Precision cutting apparatus and cutting method using the same
First Claim
1. A precision cutting apparatus comprising:
- a chuck table to hold a workpiece that is to be cut in a fixed position, the chuck table being adapted to travel on a feeding-and-cutting path formed in an X-axial direction,first cutting means for cutting the workpiece; and
second cutting means for cutting the workpiece, whereinthe first cutting means is coaxial to the second cutting means and includes a first spindle unit to which a first blade is fixed,the second cutting means includes a second spindle unit to which a second blade is fixed, andthe first and second cutting means hang from an indexing-and-feeding path extending in a Y-axial direction and straddle the feeding-and-cutting path, the first and second blades of the first and second cutting means being in opposing relation to each other, and capable of being permitted to be incrementally fed independently in the Y-axial direction, wherein a linear scale is provided along the indexing-and-feeding path, thereby permitting the indexing-and-feeding of the first and second cutting means in the Y-axial direction to be controlled with the aid of the linear scale and a single linear scale is provided to be used by the first and second cutting means in common.
1 Assignment
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Accused Products
Abstract
Disclosed is an improved precision cutting apparatus comprising a chuck table for holding a workpiece, and first and second cutting means each including a spindle unit having a blade attached thereto. The first and second cutting means are series-arranged with their blades opposing a predetermined distance apart, thereby cutting along two traces at one time by moving the chuck table relative to the stationary cutting means. These cutting means need not be allowed to overrun the workpiece while cutting, thus saving extra time required for overrunning which otherwise, would be required as is the case with the parallel-arrangement of two cutting means, and accordingly the dicing can be performed at an increased efficiency.
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Citations
6 Claims
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1. A precision cutting apparatus comprising:
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a chuck table to hold a workpiece that is to be cut in a fixed position, the chuck table being adapted to travel on a feeding-and-cutting path formed in an X-axial direction, first cutting means for cutting the workpiece; and second cutting means for cutting the workpiece, wherein the first cutting means is coaxial to the second cutting means and includes a first spindle unit to which a first blade is fixed, the second cutting means includes a second spindle unit to which a second blade is fixed, and the first and second cutting means hang from an indexing-and-feeding path extending in a Y-axial direction and straddle the feeding-and-cutting path, the first and second blades of the first and second cutting means being in opposing relation to each other, and capable of being permitted to be incrementally fed independently in the Y-axial direction, wherein a linear scale is provided along the indexing-and-feeding path, thereby permitting the indexing-and-feeding of the first and second cutting means in the Y-axial direction to be controlled with the aid of the linear scale and a single linear scale is provided to be used by the first and second cutting means in common. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification