas regulator is set.

35. The fluid storage and dispensing apparatus of claim 34, containing a fluid for semiconductor manufacturing.

36. The fluid storage and dispensing apparatus of claim 34, having a single seam at the port.

37. The fluid storage and dispensing apparatus of claim 34, wherein at least a portion of the regulator is within the neck of the vessel.

38. The fluid storage and dispensing apparatus of claim 34, wherein at least a portion of the regulator is in the interior volume of the vessel.

39. The fluid storage and dispensing apparatus of claim 34, wherein the valve of the valve head comprises an automatic valve.

40. The fluid storage and dispensing apparatus of claim 34, wherein the valve of the valve head comprises a manual valve.

41. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising a hydride gas.

42. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising an acid gas.

43. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising a fluid species selected from the group consisting of arsine, phosphine, stibine, silane, and diborane.

44. The fluid storage and dispensing apparatus of claim 34, further comprising a gas-permeable liquid barrier arranged to prevent liquid contact with the gas regulator.

45. The fluid storage and dispensing apparatus of claim 34, wherein the gas regulator comprises a poppet element that is biased to a seat structure to prevent flow at a pressure above the predetermined pressure level.

46. The fluid storage and dispensing apparatus of claim 34, wherein the gas regulator is a fixed set point device.

47. The fluid storage and dispensing apparatus of claim 34, wherein the gas regulator is a variable set point device.

48. The fluid storage and dispensing apparatus of claim 34, wherein said valve head comprises an electrical valve.

49. The fluid storage and dispensing apparatus of claim 34, wherein said valve head comprises a pneumatic valve.

50. The fluid storage and dispensing apparatus of claim 34, wherein said vessel comprises a single port.

51. The fluid storage and dispensing apparatus of claim 34, further comprising a valve actuator for said valve.

52. The fluid storage and dispensing apparatus of claim 51, further comprising a central processor unit coupled in controlling relationship with the valve actuator to modulate flow of gas in said dispensing thereof.

53. The fluid storage and dispensing apparatus of claim 52, wherein the central processor unit is linked in monitoring relationship to a process facility wherein dispensed gas is consumed, to monitor a process condition of said facility and to responsively actuate the valve actuator to modulate flow of gas to the facility in correspondence to requirements of said facility for said gas.

54. The fluid storage and dispensing apparatus of claim 53, wherein the process facility comprises a semiconductor manufacturing facility.

55. The fluid storage and dispensing apparatus of claim 52, wherein the central processor unit is linked in thermal monitoring relationship to the vessel to correspondingly adjust the flow of gas to compensate the flow of gas in relation to temperature of the vessel.

56. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising arsine.

57. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising phosphine.

58. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising stibine.

59. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising silane.

60. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising diborane.

61. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising boron trichloride.

62. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising boron trifluoride.

63. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising a halide.

64. The fluid storage and dispensing apparatus of claim 34, containing a fluid comprising a cleaning reagent.